公开(公告)号：US20170332178A1

公开(公告)日：2017-11-16

申请号：US15665941

申请日：2017-08-01

Applicant: Cirrus Logic International Semiconductor Ltd.

Inventor： Anthony Bernard Traynor ,  Richard Ian Laming ,  Tsjerk H. Hoekstra

IPC: H04R19/04 ,  B81B3/00 ,  H04R19/00 ,  H04R31/00 ,  H01L27/00 ,  H04R23/00

CPC classification number: H04R19/04 ,  B81B3/0021 ,  B81B3/0072 ,  B81B3/0094 ,  B81B2201/00 ,  B81B2201/0235 ,  B81B2201/0257 ,  B81B2201/0264 ,  H01L27/00 ,  H04R19/00 ,  H04R19/005 ,  H04R23/00 ,  H04R31/00 ,  H04R2499/11

Abstract: A method of fabricating a micro-electrical-mechanical system (MEMS) transducer comprises the steps of forming a membrane on a substrate, and forming a back-volume in the substrate. The step of forming a back-volume in the substrate comprises the steps of forming a first back-volume portion and a second back-volume portion, the first back-volume portion being separated from the second back-volume portion by a step in a sidewall of the back-volume. The cross-sectional area of the second back-volume portion can be made greater than the cross-sectional area of the membrane, thereby enabling the back-volume to be increased without being constrained by the cross-sectional area of the membrane. The back-volume may comprise a third back-volume portion. The third back-volume portion enables the effective diameter of the membrane to be formed more accurately.

公开(公告)号：US20160255442A1

公开(公告)日：2016-09-01

申请号：US15148375

申请日：2016-05-06

Applicant: Cirrus Logic International Semiconductor Ltd.

Inventor： Anthony Bernard Traynor ,  Richard Ian Laming ,  Tsjerk H. Hoekstra

IPC: H04R19/04 ,  H04R31/00 ,  H04R19/00

CPC classification number: H04R19/04 ,  B81B3/0021 ,  B81B3/0072 ,  B81B3/0094 ,  B81B2201/00 ,  B81B2201/0235 ,  B81B2201/0257 ,  B81B2201/0264 ,  H01L27/00 ,  H04R19/00 ,  H04R19/005 ,  H04R23/00 ,  H04R31/00 ,  H04R2499/11

Abstract: A method of fabricating a micro-electrical-mechanical system (MEMS) transducer comprises the steps of forming a membrane on a substrate, and forming a back-volume in the substrate. The step of forming a back-volume in the substrate comprises the steps of forming a first back-volume portion and a second back-volume portion, the first back-volume portion being separated from the second back-volume portion by a step in a sidewall of the back-volume. The cross-sectional area of the second back-volume portion can be made greater than the cross-sectional area of the membrane, thereby enabling the back-volume to be increased without being constrained by the cross-sectional area of the membrane. The back-volume may comprise a third back-volume portion. The third back-volume portion enables the effective diameter of the membrane to be formed more accurately.

公开(公告)号：US10750291B2

公开(公告)日：2020-08-18

申请号：US15987346

申请日：2018-05-23

Applicant: Cirrus Logic International Semiconductor Ltd.

Inventor： Marek Sebastian Piechocinski ,  Richard Ian Laming ,  Tsjerk Hans Hoekstra ,  Colin Robert Jenkins ,  Axel Thomsen

IPC: H04R1/08 ,  H04R9/08 ,  H04R11/04 ,  H04R17/02 ,  H04R21/02 ,  H04R19/04 ,  B81B3/00 ,  H04R19/00

Abstract: The application describes MEMS transducers having a patterned membrane electrode which incorporates a plurality of openings or voids. A conductive element is provided on the surface of the underlying membrane within the opening.

公开(公告)号：US10343901B2

公开(公告)日：2019-07-09

申请号：US15543492

申请日：2016-01-25

Applicant: Cirrus Logic International Semiconductor Ltd.

Inventor： Scott Lyall Cargill ,  Colin Robert Jenkins ,  Euan James Boyd ,  Richard Ian Laming

IPC: B81C1/00 ,  H04R19/00 ,  H04R19/04 ,  B81B3/00

Abstract: The application describes MEMS transducer having a flexible membrane and which seeks to alleviate and/or redistribute stresses within the membrane layer. A membrane having a first/active region and a second/inactive region is described.

公开(公告)号：US09756430B2

公开(公告)日：2017-09-05

申请号：US15148375

申请日：2016-05-06

Applicant: Cirrus Logic International Semiconductor Ltd.

Inventor： Anthony Bernard Traynor ,  Richard Ian Laming ,  Tsjerk H. Hoekstra

IPC: H01L29/84 ,  H04R19/04 ,  B81B3/00 ,  H01L27/00 ,  H04R19/00 ,  H04R31/00 ,  H04R23/00

CPC classification number: H04R19/04 ,  B81B3/0021 ,  B81B3/0072 ,  B81B3/0094 ,  B81B2201/00 ,  B81B2201/0235 ,  B81B2201/0257 ,  B81B2201/0264 ,  H01L27/00 ,  H04R19/00 ,  H04R19/005 ,  H04R23/00 ,  H04R31/00 ,  H04R2499/11

Abstract: A method of fabricating a micro-electrical-mechanical system (MEMS) transducer comprises the steps of forming a membrane on a substrate, and forming a back-volume in the substrate. The step of forming a back-volume in the substrate comprises the steps of forming a first back-volume portion and a second back-volume portion, the first back-volume portion being separated from the second back-volume portion by a step in a sidewall of the back-volume. The cross-sectional area of the second back-volume portion can be made greater than the cross-sectional area of the membrane, thereby enabling the back-volume to be increased without being constrained by the cross-sectional area of the membrane. The back-volume may comprise a third back-volume portion. The third back-volume portion enables the effective diameter of the membrane to be formed more accurately.