公开(公告)号：US20240331970A1

公开(公告)日：2024-10-03

申请号：US18444862

申请日：2024-02-19

Applicant: Jeol Ltd.

Inventor： Jun Watanabe ,  Tatsuhito Kimura ,  Tomohisa Fukuda ,  Tsutomu Negishi

IPC: H01J37/20 ,  G01N1/44

CPC classification number: H01J37/20 ,  G01N1/44 ,  H01J2237/2001 ,  H01J2237/20207 ,  H01J2237/20214 ,  H01J2237/20257 ,  H01J2237/20278

Abstract: A sample holder used for a sample processing apparatus that applies a charged particle beam to a sample to process the sample. The sample holder includes a holder base thermally connected to a cooling source, a rotating body rotatably supported on the holder base to hold the sample, and a drive unit that rotates the rotating body. The rotating body has a sliding surface that comes into slidable surface contact with the holder base.

公开(公告)号：US20220214250A1

公开(公告)日：2022-07-07

申请号：US17550002

申请日：2021-12-14

Applicant: JEOL Ltd.

Inventor： Yuji Konyuba ,  Tomohiro Haruta ,  Yuta Ikeda ,  Tomohisa Fukuda

IPC: G01N1/28

Abstract: A specimen pretreatment method for transferring a specimen supported by a first specimen supporting tool to a second specimen supporting tool, the specimen pretreatment method including: transferring a specimen supported by the first specimen supporting tool to a film; immersing the film and the specimen on the film in a liquid to dissolve the film; and recovering the specimen from the liquid and supporting the specimen with the second specimen supporting tool.

公开(公告)号：US20220018742A1

公开(公告)日：2022-01-20

申请号：US17378914

申请日：2021-07-19

Applicant: JEOL Ltd.

Inventor： Yuji Konyuba ,  Tomohiro Haruta ,  Tomohisa Fukuda ,  Yuta Ikeda ,  Yusuke Toriumi

IPC: G01N1/28 ,  G01N1/06

Abstract: A specimen support tool for supporting a slice prepared by using a microtome includes a specimen support member on which a groove for guiding the slice is formed.

公开(公告)号：US11037755B2

公开(公告)日：2021-06-15

申请号：US16410243

申请日：2019-05-13

Applicant: JEOL Ltd.

Inventor： Yuji Konyuba ,  Yuta Ikeda ,  Tomohiro Haruta ,  Tomohisa Fukuda

IPC: H01J37/20 ,  H01J37/28 ,  H01J37/244

Abstract: An observation method includes placing a specimen on a specimen supporting film of a specimen support, attaching the specimen support to a retainer, attaching the retainer to an optical microscope retainer holding base, attaching the optical microscope retainer holding base to a specimen stage of an optical microscope and observing the specimen under the optical microscope, attaching the retainer to a transmission electron microscope retainer holding base, and loading the transmission electron microscope retainer holding base into a transmission electron microscope and observing the specimen under the transmission electron microscope.

公开(公告)号：US20190148106A1

公开(公告)日：2019-05-16

申请号：US16183952

申请日：2018-11-08

Applicant: JEOL Ltd.

Inventor： Tomohisa Fukuda

IPC: H01J37/244 ,  H01J37/147 ,  H01J37/295 ,  H01J37/28 ,  G01N23/04 ,  G01N23/20

Abstract: A charged particle beam device includes: a detection chamber flange; a detector; a detector holding stand which holds the detector; a first shaft which is slidably inserted into a guide hole and connected to the detector holding stand, the guide hole being provided in the detection chamber flange; a first flange which is attached to the detection chamber flange and has a spherical bearing; a second flange which is supported by the spherical bearing of the first flange; and a second shaft which is slidably inserted into a guide hole provided in the second flange and passes through a through-hole in the detection chamber flange to be connected to the detector holding stand, each of the first shaft and the second shaft being provided with a flow channel of a heat transfer medium for cooling or heating the detector.