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公开(公告)号：US20160291227A1
公开(公告)日：2016-10-06
申请号：US15078549
申请日：2016-03-23
Applicant: Moxtek, Inc.
Inventor： Stew Nielson , Ted Wangensteen , Fred Lane , Matt Linford , Anubhav Diwan
IPC: G02B5/30 , G02B1/14 , G02B1/04 , C23C14/08 , B05D5/08 , C23C16/40 , C23C16/34 , C23C16/30 , C23C16/32 , G02B1/18 , C23C14/06
CPC classification number: G02B5/3058 , B05D1/60 , B05D5/08 , C09D5/084 , C09D183/02 , C09D183/04 , C09D185/02 , C23C14/0635 , C23C14/0652 , C23C14/0676 , C23C14/08 , C23C14/081 , C23C14/083 , C23C16/308 , C23C16/325 , C23C16/345 , C23C16/401 , C23C16/403 , C23C16/405 , C23C16/45555 , G02B1/04 , G02B1/14 , G02B1/18
Abstract: Wire grid polarizer (WGP) performance can be improved by use of certain water-soluble materials. Such water-soluble materials can be protected by a conformal coating, which can be applied by an anhydrous method, such as vapor deposition for example.
Abstract translation: 线栅偏振器（WGP）性能可以通过使用某些水溶性材料来改善。 这种水溶性材料可以通过保形涂层来保护，可以通过无水方法例如气相沉积来施加。
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公开(公告)号：US20160291209A1
公开(公告)日：2016-10-06
申请号：US15078695
申请日：2016-03-23
Applicant: Brigham Young University , Moxtek, Inc.
Inventor： Anubhav Diwan , Matt Linford , Fred Lane
IPC: G02B1/14 , G02B5/30 , C23C16/40 , C09D183/02 , C09D185/02 , C23C16/455 , G02B1/04 , C09D5/08
CPC classification number: G02B5/3058 , B05D1/60 , B05D5/08 , C09D5/084 , C09D183/02 , C09D183/04 , C09D185/02 , C23C14/0635 , C23C14/0652 , C23C14/0676 , C23C14/08 , C23C14/081 , C23C14/083 , C23C16/308 , C23C16/325 , C23C16/345 , C23C16/401 , C23C16/403 , C23C16/405 , C23C16/45555 , G02B1/04 , G02B1/14 , G02B1/18
Abstract: A wire grid polarizer (WGP) can have a conformal-coating to protect the WGP from at least one of the following: corrosion, dust, and damage due to tensile forces in a liquid on the WGP. The conformal-coating can include a silane conformal-coating with chemical formula (1), chemical formula (2), or combinations thereof: A method of applying a conformal-coating over a WGP can include exposing the WGP to Si(R1)d(R2)e(R3)g.In the above WGP and method, X can be a bond to the ribs; each R1 can be a hydrophobic group; each R3, if any, can be any chemical element or group; d can be 1, 2, or 3, e can be 1, 2, or 3, g can be 0, 1, or 2, and d+e+g=4; R2 can be a silane-reactive-group; and each R6 can be an alkyl group, an aryl group, or combinations thereof.
Abstract translation: 在上述WGP和方法中，X可以与肋骨结合; 每个R1可以是疏水基团; 每个R3（如果有的话）可以是任何化学元素或基团; d可以是1,2或3，e可以是1,2或3，g可以是0,1或2，d + e + g = 4; R2可以是硅烷反应性基团; 并且每个R 6可以是烷基，芳基或其组合。
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公开(公告)号：US11822182B2
公开(公告)日：2023-11-21
申请号：US16933090
申请日：2020-07-20
Applicant: Moxtek, Inc.
Inventor： Anubhav Diwan , Matt Linford
IPC: G02F1/1335 , C23C16/455 , G02B1/14 , C23C16/40 , C23C16/52 , G02B5/30
CPC classification number: G02F1/133548 , C23C16/402 , C23C16/455 , C23C16/45555 , C23C16/52 , G02B1/14 , C09K2323/033 , G02B5/3058
Abstract: A method of vapor depositing a silane chemical onto a wire grid polarizer can include introducing a silane chemical and water into a chamber where the wire grid polarizer is located. The silane chemical and the water can be in a gaseous phase in the chamber. The silane chemical and the water can be maintained simultaneously in the gaseous phase in the chamber for period of time. The silane chemical and the water can react to form a (R1)2Si(OH)2 molecule, where each R1 is independently any chemical element or group. A silane coating can be formed on the wire grid polarizer from a chemical reaction of the (R1)2Si(OH)2 molecule with the wire grid polarizer and with other (R1)2Si(OH)2 molecules. The silane coating can be relatively thick and multi-layer. A thicker or multi-layer silane coating can have improved high temperature resistance relative to a thinner or mono-layer silane coating.
