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    Phase plate and method of fabricating same
    12.
    发明授权
    Phase plate and method of fabricating same 有权
    相板及其制造方法

    公开(公告)号：US08829436B2

    公开(公告)日：2014-09-09

    申请号：US14138717

    申请日：2013-12-23

    Applicant: JEOL Ltd.

    Inventor： Hirofumi Iijima ,  Yuji Konyuba

    IPC: G01N23/00 ,  G21K7/00 ,  H01J37/26 ,  H01J37/04 ,  G03F7/00 ,  H01J37/02

    CPC classification number: G03F7/001 ,  H01J37/02 ,  H01J37/04 ,  H01J37/26 ,  H01J2237/2614

    Abstract: A method of fabricating a phase plate, for use in a transmission electron microscope, with simple process steps is offered. The method includes a step (S100) of forming a first layer on a substrate, a step (S102) of patterning the first layer to form through-holes extending through the first layer, a step (S104) of etching the surface of the substrate opposite to the surface on which the first layer is formed to form an opening which is in communication with the through-holes and which exposes the first layer, and a step (S106) of forming a second layer on the first layer.

    Abstract translation: 提供了一种以简单的工艺步骤制造用于透射电子显微镜的相位板的方法。 该方法包括在基板上形成第一层的工序（S100），对第一层进行图案化以形成延伸穿过第一层的贯通孔的工序（S102），对基板表面进行蚀刻的工序（S104） 与形成有第一层的表面相对，形成与通孔连通并露出第一层的开口;以及在第一层上形成第二层的步骤（S106）。

    Electron Microscope and Calibration Method
    14.
    发明公开
    Electron Microscope and Calibration Method 审中-公开

    公开(公告)号：US20230386782A1

    公开(公告)日：2023-11-30

    申请号：US18199728

    申请日：2023-05-19

    Applicant: JEOL Ltd.

    Inventor： Yuji Konyuba

    IPC: H01J37/28 ,  G06T5/50 ,  G06V10/28

    CPC classification number: H01J37/28 ,  G06T5/50 ,  G06V10/28 ,  G06T2207/10061 ,  G06T2207/20221

    Abstract: An electron microscope includes an electronic optical system that irradiates a specimen with an electron beam and forms an image; a camera that includes an image sensor and outputs a frame image; and a computation unit that generates an image based on the frame image. The computation unit sets a threshold; and binarizes the frame image using the threshold, and generates the image based on the binarized frame image. In setting the threshold, the computation unit repeatedly sets a tentative threshold, acquires a plurality of the frame images obtained on a condition that electrons entering the image sensor follow Poisson process, binarizes each of the plurality of acquired frame images using the tentative threshold, generates an integrated image by integrating the plurality of binarized frame images, and obtains a normalized constant based on a mean and variance of pixel values of pixels of the integrated image.

    Sample Chip Worktable and Retainer
    16.
    发明申请
    Sample Chip Worktable and Retainer 有权

    公开(公告)号：US20210094166A1

    公开(公告)日：2021-04-01

    申请号：US17030598

    申请日：2020-09-24

    Applicant: JEOL Ltd.

    Inventor： Tomohisa Fukuda ,  Yuji Konyuba ,  Yuuta Ikeda ,  Tomohiro Haruta

    IPC: B25H1/10 ,  G02B21/34 ,  H01J37/20

    Abstract: A retainer is placed on a retainer holding portion formed on a sample chip worktable. With an operation of a button, a take-out support mechanism operates. That is, an upthrust pin moves upward. With this process, an orientation of a sample chip stored in the retainer is changed from a horizontal orientation to an inclined orientation. A plurality of openings through which the upthrust pin passes are formed in the retainer.

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