公开(公告)号：US20220375717A1

公开(公告)日：2022-11-24

申请号：US17668369

申请日：2022-02-09

Applicant: Samsung Display Co., Ltd.

Inventor： Yong-Suk LEE ,  Suk-Won JUNG ,  Myung-Soo HUH ,  Mi-Ra AN

IPC: H01J37/32 ,  H01L51/52 ,  C23C16/505

Abstract: A plasma processing apparatus including: a chamber configured to provide a space for processing a substrate; a substrate stage configured to support the substrate within the chamber and including a first electrode, the first electrode configured to receive a first radio frequency signal; a second electrode disposed on an upper portion of the chamber to face the first electrode, the second electrode configured to receive a second radio frequency signal; a gas supply unit configured to supply a process gas onto the substrate within the chamber; and a thermal control unit configured to circulate a heat transfer medium through a first fluid passage provided in the first electrode and a second fluid passage provided in the second electrode to maintain the first and second electrodes at the same temperature.

公开(公告)号：US20150243827A1

公开(公告)日：2015-08-27

申请号：US14711543

申请日：2015-05-13

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Suk-Won JUNG ,  Hyang-Shik KONG ,  Sung-Hoon YANG ,  Sang-Youn HAN ,  Kyung-Sook JEON ,  Seung-Mi SEO ,  Mi-Seon SEO

IPC: H01L31/112 ,  H01L27/144 ,  G02F1/1368 ,  G02F1/1333 ,  G02F1/1335 ,  H01L27/12 ,  H01L29/66

CPC classification number: H01L31/112 ,  G02F1/133345 ,  G02F1/13338 ,  G02F1/133512 ,  G02F1/1368 ,  G06F3/0421 ,  H01L27/1222 ,  H01L27/124 ,  H01L27/1255 ,  H01L27/1443 ,  H01L27/1446 ,  H01L27/14678 ,  H01L29/66765 ,  H01L31/167

Abstract: A display substrate includes a pixel switching element, a pixel electrode, a reference line, a control switching element, a bias line, a light sensing element, a sensing capacitor and a light blocking filter pattern. The pixel switching element is connected to a data line and a gate line, includes a first semiconductor pattern. The pixel electrode is connected to the pixel switching element. The reference line is in parallel with the data line. The control switching element is connected to the reference line and the gate line, includes a second semiconductor pattern. The bias line is in parallel with the gate line. The light sensing element is connected to the bias line and the control switching element, includes a third semiconductor pattern. The sensing capacitor is connected to the light sensing element and a storage line. The light blocking filter pattern transmits a first light, and blocks a second light.

Abstract translation: 显示基板包括像素开关元件，像素电极，参考线，控制开关元件，偏置线，感光元件，感测电容器和遮光滤光片图案。 像素开关元件连接到数据线和栅极线，包括第一半导体图案。 像素电极连接到像素开关元件。 参考线与数据线并行。 控制开关元件连接到参考线并且栅极线包括第二半导体图案。 偏置线与栅极线并联。 光感测元件连接到偏置线并且控制开关元件包括第三半导体图案。 感测电容器连接到光感测元件和存储线。 遮光滤光片图案透射第一光，并阻挡第二光。

公开(公告)号：US20150108443A1

公开(公告)日：2015-04-23

申请号：US14331846

申请日：2014-07-15

Applicant: Samsung Display Co., Ltd.

Inventor： Myung-Soo HUH ,  Jae-Hyun KIM ,  Jin-Kwang KIM ,  Cheol-Lae ROH ,  Suk-Won JUNG ,  Cheol-Min JANG

IPC: H01L51/52 ,  H01L51/56

CPC classification number: H01L51/5256 ,  H01L51/5253

Abstract: An organic light-emitting apparatus including: a substrate; an organic light-emitting device disposed on the substrate and including a first electrode, a second electrode, and an intermediate layer disposed between the first electrode and the second electrode; and an encapsulation layer provided to cover the organic light-emitting device. The encapsulation layer includes a first inorganic layer including a first fracture point, and a first fracture control layer provided on the first inorganic layer to seal the first fracture point.

Abstract translation: 一种有机发光装置，包括：基板; 设置在所述基板上并且包括设置在所述第一电极和所述第二电极之间的第一电极，第二电极和中间层的有机发光器件; 以及设置成覆盖有机发光器件的封装层。 封装层包括包含第一断裂点的第一无机层和设置在第一无机层上以密封第一断裂点的第一断裂控制层。

公开(公告)号：US20140162385A1

公开(公告)日：2014-06-12

申请号：US14020849

申请日：2013-09-08

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Myung-Soo HUH ,  Suk-Won JUNG ,  Jeong-Ho YI ,  Sang-Hyuk HONG ,  Yong-Suk LEE

IPC: H01L27/32

CPC classification number: C23C16/042 ,  C23C16/4405 ,  C23C16/4585 ,  C23C16/50 ,  C23C16/52 ,  H01L21/681 ,  H01L21/682 ,  H01L21/68735 ,  H01L21/68742 ,  H01L27/3244 ,  H01L51/0012 ,  H01L51/56

Abstract: A deposition apparatus for performing a deposition process by using a mask with respect to a substrate, the deposition apparatus includes a chamber, a support unit in the chamber, the support unit including first holes and being configured to support the substrate, a supply unit configured to supply at least one deposition raw material toward the substrate, and movable alignment units through the first holes of the support unit, the alignment units being configured to support the mask and to align the mask with respect to the substrate.

Abstract translation: 一种用于通过使用相对于基板的掩模进行沉积处理的沉积装置，所述沉积装置包括室，所述室中的支撑单元，所述支撑单元包括第一孔并被构造成支撑所述基板，所述供给单元构造成 向衬底提供至少一个沉积原材料，以及通过支撑单元的第一孔的可移动对准单元，对准单元构造成支撑掩模并使掩模相对于衬底对准。

公开(公告)号：US20140041590A1

公开(公告)日：2014-02-13

申请号：US13710310

申请日：2012-12-10

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Choel-Min JANG ,  Myung-Soo HUH ,  Suk-Won JUNG ,  Sung-Yong LEE ,  Cheol-Rae Jo ,  In-Kyo KIM ,  Sung-Hun KEY

IPC: C23C16/00

CPC classification number: C23C16/00 ,  B01F3/04 ,  C23C16/4481 ,  C23C16/4482

Abstract: A canister includes an accommodation portion for accommodating a liquid material; an outlet pipe that is connected to the accommodation portion so as to discharge a gas material obtained by vaporizing the liquid material; a blocking cover that is connected to an upper surface of the accommodation portion; and a plurality of baffle plates that are disposed in the accommodation portion and are spaced apart from each other. The canister further includes a restrictor including a main body member that is disposed between the plurality of baffle plates and the blocking cover and is connected to an internal surface of the accommodation portion, an extension member extending from the main body member, and a through portion that is formed through the main body member and the extension member. A deposition procedure using the canister is efficiently performed and characteristics of a deposition layer are easily improved.

Abstract translation: 罐包括用于容纳液体材料的容纳部分; 出口管，其连接到容纳部分，以排出通过汽化液体材料获得的气体材料; 阻挡盖，其连接到所述容纳部的上表面; 以及设置在容纳部分中并彼此间隔开的多个挡板。 所述罐还包括限制器，所述限制器包括主体部件，所述主体部件设置在所述多个挡板和所述阻挡盖之间，并且连接到所述容纳部的内表面，从所述主体部件延伸的延伸部件， 其通过主体构件和延伸构件形成。 可以有效地进行使用罐的沉积工序，容易地提高沉积层的特性。