PROCESS FOR REDUCING THE STRUCTURING TIME OF ORDERED FILMS OF BLOCK COPOLYMER

    公开(公告)号:US20190002684A1

    公开(公告)日:2019-01-03

    申请号:US16061912

    申请日:2016-12-16

    Applicant: ARKEMA FRANCE

    Abstract: Provided is a process for reducing the structuring time of an ordered film of a diblock copolymer on a surface. The process includes curing, on a surface, a composition including a diblock copolymer at a structuring temperature between the Tg of the diblock copolymer and the decomposition temperature of the diblock copolymer to form an ordered film of the diblock copolymer on the substrate. The composition has a product χeffective*N of between 10.5 and 40 at the structuring temperature, where χeffective is the Flory-Huggins parameter of the diblock copolymer and N is the total degree of polymerization of the blocks of the diblock copolymer.

    PROCESS FOR IMPROVING THE CRITICAL DIMENSION UNIFORMITY OF ORDERED FILMS OF BLOCK COPOLYMER

    公开(公告)号:US20180371145A1

    公开(公告)日:2018-12-27

    申请号:US16062460

    申请日:2016-12-16

    Applicant: ARKEMA FRANCE

    Abstract: Provided is a process for improving the critical dimension uniformity of an ordered film of a diblock copolymer on a surface. The process includes curing, on a surface, a composition including a diblock copolymer at a structuring temperature between the Tg of the diblock copolymer and the decomposition temperature of the diblock copolymer to form an ordered film of the diblock copolymer on the substrate. The composition has a product Xeffective*N of between 10.5 and 40 at the structuring temperature, where Xeffective is the Flory-Huggins parameter of the diblock copolymer and N is the total degree of polymerization of the blocks of the diblock copolymer.

    PROCESS FOR OBTAINING THICK ORDERED FILMS WITH INCREASED PERIODS COMPRISING A BLOCK COPOLYMER

    公开(公告)号:US20180364562A1

    公开(公告)日:2018-12-20

    申请号:US16062513

    申请日:2016-12-16

    Applicant: ARKEMA FRANCE

    Abstract: Provided is a process for forming an ordered film of a block copolymer on a surface. The process includes curing, on a surface, a composition comprising at least one block copolymer at a structuring temperature between the highest Tg of the at least one block copolymer and the decomposition temperature of the at least one block copolymer to form an ordered film comprising the at least one block copolymer on the substrate. The composition has a product χ effective*N of between 10.5 and 40 at the structuring temperature, where χ effective is the Flory-Huggins parameter of the block copolymer and N is the total degree of polymerization of the blocks of the block copolymer. The ordered film has a thickness greater than 20 nm and a period greater than 10 nm.

    PROCESS FOR THE CONTROL OF THE SURFACE ENERGY OF A SUBSTRATE
    29.
    发明申请
    PROCESS FOR THE CONTROL OF THE SURFACE ENERGY OF A SUBSTRATE 审中-公开
    控制基板表面能量的方法

    公开(公告)号:US20160369031A1

    公开(公告)日:2016-12-22

    申请号:US15117972

    申请日:2015-02-06

    Applicant: ARKEMA FRANCE

    Abstract: The invention relates to a process for controlling the surface energy of a substrate in order to make it possible to obtain a specific orientation of the nanodomains of a film of block copolymer subsequently deposited on the said surface, the said process being characterized in that it comprises the following stages: preparing a blend of copolymers, each copolymer comprising at least one functional group which allows it to be grafted to or crosslinked on the surface of the said substrate, depositing the said blend thus prepared on the surface of the said substrate, carrying out a treatment which results in the grafting to the surface of the substrate or the crosslinking on the surface of the substrate of each of the copolymers of the blend.

    Abstract translation: 本发明涉及一种用于控制基材的表面能的方法,以获得随后在表面上沉积的嵌段共聚物膜的纳米域的特定取向,其特征在于其包括以下步骤:制备 聚合物的混合物,每个聚合物包含至少一个官能团,使其能够接枝或交联到基材的表面; 将如此制备的混合物沉积在基材的表面上; 进行处理,导致混合物的每种聚合物接枝或交联到基材的表面。

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