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公开(公告)号：US11513272B2
公开(公告)日：2022-11-29
申请号：US16941021
申请日：2020-07-28
Applicant: Moxtek, Inc.
Inventor： Stew Nielson , Matt Linford , Anubhav Diwan , Matthew C. George
IPC: G02B5/30 , G02B1/18 , G02B1/14 , G02B1/04 , C23C14/08 , C23C14/06 , C23C16/40 , C23C16/34 , C23C16/30 , C23C16/32 , C09D183/04 , C09D5/08 , C09D183/02 , C09D185/02 , C23C16/455 , B05D5/08 , B05D1/00
Abstract: A wire grid polarizer (WGP) can have a conformal-coating to protect the WGP from at least one of the following: corrosion, dust, and damage due to tensile forces in a liquid on the WGP. The conformal-coating can include a silane conformal-coating with chemical formula (1), chemical formula (2), or combinations thereof: A method of applying a conformal-coating over a WGP can include exposing the WGP to Si(R1)d(R2)e(R3)g. In the above WGP and method, X can be a bond to the ribs; each R1 can be a hydrophobic group; each R3, if any, can be any chemical element or group; d can be 1, 2, or 3, e can be 1, 2, or 3, g can be 0, 1, or 2, and d+e+g=4; R2 can be a silane-reactive-group; and each R6 can be an alkyl group, an aryl group, or combinations thereof.
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公开(公告)号：US20200347495A1
公开(公告)日：2020-11-05
申请号：US16933090
申请日：2020-07-20
Applicant: Moxtek, Inc.
Inventor： Anubhav Diwan , Matt Linford
IPC: C23C16/40 , C23C16/455 , G02B1/14 , C23C16/52
Abstract: A method of vapor depositing a silane chemical onto a wire grid polarizer can include introducing a silane chemical and water into a chamber where the wire grid polarizer is located. The silane chemical and the water can be in a gaseous phase in the chamber. The silane chemical and the water can be maintained simultaneously in the gaseous phase in the chamber for period of time. The silane chemical and the water can react to form a (R1)2Si(OH)2 molecule, where each R1 is independently any chemical element or group. A silane coating can be formed on the wire grid polarizer from a chemical reaction of the (R1)2Si(OH)2 molecule with the wire grid polarizer and with other (R1)2Si(OH)2 molecules. The silane coating can be relatively thick and multi-layer. A thicker or multi-layer silane coating can have improved high temperature resistance relative to a thinner or mono-layer silane coating.
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Patent Agency Ranking
公开(公告)号：US10761252B2
公开(公告)日：2020-09-01
申请号：US15978470
申请日：2018-05-14
Applicant: Moxtek, Inc.
Inventor： Stew Nielson , Matt Linford , Anubhav Diwan , Matthew C. George
IPC: G02B5/30 , G02B1/18 , G02B1/14 , G02B1/04 , C23C14/08 , C23C14/06 , C23C16/40 , C23C16/34 , C23C16/30 , C23C16/32 , C09D183/04 , C09D5/08 , C09D183/02 , C09D185/02 , C23C16/455 , B05D5/08 , B05D1/00
Abstract: A wire grid polarizer (WGP) can have a conformal-coating to protect the WGP from at least one of the following: corrosion, dust, and damage due to tensile forces in a liquid on the WGP. The conformal-coating can include a silane conformal-coating with chemical formula (1), chemical formula (2), or combinations thereof: A method of applying a conformal-coating over a WGP can include exposing the WGP to Si(R1)d(R2)e(R3)g. In the above WGP and method, X can be a bond to the ribs; each R1 can be a hydrophobic group; each R3, if any, can be any chemical element or group; d can be 1, 2, or 3, e can be 1, 2, or 3, g can be 0, 1, or 2, and d+e+g=4; R2 can be a silane-reactive-group; and each R6 can be an alkyl group, an aryl group, or combinations thereof.
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公开(公告)号：US10752989B2
公开(公告)日：2020-08-25
申请号：US16028039
申请日：2018-07-05
Applicant: Moxtek, Inc. , Brigham Young University
Inventor： Anubhav Diwan , Matt Linford
IPC: G02B1/14 , C23C16/40 , C23C16/455 , C23C16/52 , G02B5/30
Abstract: A method of vapor depositing a silane chemical onto a wire grid polarizer can include introducing a silane chemical and water into a chamber where the wire grid polarizer is located. The silane chemical and the water can be in a gaseous phase in the chamber. The silane chemical and the water can be maintained simultaneously in the gaseous phase in the chamber for period of time. The silane chemical and the water can react to form a (R1)2Si(OH)2 molecule, where each R1 is independently any chemical element or group. A silane coating can be formed on the wire grid polarizer from a chemical reaction of the (R1)2Si(OH)2 molecule with the wire grid polarizer and with other (R1)2Si(OH)2 molecules. The silane coating can be relatively thick and multi-layer. A thicker or multi-layer silane coating can have improved high temperature resistance relative to a thinner or mono-layer silane coating.
