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178 条记录 (耗时 0.028 秒)

    Image acquisition apparatus, conversion apparatus and image acquisition method
    12.
    发明授权
    Image acquisition apparatus, conversion apparatus and image acquisition method 有权
    图像采集装置，转换装置和图像采集方法

    公开(公告)号：US07820968B2

    公开(公告)日：2010-10-26

    申请号：US12219761

    申请日：2008-07-28

    申请人： Akito Sakemoto ,  Satoru Onuki

    发明人： Akito Sakemoto ,  Satoru Onuki

    IPC分类号： G02F1/01

    CPC分类号： G01J5/58 ,  G01J2005/0077 ,  G01K11/125 ,  H04N5/33

    摘要： An image acquisition apparatus acquires an image indicating an intensity distribution of infrared light. The image acquisition apparatus includes a conductive thin film, a dielectric layer placed on the thin film, a base to support the thin film and the dielectric layer in this order on a principal surface, a light source to emit light to an interface between the thin film and the base, and an image pickup device to receive light reflected on the interface between the thin film and the base.

    摘要翻译： 图像获取装置获取表示红外光的强度分布的图像。 图像获取装置包括导电薄膜，介于薄膜上的介质层，在主表面上依次支撑薄膜和电介质层的基底，将光发射到薄的 胶片和底座，以及用于接收在薄膜和基底之间的界面上反射的光的图像拾取装置。

    Thermal Detector
    14.
    发明申请
    Thermal Detector 有权
    热检测器

    公开(公告)号：US20090238236A1

    公开(公告)日：2009-09-24

    申请号：US12227695

    申请日：2007-05-24

    申请人： Karl Fleury-Frenette ,  Serge Habraken ,  Yvone Renotte ,  Jurij Hastanin

    发明人： Karl Fleury-Frenette ,  Serge Habraken ,  Yvone Renotte ,  Jurij Hastanin

    IPC分类号： G01J5/00 ,  G01N21/00

    CPC分类号： G01J5/58 ,  G01J5/40

    摘要： A first object of the invention is a radiation detector comprising an energy absorber (203), for absorbing incident radiation (RAD) and thus undergoing a temperature increase; and optical readout means, for detecting said temperature increase; wherein said optical readout means comprises input coupling means (202) for coupling a light beam (2011) to said energy absorber (203) by exciting surface plasmons resonance, a surface plasmons resonance condition being dependent on the energy absorber (203) temperature, and wherein said energy absorber (203) is separated from said input coupling means (202) by a dielectric layer (2032).A second object of the invention is a micromechanical sensor comprising: a micromechanical oscillator and optical readout means (202) for detecting a displacement of said micromechanical oscillator; wherein said optical readout means comprise input coupling means (202) for coupling a light beam (2011) to a conductive surface (2031) by exciting surface plasmons resonance, a surface plasmons resonance condition being dependent on the displacement of said micromechanical oscillator.

    摘要翻译： 本发明的第一个目的是一种辐射检测器，其包括用于吸收入射辐射（RAD）并因此经历升温的能量吸收器（203）; 以及用于检测所述温度升高的光学读出装置; 其中所述光学读出装置包括通过激发表面等离子体共振，依赖于能量吸收器（203）温度的表面等离子体共振条件将光束（2011）耦合到所述能量吸收器（203）的输入耦合装置（202） 其中所述能量吸收器（203）通过电介质层（2032）与所述输入耦合装置（202）分离。 本发明的第二个目的是一种微机械传感器，包括：微机械振荡器和用于检测所述微机械振荡器位移的光学读出装置（202）; 其中所述光读出装置包括用于通过激发表面等离子体共振将光束（2011）耦合到导电表面（2031）的输入耦合装置（202），表面等离子体共振条件取决于所述微机械振荡器的位移。

    PIXEL ARCHITECTURE FOR THERMAL IMAGING SYSTEM
    15.
    发明申请
    PIXEL ARCHITECTURE FOR THERMAL IMAGING SYSTEM 有权
    用于热成像系统的像素架构

    公开(公告)号：US20090026370A1

    公开(公告)日：2009-01-29

    申请号：US12176931

    申请日：2008-07-21

    申请人： Matthias WAGNER ,  Shuyun WU ,  Eugene Y. MA

    发明人： Matthias WAGNER ,  Shuyun WU ,  Eugene Y. MA

    IPC分类号： G03G5/16

    CPC分类号： G01J5/58 ,  G01J5/00 ,  G01J2005/0077 ,  H01L27/14603 ,  H01L27/1462 ,  H01L27/14649 ,  H01L27/14687

    摘要： A thermal imaging device including: a substrate; and an array of thermally tunable pixel elements for generating a thermal image, each thermally tunable pixel element including: a plurality of thermally tunable filter islands, each of which has a thermally tunable optical filter, wherein each of the plurality of tunable filter islands within that pixel element is thermally isolated from the other tunable filter islands within that tunable pixel element; an absorption structure for absorbing incident optical thermal energy; and a mechanical structure supporting the plurality of tunable filter islands and the absorption structure on the substrate.

