公开(公告)号：US11776787B2

公开(公告)日：2023-10-03

申请号：US17570043

申请日：2022-01-06

Applicant: JEOL Ltd.

Inventor： Kazuki Yagi ,  Yusuke Toriumi

IPC: H01J37/28 ,  H01J37/20 ,  H01J37/244 ,  H01J37/26

CPC classification number: H01J37/28 ,  H01J37/20 ,  H01J37/244 ,  H01J37/265 ,  H01J2237/20207

Abstract: A charged particle beam apparatus includes a tilt mechanism that tilts a specimen, a detector that detects an electromagnetic wave emitted from the specimen, a table storage unit that stores a table in which tilt angle information on a tilt angle of the specimen and detection solid-angle information on the detection solid angle of the detector are associated with each other, a tilt control unit that controls the tilt mechanism, and a detection-solid-angle information acquisition unit that acquires the tilt angle information from the tilt control unit and acquires the detection solid-angle information with reference to the table.

公开(公告)号：US11953410B2

公开(公告)日：2024-04-09

申请号：US17378914

申请日：2021-07-19

Applicant: JEOL Ltd.

Inventor： Yuji Konyuba ,  Tomohiro Haruta ,  Tomohisa Fukuda ,  Yuta Ikeda ,  Yusuke Toriumi

IPC: G01N1/00 ,  G01N1/06 ,  G01N1/28

CPC classification number: G01N1/2813 ,  G01N1/06

Abstract: A specimen support tool for supporting a slice prepared by using a microtome includes a specimen support member on which a groove for guiding the slice is formed.

公开(公告)号：US20220216033A1

公开(公告)日：2022-07-07

申请号：US17570043

申请日：2022-01-06

Applicant: JEOL Ltd.

Inventor： Kazuki Yagi ,  Yusuke Toriumi

IPC: H01J37/28 ,  H01J37/244 ,  H01J37/20 ,  H01J37/26

Abstract: A charged particle beam apparatus includes a tilt mechanism that tilts a specimen, a detector that detects an electromagnetic wave emitted from the specimen, a table storage unit that stores a table in which tilt angle information on a tilt angle of the specimen and detection solid-angle information on the detection solid angle of the detector are associated with each other, a tilt control unit that controls the tilt mechanism, and a detection-solid-angle information acquisition unit that acquires the tilt angle information from the tilt control unit and acquires the detection solid-angle information with reference to the table.

公开(公告)号：US20220018742A1

公开(公告)日：2022-01-20

申请号：US17378914

申请日：2021-07-19

Applicant: JEOL Ltd.

Inventor： Yuji Konyuba ,  Tomohiro Haruta ,  Tomohisa Fukuda ,  Yuta Ikeda ,  Yusuke Toriumi

IPC: G01N1/28 ,  G01N1/06

Abstract: A specimen support tool for supporting a slice prepared by using a microtome includes a specimen support member on which a groove for guiding the slice is formed.