公开(公告)号：US20080088840A1

公开(公告)日：2008-04-17

申请号：US11758986

申请日：2007-06-06

Applicant: Andrew Bodkin ,  Andrew Sheinis ,  Adam Norton

Inventor： Andrew Bodkin ,  Andrew Sheinis ,  Adam Norton

IPC: G01J3/28

CPC classification number: G01J3/02 ,  G01J3/0205 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/0235 ,  G01J3/0256 ,  G01J3/0262 ,  G01J3/0286 ,  G01J3/0294 ,  G01J3/14 ,  G01J3/2803 ,  G01J3/2823 ,  G01J3/36 ,  G01J5/061 ,  G02B3/0056 ,  G02B3/08 ,  G02B5/045 ,  G02B26/0883 ,  G02B27/1066 ,  G02B27/123 ,  G02B27/143

Abstract: Hyperspectral imaging systems that may be used for imaging objects in three-dimensions with no moving parts are disclosed. A lenslet array and/or a pinhole array may be used to reimage and divide the field of view into multiple channels. The multiple channels are dispersed into multiple spectral signatures and observed on a two-dimensional focal plane array in real time. The entire hyperspectral datacube is collected simultaneously.

Abstract translation: 公开了可用于三维成像对象的高光谱成像系统，没有移动部件。 可以使用小透镜阵列和/或针孔阵列来重新成像并将视野划分成多个通道。 将多个通道分散到多个光谱特征中，并在二维焦平面阵列上实时观察。 同时收集整个高光谱数据库。

公开(公告)号：US20060072109A1

公开(公告)日：2006-04-06

申请号：US11220016

申请日：2005-09-06

Applicant: Andrew Bodkin ,  Andrew Sheinis ,  Adam Norton

Inventor： Andrew Bodkin ,  Andrew Sheinis ,  Adam Norton

IPC: G01J3/28

CPC classification number: G01J3/02 ,  G01J3/0205 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/0235 ,  G01J3/0256 ,  G01J3/0262 ,  G01J3/0286 ,  G01J3/0294 ,  G01J3/14 ,  G01J3/2803 ,  G01J3/2823 ,  G01J3/36 ,  G01J5/061 ,  G02B3/0056 ,  G02B3/08 ,  G02B5/045 ,  G02B26/0883 ,  G02B27/1066 ,  G02B27/123 ,  G02B27/143

Abstract: Hyperspectral imaging systems that may be used for imaging objects in three-dimensions with no moving parts are disclosed. A lenslet array and/or a pinhole array may be used to reimage and divide the field of view into multiple channels. The multiple channels are dispersed into multiple spectral signatures and observed on a two-dimensional focal plane array in real time. The entire hyperspectral datacube is collected simultaneously.

Abstract translation: 公开了可用于三维成像对象的高光谱成像系统，没有移动部件。 可以使用小透镜阵列和/或针孔阵列来重新成像并将视野划分成多个通道。 将多个通道分散到多个光谱特征中，并在二维焦平面阵列上实时观察。 同时收集整个高光谱数据库。

公开(公告)号：US20050270524A1

公开(公告)日：2005-12-08

申请号：US11096448

申请日：2005-04-01

Applicant: David Wang ,  James Hendrix ,  Adam Norton

Inventor： David Wang ,  James Hendrix ,  Adam Norton

IPC: G01J3/02 ,  G01J3/10 ,  G01J3/12 ,  G01J3/14 ,  G01J3/18 ,  G01J3/28 ,  G01N21/47 ,  G01N21/55 ,  G01N21/95 ,  G01N21/956

CPC classification number: G01N21/55 ,  G01J3/02 ,  G01J3/0229 ,  G01J3/14 ,  G01J3/18 ,  G01J2003/1213 ,  G01J2003/1282 ,  G01N21/4788 ,  G01N21/9501 ,  G01N21/956

Abstract: An optical filter for the selective attenuation of specific wavelengths of light includes at least one spectrally dispersive element, such as a diffraction grating or prism, in combination with an optical filter. A dispersive element separates broadband light into a constituent wavelength spread in angle space. An optical filter, or filter array, can block and/or attenuate specific wavelengths or wavelength ranges of interest while the light is angularly dispersed. A second dispersive element can recombine this filtered, separated wavelength fan of light into a coaxial broadband beam having a smoother intensity profile than the unfiltered beam.