    摘要翻译： 一种热成像装置，包括：基板; 以及用于产生热图像的热可调节像素元件阵列，每个热可调谐像素元件包括：多个热可调谐滤光片岛，每个散热岛具有热可调光滤光器，其中该可调谐滤光片岛中的每一个在该可调谐滤光片岛内 像素元件与该可调谐像素元件内的其它可调谐滤光片岛热隔离; 用于吸收入射光学热能的吸收结构; 以及支撑多个可调谐滤光片岛和基片上的吸收结构的机械结构。

    Emissivity-independent silicon surface temperature measurement
    17.
    发明申请
    Emissivity-independent silicon surface temperature measurement 失效

    公开(公告)号：US20070056940A1

    公开(公告)日：2007-03-15

    申请号：US10052351

    申请日：2002-01-23

    申请人： Leslie Salem ,  Eitan Zeiler ,  Omri Govrin

    发明人： Leslie Salem ,  Eitan Zeiler ,  Omri Govrin

    IPC分类号： B23K26/03

    CPC分类号： G01J5/0003 ,  G01J5/522 ,  G01J5/58 ,  G01J2005/0077

    摘要： A method and system for measuring remotely the surface temperature of a silicon wafer and layers, without the need to know the surface emissivity. The surface temperature is measured in-situ and in real-time during a high-temperature process, in a vacuum system, by using the linear polarization property of radiation. A blackbody source is heated to various, known temperatures, and provides radiation that impinges on the silicon surface and is reflected from it together with a self-emitted component. This combined reflected radiation is polarized and filtered to an appropriate wavelength, and observed with an imaging camera. Pairs of orthogonally polarized images of the surface are obtained for a set silicon surface temperature and for each blackbody temperature. The pairs of images are analyzed, pixel by pixel, to obtain a null polar level indicative of the surface temperature. The system is provided with means for rapid variation of the blackbody temperature, thus allowing measurement of rapidly changing silicon surface temperatures.

    Submicron thermal imaging method and enhanced resolution (super-resolved) AC-coupled imaging for thermal inspection of integrated circuits
    18.
    发明授权
    Submicron thermal imaging method and enhanced resolution (super-resolved) AC-coupled imaging for thermal inspection of integrated circuits 有权
    亚微米热成像方法和增强分辨率（超分辨率）AC耦合成像用于集成电路的热检测

    公开(公告)号：US07173245B2

    公开(公告)日：2007-02-06

    申请号：US10039290

    申请日：2002-01-04

    申请人： Ali Shakouri ,  Peyman Milanfar ,  Kenneth Pedrotti ,  James Christofferson

    发明人： Ali Shakouri ,  Peyman Milanfar ,  Kenneth Pedrotti ,  James Christofferson

    IPC分类号： G01J5/02

    CPC分类号： G01J5/58 ,  G01J5/00 ,  G01J5/0096 ,  G01J5/08 ,  G01J5/0862 ,  G01J5/0896 ,  G01J2005/0077

    摘要： Methods and apparatus for non-contact thermal measurement which are capable of providing sub micron surface thermal characterization of samples, such as active semiconductor devices. The method obtains thermal image information by reflecting a light from a surface of a device in synchronous with the modulation of the thermal excitation and then acquiring and processing an AC-coupled thermoreflective image. The method may be utilized for making measurements using different positioning techniques, such as point measurements, surface scanning, two-dimensional imaging, and combinations thereof. A superresolution method is also described for increasing the resultant image resolution, based on multiple images with fractional pixel offsets, without the need to increase the resolution of the image detectors being utilized. The thermoreflective method provides a spatial resolution better than current infrared cameras, operates within a wide temperature range, and is capable of a thermal resolution on the order of 10 mK°.

