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    MAGNETOMETER USING MAGNETIC MATERIALS ON ACCELEROMETER
    13.
    发明申请
    MAGNETOMETER USING MAGNETIC MATERIALS ON ACCELEROMETER 有权
    磁力计使用磁性材料加速度计

    公开(公告)号：US20140266170A1

    公开(公告)日：2014-09-18

    申请号：US14208222

    申请日：2014-03-13

    Applicant: Invensense, Inc.

    Inventor： Joseph Seeger ,  Jin Qiu ,  Matthew Julian Thompson

    IPC: G01R33/02 ,  B81B7/02 ,  G01P15/02

    CPC classification number: G01R33/02 ,  B81B2201/00 ,  G01P15/08 ,  G01R33/0286 ,  H01L21/00 ,  H01L2221/00

    Abstract: A MEMS device including a first proof mass, a first magnetized magnetic material disposed partially on a surface of the first proof mass, a first spring anchored to a substrate to support the first proof mass, and a first sensing element coupled to the first proof mass and operable to sense the motion of the first proof mass caused by an ambient acceleration. The MEMS device further includes a second sensing element coupled to the first proof mass and operable to sense the motion of the first proof mass caused by an ambient magnetic field

    Abstract translation: 一种MEMS器件，包括第一检测质量体，部分地设置在第一检验质量体的表面上的第一磁化磁性材料，锚固到基板以支撑第一检测质量块的第一弹簧，以及耦合到第一检测质量块的第一感测元件 并且可操作以感测由环境加速度引起的第一检测质量块的运动。 MEMS器件还包括耦合到第一检验质量块的第二感测元件，并且可操作以感测由环境磁场引起的第一检验质量块的运动

    MEMS process and device
    14.
    发明授权
    MEMS process and device 有权
    MEMS工艺和器件

    公开(公告)号：US08698256B2

    公开(公告)日：2014-04-15

    申请号：US13902344

    申请日：2013-05-24

    Applicant: Wolfson Microelectronics plc

    Inventor： Anthony Bernard Traynor ,  Richard Ian Laming ,  Tsjerk Hans Hoekstra

    IPC: H01L29/84

    CPC classification number: H04R19/04 ,  B81B3/0021 ,  B81B3/0072 ,  B81B3/0094 ,  B81B2201/00 ,  B81B2201/0235 ,  B81B2201/0257 ,  B81B2201/0264 ,  H01L27/00 ,  H04R19/00 ,  H04R19/005 ,  H04R23/00 ,  H04R31/00 ,  H04R2499/11

    Abstract: A method of fabricating a micro-electrical-mechanical system (MEMS) transducer comprises the steps of forming a membrane on a substrate, and forming a back-volume in the substrate. The step of forming a back-volume in the substrate comprises the steps of forming a first back-volume portion and a second back-volume portion, the first back-volume portion being separated from the second back-volume portion by a step in a sidewall of the back-volume. The cross-sectional area of the second back-volume portion can be made greater than the cross-sectional area of the membrane, thereby enabling the back-volume to be increased without being constrained by the cross-sectional area of the membrane. The back-volume may comprise a third back-volume portion. The third back-volume portion enables the effective diameter of the membrane to be formed more accurately.

    Abstract translation: 制造微机电系统（MEMS）换能器的方法包括以下步骤：在衬底上形成膜，并在衬底中形成后体积。 在基板中形成后部体积的步骤包括以下步骤：形成第一后部体积部分和第二后部体积部分，第一后部体积部分与第二背部体积部分分离， 背部体积的侧壁。 第二后部容积部分的横截面面积可以大于膜的横截面面积，从而能够增加后部体积，而不受膜的横截面面积的约束。 背部容积可以包括第三后部体积部分。 第三后部体积部分能够更准确地形成膜的有效直径。

    MEMS PROCESS AND DEVICE
    15.
    发明申请
    MEMS PROCESS AND DEVICE 有权
    MEMS工艺和器件

    公开(公告)号：US20110089504A1

    公开(公告)日：2011-04-21

    申请号：US12673925

    申请日：2008-08-15

    Applicant: Anthony Bernard Traynor ,  Richard Ian Laming ,  Tsjerk Hans Hoekstra

    Inventor： Anthony Bernard Traynor ,  Richard Ian Laming ,  Tsjerk Hans Hoekstra

    IPC: H01L29/84 ,  H01L21/02

    CPC classification number: H04R19/04 ,  B81B3/0021 ,  B81B3/0072 ,  B81B3/0094 ,  B81B2201/00 ,  B81B2201/0235 ,  B81B2201/0257 ,  B81B2201/0264 ,  H01L27/00 ,  H04R19/00 ,  H04R19/005 ,  H04R23/00 ,  H04R31/00 ,  H04R2499/11

    Abstract: A method of fabricating a micro-electrical-mechanical system (MEMS) transducer comprises the steps of forming a membrane (5) on a substrate (3), and forming a back-volume in the substrate. The step of forming a back-volume in the substrate comprises the steps of forming a first back-volume portion (7a) and a second back-volume portion (7b), the first back-volume portion (7a) being separated from the second back-volume portion (7b) by a step in a sidewall of the back-volume. The cross-sectional area of the second back-volume portion (7b) can be made greater than the cross-sectional area of the membrane (5), thereby enabling the back-volume to be increased without being constrained by the cross-sectional area of the membrane (5). The back-volume may comprise a third back-volume portion. The third back-volume portion enables the effective diameter of the membrane to be formed more accurately.

    Abstract translation: 制造微机电系统（MEMS）换能器的方法包括以下步骤：在衬底（3）上形成膜（5），并在衬底中形成后体积。 在衬底中形成背部体积的步骤包括形成第一后部容积部分（7a）和第二后部体积部分（7b）的步骤，第一后部体积部分（7a）与第二后部体积部分 后体积部分（7b）通过后体积的侧壁中的台阶。 第二后部容积部分（7b）的横截面面积可以大于膜（5）的横截面面积，从而能够增加后部体积而不受横截面积的约束 的膜（5）。 背部容积可以包括第三后部体积部分。 第三后部体积部分能够更准确地形成膜的有效直径。

    WIRELESS POWER TRANSMISSION SYSTEM
    20.
    发明申请
    WIRELESS POWER TRANSMISSION SYSTEM 有权
    无线电力传输系统

    公开(公告)号：US20130300207A1

    公开(公告)日：2013-11-14

    申请号：US13888301

    申请日：2013-05-06

    Applicant: LOCKHEED MARTIN CORPORATION

    Inventor： Li Leah WANG

    IPC: H04B5/00

    CPC classification number: H04B5/0037 ,  B81B7/00 ,  B81B2201/00 ,  H04B5/0087

    Abstract: Various aspects of the subject technology include a wireless power transmission design based on extended range near-field resonance coupling induction, where magnetic near-field range may be extended by several orders of magnitude. One element that may help to accomplish the near-field extension, in one aspect, is the addition of a transformational magnetic lens to the transmitter. The magnetic lens may be made of metamaterials with refractive index of for example, −1. It may recover and collimate the near-field evanescent, magnetic flux, effectively extending the near-field coupling distance by several orders of magnitude.

    Abstract translation: 主题技术的各个方面包括基于扩展范围近场共振耦合感应的无线电力传输设计，其中磁场近场范围可以扩展几个数量级。 在一个方面，可以帮助实现近场延伸的一个元件是向变送器添加变换磁性透镜。 磁性透镜可以由折射率为例如-1的超材料制成。 它可以恢复和准直近场ev逝，磁通量，有效地将近场耦合距离延伸几个数量级。

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