Abstract translation: 用于特定波长的光的选择性衰减的滤光器包括与滤光器组合的至少一个光谱色散元件，例如衍射光栅或棱镜。 分散元件将宽带光分成在角度空间中扩散的构成波长。 光学滤波器或滤波器阵列可以在光被角度地分散时阻挡和/或衰减特定的波长或波长范围。 第二分散元件可以将该经过滤波的分离的波长风扇重新组合成具有比未滤波光束更平滑的强度分布的同轴宽带光束。

公开(公告)号：US20050174575A1

公开(公告)日：2005-08-11

申请号：US11105099

申请日：2005-04-13

Applicant: Adam Norton ,  Abdurrahman Sezginer ,  Fred Stanke

Inventor： Adam Norton ,  Abdurrahman Sezginer ,  Fred Stanke

IPC: G01N21/21 ,  G01N21/25 ,  G01N21/47 ,  G01N21/956

CPC classification number: G01B11/02 ,  G01J3/02 ,  G01J3/0294 ,  G01N21/211 ,  G01N21/25 ,  G01N21/474 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/213

Abstract: An optical measurement system for evaluating a sample has a motor-driven rotating mechanism coupled to an azimuthally rotatable measurement head, allowing the optics to rotate with respect to the sample. A polarimetric scatterometer, having optics directing a polarized illumination beam at non-normal incidence onto a periodic structure on a sample, can measure optical properties of the periodic structure. An E-O modulator in the illumination path can modulate the polarization. The head optics collect light reflected from the periodic structure and feed that light to a spectrometer for measurement. A beamsplitter in the collection path can ensure both S and P polarization from the sample are separately measured. The measurement head can be mounted for rotation of the plane of incidence to different azimuthal directions relative to the periodic structures. The instrument can be integrated within a wafer process tool in which wafers may be provided at arbitrary orientation.

公开(公告)号：US20050073684A1

公开(公告)日：2005-04-07

申请号：US10957249

申请日：2004-10-01

Applicant: Adam Norton

Inventor： Adam Norton

IPC: G01N21/21 ,  G01N21/95 ,  G01J4/00

CPC classification number: G01N21/211 ,  G01N21/9501 ,  G01N2021/213

Abstract: The measurement spot size of small-spot reflectometers, ellipsometers, and similar instruments can be reduced by placing an optical fiber along the optical path of the instrument, such as between an illumination source and a sample or the sample and a detector. The angular range of the probe beam can be adjusted to be less than a natural numerical aperture of the optical fiber. A multimode fiber can be used, which can have a controllable amount of bend or coil, such that rays entering the fiber at larger angles of incidence are attenuated more than rays entering at shallow angles of incidence. Light passing through the fiber can be selectively attenuated and partially mixed to reduce the presence of secondary maxima falling outside the measurement spot. Minimizing these secondary maxima can improve the amount of light measured by the detector that is reflected from inside the measurement spot.

Abstract translation: 可以通过沿着仪器的光路放置光纤，例如在照明源和样品或样品之间放置光纤和检测器来减小小点反射计，椭圆计和类似仪器的测量点尺寸。 可以将探测光束的角度范围调整为小于光纤的自然数值孔径。 可以使用多模光纤，其可以具有可控量的弯曲或线圈，使得以较大的入射角入射到光纤中的光线比以较小入射角进入的光线衰减更多。 穿过纤维的光可以选择性地衰减并部分混合，以减少落在测量点之外的次级最大值的存在。 最小化这些二次最大值可以改善由测量点内部反射的检测器测量的光量。

公开(公告)号：US06870617B2

公开(公告)日：2005-03-22

申请号：US10796322

申请日：2004-03-09

Applicant: Adam Norton ,  Abdurrahman Sezginer ,  Fred E. Stanke ,  Rodney Smedt

Inventor： Adam Norton ,  Abdurrahman Sezginer ,  Fred E. Stanke ,  Rodney Smedt

IPC: G01J3/08 ,  G01J3/42 ,  G01N21/55

CPC classification number: G01J3/02 ,  G01J3/0218 ,  G01J3/08 ,  G01J3/42 ,  G01N21/55

Abstract: The invention is a method and apparatus for determining characteristics of a sample. The system and method provide for detecting a monitor beam reflected off a mirror, where the monitor beam corresponds to the intensity of light incident upon the sample. The system and method also provide for detecting a measurement beam, where the measurement beam has been reflected off the sample being characterized. Both the monitor beam and the measurement beam are transmitted through the same transmission path, and detected by the same detector. Thus, potential sources of variations between the monitor beam and the measurement beam which are not due to the characteristics of the sample are minimized. Reflectivity information for the sample can be determined by comparing data corresponding to the measurement beam relative to data corresponding the monitor beam.

Abstract translation: 本发明是用于确定样品特性的方法和装置。 该系统和方法提供用于检测从反射镜反射的监视光束，其中监视光束对应于入射在样本上的光的强度。 该系统和方法还提供了用于检测测量光束，其中测量光束已经从被表征的样品反射出来。 监测光束和测量光束都通过相同的传输路径传输，并由相同的检测器检测。 因此，监测光束和测量光束之间不是由于样品特性引起的变化的潜在来源被最小化。 可以通过将与测量光束相对应的数据相对于监视光束对应的数据进行比较来确定样本的反射率信息。