公开(公告)号：US20240138245A1

公开(公告)日：2024-04-25

申请号：US18400547

申请日：2023-12-29

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： YOUNGMIN MOON ,  MINHO MOON ,  JI-HEE SON ,  SEUNGYONG SONG ,  SUNGSOON IM ,  JUNHO JO

IPC: H10K71/00 ,  B23K26/244 ,  B23K26/364 ,  C23C14/04 ,  C23C14/24

CPC classification number: H10K71/00 ,  B23K26/244 ,  B23K26/364 ,  C23C14/042 ,  C23C14/24 ,  B23K26/0622

Abstract: Provided is a mask including a mask frame including a base part in which cell openings are defined, and a coating part surrounding edges of the cell openings, covering at least a portion of an upper surface of the base part, and including a materials that is different from that of the base part, and unit masks on the mask frame, respectively corresponding to the cell openings, including a material that is different from that of the coating part, and in which openings are defined.

公开(公告)号：US20230160054A1

公开(公告)日：2023-05-25

申请号：US18158679

申请日：2023-01-24

Applicant: Samsung Display Co., Ltd.

Inventor： YOUNGMIN MOON ,  MINHO MOON ,  SEUNGYONG SONG ,  SUNGSOON IM

IPC: C23C14/04 ,  B05C21/00 ,  H10K71/00 ,  H10K71/16

CPC classification number: C23C14/042 ,  B05C21/005 ,  H10K71/00 ,  H10K71/166

Abstract: A mask assembly includes a mask frame in which a first opening is defined, the mask frame including a front surface through which the first opening extends, and a deposition mask which is attached to the front surface of the mask frame and through which a plurality of second openings is defined. The mask frame includes an in which the front surface extends along a direction of gravity, the deposition mask includes an initial mask which is attached to the front surface of the mask frame in the thereof and through which the plurality of second openings is defined, and the of the mask frame having the front surface which extends along the direction of gravity disposes the first opening of the mask frame corresponding to all of the plurality of second openings of the initial mask along the direction of gravity.

公开(公告)号：US20220136093A1

公开(公告)日：2022-05-05

申请号：US17383787

申请日：2021-07-23

Applicant: Samsung Display Co., Ltd.

Inventor： JI-HEE SON ,  MINHO MOON ,  YOUNGMIN MOON ,  SEUNGYONG SONG ,  SEUL LEE ,  SUNGSOON IM

IPC: C23C14/04 ,  C23C16/56 ,  C23C16/40 ,  C23C16/34 ,  G03F7/16 ,  G03F7/00

Abstract: A mask, a mask assembly, and a method of fabricating a mask are disclosed herein. The mask comprises a polymer film in which at least one cell region and at least one peripheral region are defined, the at least one peripheral region surrounding the at least one cell region, a conductive layer disposed on the polymer film and including a metal, an inorganic layer disposed between the polymer film and the conductive layer and including a silicon-based inorganic material, and holes that penetrate the polymer film, the conductive layer, and the inorganic layer and overlap the at least one cell region in a plan view.

公开(公告)号：US20220081753A1

公开(公告)日：2022-03-17

申请号：US17196639

申请日：2021-03-09

Applicant: Samsung Display Co., Ltd.

Inventor： JI-HEE SON ,  YOUNGMIN MOON ,  DUCKJUNG LEE ,  MINHO MOON ,  SEUNGYONG SONG ,  SEUL LEE ,  SUNGSOON IM

IPC: C23C14/04 ,  H01L51/56 ,  C23C14/34

Abstract: An embodiment provides a deposition apparatus including a mask frame, an opening sheet, a deposition mask, and an electrostatic chuck. In the mask frame, a first opening part is defined. The opening sheet is disposed on the mask frame. In the opening sheet, a second opening part overlapping the first opening part is defined. The deposition mask is disposed on the opening sheet. In the deposition mask, a plurality of third opening parts overlapping the second opening part are defined. The electrostatic chuck is disposed on the deposition mask and on which a substrate is disposed. The substrate is disposed on a surface of the electrostatic chuck, and AC power is applied to the deposition mask.

公开(公告)号：US20220064779A1

公开(公告)日：2022-03-03

申请号：US17324029

申请日：2021-05-18

Applicant: Samsung Display Co., Ltd.

Inventor： YOUNGMIN MOON ,  MINHO MOON ,  SEUNGYONG SONG ,  SUNGSOON IM

IPC: C23C14/04 ,  H01L51/00 ,  H01L51/56

Abstract: A mask assembly includes a mask frame in which a first opening is defined, the mask frame including a front surface through which the first opening extends, and a deposition mask which is attached to the front surface of the mask frame and through which a plurality of second openings is defined. The mask frame includes an in which the front surface extends along a direction of gravity, the deposition mask includes an initial mask which is attached to the front surface of the mask frame in the thereof and through which the plurality of second openings is defined, and the of the mask frame having the front surface which extends along the direction of gravity disposes the first opening of the mask frame corresponding to all of the plurality of second openings of the initial mask along the direction of gravity.