DEPOSITION APPARATUS AND METHOD OF DEPOSITING SUBSTRATE

    公开(公告)号:US20250137131A1

    公开(公告)日:2025-05-01

    申请号:US18670957

    申请日:2024-05-22

    Abstract: A deposition apparatus includes: a chamber; a support unit within the chamber and including a chuck and a driving member, wherein a substrate is seated on the chuck, wherein the chuck has a first process position and a second process position, wherein the first process position is for processing the substrate in a first process, wherein the second process position is for processing the substrate in a second process, wherein the driving member moves the chuck between the first process position and the second process position; a showerhead supplying process gas toward the substrate, when the chuck is located in the first process position; a power supply unit supplying power to generate plasma between the chuck and the showerhead; and a first ultraviolet lamp disposed in the chamber and emitting ultraviolet rays toward the substrate, when the chuck is located in the second process position.

    SPIN CHUCK AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME

    公开(公告)号:US20250135591A1

    公开(公告)日:2025-05-01

    申请号:US18927195

    申请日:2024-10-25

    Abstract: A spin chuck includes an upper plate having an upper surface and a lower surface, the upper plate including a groove and a support pin on the upper surface of the upper plate, wherein the support pin is configured to support a substrate; an anti-slip plate below the upper plate, the anti-slip plate having an upper surface and a lower surface, wherein the anti-slip plate includes a first protrusion protruding in a vertical direction from the upper surface of the anti-slip plate toward the upper plate; and a lower plate below the anti-slip plate, the lower plate including a chucking pin configured to fix the substrate, wherein the lower plate has an upper surface and a lower surface, wherein the first protrusion of the anti-slip plate is coupled to the groove of the upper plate.

    CLEANING ROBOT, MAINTENANCE STATION AND CLEANING SYSTEM HAVING THEM

    公开(公告)号:US20250134335A1

    公开(公告)日:2025-05-01

    申请号:US18966900

    申请日:2024-12-03

    Abstract: A cleaning system includes a cleaning robot including first and second driving wheels, a first coupling portion, a second coupling portion, a third coupling portion, and a fourth coupling portion, and a first processor configured to control a driving of the first and second driving wheels, and a maintenance station including a housing in which a storage space is provided, a lifting plate including a first fixing projection, a second fixing projection, a third fixing projection, and a fourth fixing projection, a door configured to open or close the storage space of the housing, and a second processor configured to control a driving of the lifting plate. The first fixing projection, the second fixing projection, the third fixing projection, and the fourth fixing projection are coupled to the first coupling portion, the second coupling portion, the third coupling portion, and the fourth coupling portions, respectively.

    Data storage system configuration to perform data rebuild operation via reduced read requests

    公开(公告)号:USRE50408E1

    公开(公告)日:2025-04-29

    申请号:US17470041

    申请日:2021-09-09

    Abstract: A data storage system configured to perform a data rebuild operation via a reduced number of read requests includes a host and a redundant array of independent disks (RAID) device including a plurality of data storage devices. When the host receives data of a first region and data of a second region of a read-requested region of each of the data storage devices in response to a rebuild request, the host receives failed address list information of the second region. The first region is a normal region, and the second region is a faulty region. The host rebuilds the data of the second region based on the failed address list information.

    Semiconductor devices
    268.
    发明授权

    公开(公告)号:US12289911B2

    公开(公告)日:2025-04-29

    申请号:US18378710

    申请日:2023-10-11

    Abstract: A semiconductor device includes an active pattern on a substrate, the active pattern extending in a first direction parallel to an upper surface of the substrate, a gate structure on the active pattern, the gate structure extending in a second direction parallel to the upper surface of the substrate and crossing the first direction, channels spaced apart from each other in a third direction perpendicular to the upper surface of the substrate, each of the channels extending through the gate structure, a source/drain layer on a portion of the active pattern adjacent the gate structure, the source/drain layer contacting the channels, and a sacrificial pattern on an upper surface of each of opposite edges of the portion of the active pattern in the second direction, the sacrificial pattern contacting a lower portion of a sidewall of the source/drain layer and including silicon-germanium.

    Electronic device including conductive member

    公开(公告)号:US12289843B2

    公开(公告)日:2025-04-29

    申请号:US18403020

    申请日:2024-01-03

    Abstract: An electronic device is provided. The electronic device includes a foldable display, a decoration member made of a resin material to surround at least a portion of the foldable display, a support member configured to support the foldable display and including a metal area connected to the decoration member, and a conductive member disposed on the decoration member and electrically connected to the metal area. The conductive member may include a first conductive member arranged to face the support member and a second conductive member arranged parallel to the first conductive member and electrically connected to the first conductive member.

    Method and device for transmitting or receiving data in wireless communication system

    公开(公告)号:US12289716B2

    公开(公告)日:2025-04-29

    申请号:US18626766

    申请日:2024-04-04

    Abstract: A user equipment for transmitting and receiving a signal in a wireless communication system may include a transceiver configured to receive, from a base station, downlink control information (DCI), and at least one processor configured to, based on a configuration state of a supplementary uplink (SUL) carrier indicated to the user equipment by the base station, determine whether information indicating activation or inactivation of the SUL carrier is present in the DCI, and based on a result of the determining of whether the information indicating activation or inactivation of the SUL carrier is present, determine a carrier to transmit uplink data scheduled by using the DCI.

Patent Agency Ranking