    摘要翻译： 用于非接触式热测量的方法和装置，其能够提供诸如有源半导体器件的样品的亚微米表面热表征。 该方法通过与热激发的调制同步地反射来自装置的表面的光，然后获取和处理AC耦合的热反射图像来获得热图像信息。 该方法可以用于使用不同的定位技术进行测量，例如点测量，表面扫描，二维成像及其组合。 还描述了超分辨率方法，用于基于具有分数像素偏移的多个图像来增加所得到的图像分辨率，而不需要增加正在使用的图像检测器的分辨率。 该热反射方法提供的空间分辨率优于目前的红外摄像机，在宽温度范围内工作，并能够在10 mK°的数量级下进行热分解。

    Methods and apparatus for remote temperature measurement of a specular surface
    19.
    发明申请
    Methods and apparatus for remote temperature measurement of a specular surface 有权
    用于远程测量镜面的方法和装置

    公开(公告)号：US20060255017A1

    公开(公告)日：2006-11-16

    申请号：US11129971

    申请日：2005-05-16

    申请人： David Markle

    发明人： David Markle

    IPC分类号： B23K26/04

    CPC分类号： G01K11/125 ,  G01J5/0003 ,  G01J5/58 ,  G01J2005/0077

    摘要： Methods and apparatus for remotely measuring the temperature of a specular surface are disclosed. The method includes taking two different measurements of P-polarized radiation emitted from the surface at or near the Brewster angle associated with the surface. The first measurement (SA) collects and detects a first amount of radiation emitted directly from a surface portion using a collection optical system. The second measurement (SB) includes the first amount of radiation and adds a quantity of radiation collected at or near the Brewster angle and reflected from the surface. This is accomplished with a retro optical system with a round-trip transmission t2 that retro-reflects a quantity of radiation received from the surface portion back to the same surface portion where it is reflected and combined with the first amount of radiation collected by the collection optical system. Measurements SA and SB and the transmission, t2, are used to determine the surface emissivity (ξ). A calibration curve is then used that relates the ratio of the first measurement SA to the surface emissivity ξ, (SA/ξ), to surface temperature. The calibration curve is then used to determine the surface temperature from the SA/ξ value.

    摘要翻译： 公开了用于远程测量镜面温度的方法和装置。 该方法包括在与表面相关联的布鲁斯特角处或附近从表面发射的P偏振辐射的两种不同测量。 第一测量（SA）使用收集光学系统收集并检测从表面部分直接发射的第一量的辐射。 第二测量（SB）包括第一辐射量并且增加在布鲁斯特角度处或附近收集的辐射量并从表面反射。 这是通过具有往返传输t 2的复古光学系统实现的，其将从表面部分接收的辐射量反射回到与其反射并与其组合的相同表面部分 由收集光学系统收集的第一量的辐射。 测量SA和SB以及透射率t 2 2用于确定表面发射率（xi）。 然后使用将第一测量SA与表面发射率xi（SA / xi）的比率与表面温度相关联的校准曲线。 然后使用校准曲线从SA / xi值确定表面温度。

    Optical detectors for infrared, sub-millimeter and high energy radiation
    20.
    发明申请
    Optical detectors for infrared, sub-millimeter and high energy radiation 有权
    用于红外，亚毫米和高能量辐射的光学探测器

    公开(公告)号：US20060214113A1

    公开(公告)日：2006-09-28

    申请号：US11371792

    申请日：2006-03-09

    申请人： Marcos Kleinerman

    发明人： Marcos Kleinerman

    IPC分类号： G01T1/10

    CPC分类号： G01J1/58 ,  G01J5/046 ,  G01J5/061 ,  G01J5/0853 ,  G01J5/58 ,  G01T1/1606

    摘要： Optical methods and devices for the thermal detection and imaging of infrared, sub-millimeter, millimeter and high energy radiation, wherein the thermal mass of the detector is minimized by the use of microscopic photoluminescent temperature probes having a weight mass which can be of the order of 10−11 grams or smaller. Used for detection of high energy radiation, including quantum calorimetry, said temperature probes allow non-contact measurements free of electrical sources of noise like Johnson noise or Joule heating.

    摘要翻译： 用于红外，亚毫米，毫米和高能量辐射的热检测和成像的光学方法和装置，其中通过使用具有重量质量的微观光致发光温度探针来最小化检测器的热质量 为10〜11克以下。 用于高能量辐射的检测，包括量子量热法，所述温度探头允许非接触式测量不受诸如约翰逊噪声或焦耳加热的电噪声源。