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公开(公告)号：US20160291208A1
公开(公告)日：2016-10-06
申请号：US15078495
申请日：2016-03-23
Applicant: Moxtek, Inc. , Brigham Young University
Inventor： Ted Wangensteen , Stew Nielson , Fred Lane , Matt Linford , Anubhav Diwan
IPC: G02B1/14 , G02B1/04 , C09D5/08 , B05D5/08 , C23C16/40 , C23C16/34 , C23C16/30 , C23C16/32 , G02B5/30 , C23C16/455
CPC classification number: G02B1/14 , B05D1/60 , B05D5/08 , B05D2350/63 , C09D5/084 , C23C16/308 , C23C16/325 , C23C16/345 , C23C16/401 , C23C16/403 , C23C16/405 , C23C16/45555 , G02B1/04 , G02B5/3058
Abstract: A wire grid polarizer (WGP) can have a conformal-coating to protect the WGP from oxidation and/or corrosion. The conformal-coating can include a barrier layer with at least one: of aluminum oxide, silicon oxide, silicon nitride, silicon oxynitride, silicon carbide, hafnium oxide, and zirconium oxide. A method of making a WGP can include applying the barrier layer over ribs of a WGP by vapor deposition.
Abstract translation: 线栅偏振器（WGP）可以具有保形涂层以保护WGP免受氧化和/或腐蚀。 共形涂层可以包括具有至少一种：氧化铝，氧化硅，氮化硅，氮氧化硅，碳化硅，氧化铪和氧化锆的阻挡层。 制造WGP的方法可以包括通过气相沉积在WGP的肋上施加阻挡层。
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公开(公告)号：US20180259698A1
公开(公告)日：2018-09-13
申请号：US15978470
申请日：2018-05-14
Applicant: Moxtek, Inc.
Inventor： Stew Nielson , Matt Linford , Anubhav Diwan , Matthew C. George
IPC: G02B5/30 , G02B1/04 , G02B1/14 , C23C16/40 , C23C16/34 , C23C16/32 , C23C16/30 , C23C14/08 , C23C14/06 , C09D185/02 , C09D183/04 , C09D183/02 , C09D5/08 , C23C16/455 , G02B1/18 , B05D1/00 , B05D5/08
CPC classification number: G02B5/3058 , B05D1/60 , B05D5/08 , C09D5/084 , C09D183/02 , C09D183/04 , C09D185/02 , C23C14/0635 , C23C14/0652 , C23C14/0676 , C23C14/08 , C23C14/081 , C23C14/083 , C23C16/308 , C23C16/325 , C23C16/345 , C23C16/401 , C23C16/403 , C23C16/405 , C23C16/45555 , G02B1/04 , G02B1/14 , G02B1/18
Abstract: A wire grid polarizer (WGP) can have a conformal-coating to protect the WGP from at least one of the following: corrosion, dust, and damage due to tensile forces in a liquid on the WGP. The conformal-coating can include a silane conformal-coating with chemical formula (1), chemical formula (2), or combinations thereof: A method of applying a conformal-coating over a WGP can include exposing the WGP to Si(R1)d(R2)e(R3)g. In the above WGP and method, X can be a bond to the ribs; each R1 can be a hydrophobic group; each R3, if any, can be any chemical element or group; d can be 1, 2, or 3, e can be 1, 2, or 3, g can be 0, 1, or 2, and d+e+g=4; R2 can be a silane-reactive-group; and each R6 can be an alkyl group, an aryl group, or combinations thereof.
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公开(公告)号：US10054717B2
公开(公告)日：2018-08-21
申请号：US15078495
申请日：2016-03-23
Applicant: Moxtek, Inc.
Inventor： Ted Wangensteen , Stew Nielson , Fred Lane , Matt Linford , Anubhav Diwan , Matthew C. George
IPC: G02B1/14 , C09D5/08 , G02B1/04 , G02B5/30 , B05D5/08 , C23C16/30 , C23C16/32 , C23C16/34 , C23C16/40 , C23C16/455 , B05D1/00
CPC classification number: G02B1/14 , B05D1/60 , B05D5/08 , B05D2350/63 , C09D5/084 , C23C16/308 , C23C16/325 , C23C16/345 , C23C16/401 , C23C16/403 , C23C16/405 , C23C16/45555 , G02B1/04 , G02B5/3058
Abstract: A wire grid polarizer (WGP) can have a conformal-coating to protect the WGP from oxidation and/or corrosion. The conformal-coating can include a barrier layer with at least one: of aluminum oxide, silicon oxide, silicon nitride, silicon oxynitride, silicon carbide, hafnium oxide, and zirconium oxide. A method of making a WGP can include applying the barrier layer over ribs of a WGP by vapor deposition.
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