公开(公告)号：US10054717B2

公开(公告)日：2018-08-21

申请号：US15078495

申请日：2016-03-23

Applicant: Moxtek, Inc.

Inventor： Ted Wangensteen ,  Stew Nielson ,  Fred Lane ,  Matt Linford ,  Anubhav Diwan ,  Matthew C. George

IPC: G02B1/14 ,  C09D5/08 ,  G02B1/04 ,  G02B5/30 ,  B05D5/08 ,  C23C16/30 ,  C23C16/32 ,  C23C16/34 ,  C23C16/40 ,  C23C16/455 ,  B05D1/00

CPC classification number: G02B1/14 ,  B05D1/60 ,  B05D5/08 ,  B05D2350/63 ,  C09D5/084 ,  C23C16/308 ,  C23C16/325 ,  C23C16/345 ,  C23C16/401 ,  C23C16/403 ,  C23C16/405 ,  C23C16/45555 ,  G02B1/04 ,  G02B5/3058

Abstract: A wire grid polarizer (WGP) can have a conformal-coating to protect the WGP from oxidation and/or corrosion. The conformal-coating can include a barrier layer with at least one: of aluminum oxide, silicon oxide, silicon nitride, silicon oxynitride, silicon carbide, hafnium oxide, and zirconium oxide. A method of making a WGP can include applying the barrier layer over ribs of a WGP by vapor deposition.

公开(公告)号：US20170293059A1

公开(公告)日：2017-10-12

申请号：US15631256

申请日：2017-06-23

Applicant: Moxtek, Inc.

Inventor： R. Stewart Nielson ,  Mathew Free ,  Bradley R. Williams ,  Matthew R. Linford ,  Anubhav Diwan ,  Fred Lane ,  Shaun Ogden

IPC: G02B5/30 ,  C09D5/08 ,  C23C16/44 ,  C23C14/58 ,  C23C16/02 ,  C23C14/24 ,  C23C14/02 ,  G02B1/14 ,  C23C16/56

CPC classification number: G02B5/3058 ,  C09D5/08 ,  C23C14/02 ,  C23C14/12 ,  C23C14/24 ,  C23C14/58 ,  C23C16/02 ,  C23C16/308 ,  C23C16/345 ,  C23C16/401 ,  C23C16/403 ,  C23C16/405 ,  C23C16/44 ,  C23C16/56 ,  G02B1/04 ,  G02B1/14 ,  G02B1/18 ,  G03B21/2073 ,  H04N9/3167

Abstract: A wire grid polarizer and method of making a wire grid polarizer can protect delicate wires of the wire grid polarizer from damage. The wire grid polarizer can include a protective-layer located on an array of wires. The array of wires can further be protected by a chemical coating on an inside surface of the air-filled channels, closed ends of the air-filled channels, damaged wires of the array of wires in a line parallel to an edge of the wire grid polarizer, or combinations thereof. The method can include (i) providing the wire grid polarizer, (ii) applying the protective-layer, by physical vapor deposition or chemical vapor deposition but excluding atomic layer deposition, onto the array of wires, (iii) cutting the wire grid polarizer wafer into multiple wire grid polarizer parts, then (iv) protecting the array of wires.

公开(公告)号：US20160291226A1

公开(公告)日：2016-10-06

申请号：US15078190

申请日：2016-03-23

Applicant: Moxtek, Inc.

Inventor： Matt Linford ,  Anubhav Diwan ,  Fred Lane ,  Stew Nielson ,  Ted Wangensteen

IPC: G02B5/30 ,  H04N9/31 ,  G02B1/18 ,  B05D1/00 ,  C23C16/455 ,  C23C16/40 ,  C23C16/34 ,  C23C16/30 ,  G02B1/04 ,  G02B1/14

CPC classification number: G02B5/3058 ,  B05D1/60 ,  B05D3/062 ,  B05D3/10 ,  B05D3/142 ,  C23C14/12 ,  C23C16/308 ,  C23C16/345 ,  C23C16/401 ,  C23C16/403 ,  C23C16/405 ,  C23C16/45525 ,  G02B1/04 ,  G02B1/14 ,  G02B1/18 ,  G03B21/2073 ,  H04N9/3167

Abstract: A wire grid polarizer (WGP) can have a phosphonate conformal-coating to protect the WGP from at least one of the following: corrosion, dust, and damage due to tensile forces in a liquid on the WGP. The conformal-coating can include a chemical: where R1 can include a hydrophobic group, Z can be a bond to the ribs, and R5 can be any suitable chemical element or group.A method of applying a phosphonate conformal-coating over a WGP can include exposing the WGP to (R1)iPO(R4)j(R5)k, where: i is 1 or 2, j is 1 or 2, k is 0 or 1, and i+j+k=3; each R1 can independently be a hydrophobic group; R4 can be a phosphonate-reactive-group; each R6 can independently be an alkyl group, an aryl group, or combinations thereof; and each R5, if any, can independently be any suitable chemical element or group.

Abstract translation: 在WGP上施加膦酸酯保形涂层的方法可以包括将WGP暴露于（R1）iPO（R4）j（R5）k，其中：i为1或2，j为1或2，k为0或1 ，i + j + k = 3; 每个R 1可以独立地是疏水基团; R4可以是膦酸酯反应性基团; 每个R 6可以独立地为烷基，芳基或其组合; 并且每个R 5（如果有的话）可以独立地是任何合适的化学元素或基团。

公开(公告)号：US20160289458A1

公开(公告)日：2016-10-06

申请号：US15078753

申请日：2016-03-23

Applicant: Moxtek, Inc.

Inventor： Matt Linford ,  Anubhav Diwan ,  Fred Lane

IPC: C09D5/08 ,  C23C16/24

CPC classification number: C09D5/08 ,  C09D5/082 ,  C23C16/24 ,  C23C16/30

Abstract: Embodiments of a chemical, methods of applying a chemical, and devices with a coating of a chemical can be used to protect devices from harm, such as for example corrosion, water tensile forces, dust, and oxidation. The device can include a phosphonate-coating, a silane-coating, or both, located on a substrate. The silane-coating can include chemical formula (1), chemical formula (2), or combinations thereof; and the phosphonate-coating can include chemical formula (3): where R1 can be a hydrophobic group; R3 and R5 can be any chemical element or group; r can be a positive integer; and X and Z can each be a bond to the substrate.

Abstract translation: 其中R1可以是疏水基团; R3和R5可以是任何化学元素或基团; r可以是正整数; 并且X和Z各自可以是与基底的结合。