-
公开(公告)号：US20250105576A1
公开(公告)日：2025-03-27
申请号：US18797561
申请日：2024-08-08
Applicant: Gigaphoton Inc.
Inventor： Masanori YASHIRO , Ryouta KUJIRA
Abstract: An optical pulse stretcher includes a beam splitter separating laser light incident on an optical surface thereof into reflection laser light and transmission laser light, a holder fixing the beam splitter with the optical surface of the beam splitter inclined with respect to an optical path axis of the incident laser light, mirrors guiding the reflection laser light to the beam splitter, and a slide mechanism moving the beam splitter in a direction parallel to the optical surface. The slide mechanism includes a slide plate to which the holder is coupled, and a case which holds the slide plate in a movable manner in a slide direction with respect to a base plate on which the mirrors are arranged. The case includes a threaded hole having an internal thread formed on an inner circumference thereof. The slide plate includes a through hole at a position corresponding to the threaded hole.
-
公开(公告)号：US20250070526A1
公开(公告)日：2025-02-27
申请号：US18938048
申请日：2024-11-05
Applicant: Gigaphoton Inc.
Inventor： Masanori YASHIRO , Hitoshi OHGA , Ryouta KUJIRA
Abstract: A line narrowing module includes a mirror including a bottom surface and a reflection surface of light; a grating configured to wavelength-disperse the light reflected by the reflection surface; a base plate to which the bottom surface of the mirror is fixed with an adhesive; a rotation stage configured to rotate the base plate, arranged thereon, about a rotation axis perpendicular to a plane in which the light is wavelength-dispersed to rotate the mirror about the rotation axis; and a drive unit configured to rotate the rotation stage about the rotation axis. A centroid of the mirror, a centroid of the adhesive, a centroid of the base plate, and a centroid of the rotation stage are located on the rotation axis.
-
公开(公告)号：US20230187892A1
公开(公告)日：2023-06-15
申请号：US18163689
申请日：2023-02-02
Applicant: Gigaphoton Inc.
Inventor： Yusuke SAITO , Masanori YASHIRO , Hiroshi FURUSATO , Yosuke WATANABE , Tokinori TERAO
CPC classification number: H01S3/08009 , H01S3/034 , H01S3/105 , G03F7/70025
Abstract: A line narrowing gas laser device includes a line narrowing device, an output coupling mirror, a laser chamber arranged on an optical path of an optical resonator, a first holder which supports the output coupling mirror, a second holder which supports the first holder to be rotatable about a rotation axis of the first holder, and an adjustment device supported by the second holder and being in contact with the first holder to rotate the first holder about the rotation axis. The line narrowing device has a characteristic of changing, into a first direction, beam pointing of laser light output toward the output coupling mirror when temperature inside the line narrowing device rises. The second holder and the adjustment device rotate the first holder in a direction in which a change in the first direction in the beam pointing of the laser light is suppressed by thermal expansion.
-
Patent Agency Ranking
公开(公告)号：US20190074654A1
公开(公告)日：2019-03-07
申请号：US16178374
申请日：2018-11-01
Applicant: Gigaphoton Inc.
Inventor： Natsushi SUZUKI , Osamu WAKABAYASHI , Hiroaki TSUSHIMA , Masanori YASHIRO
Abstract: A gas laser apparatus may include: a laser chamber connected through a first control valve to a first laser gas supply source that supplies a first laser gas containing a halogen gas and connected through a second control valve to a second laser gas supply source that supplies a second laser gas having a lower halogen gas concentration than the first laser gas; a purification column that removes at least a part of the halogen gas and a halogen compound from at least a part of a gas exhausted from the laser chamber; a booster pump, connected through a third control valve to the laser chamber, which raises a pressure of a gas having passed through the purification column to a gas pressure that is higher than an operating gas pressure of the laser chamber; and a controller that calculates, on a basis of a first amount of a gas supplied from the booster pump through the third control valve to the laser chamber, a second amount of the first laser gas that is to be supplied to the laser chamber and controls the first control valve on a basis of a result of the calculation of the second amount.
-
公开(公告)号：US20190020167A1
公开(公告)日：2019-01-17
申请号：US16020595
申请日：2018-06-27
Applicant: Gigaphoton Inc.
Inventor： Natsushi SUZUKI , Osamu WAKABAYASHI , Hiroaki TSUSHIMA , Masanori YASHIRO
Abstract: A gas laser apparatus may include: a laser chamber connected through a first control valve to a first laser gas supply source that supplies a first laser gas containing a halogen gas and connected through a second control valve to a second laser gas supply source that supplies a second laser gas having a lower halogen gas concentration than the first laser gas; a purification column that removes at least a part of the halogen gas and a halogen compound from at least a part of a gas exhausted from the laser chamber; a booster pump, connected through a third control valve to the laser chamber, which raises a pressure of a gas having passed through the purification column to a gas pressure that is higher than an operating gas pressure of the laser chamber; and a controller that calculates, on a basis of a first amount of a gas supplied from the booster pump through the third control valve to the laser chamber, a second amount of the first laser gas that is to be supplied to the laser chamber and controls the first control valve on a basis of a result of the calculation of the second amount.
-
公开(公告)号：US20180241170A1
公开(公告)日：2018-08-23
申请号：US15953835
申请日：2018-04-16
Applicant: Gigaphoton Inc.
Inventor： Natsushi SUZUKI , Masanori YASHIRO , Osamu WAKABAYASHI
CPC classification number: H01S3/036 , H01S3/134 , H01S3/2251 , H01S3/2256
Abstract: A laser gas purifying system to purify laser gas emitted from a laser apparatus and return purified gas to the laser apparatus may include a first pipe configured to pass the laser gas emitted from the laser apparatus, a purifying apparatus connected to the first pipe and configured to purify the laser gas emitted from the laser apparatus, a second pipe connected to the purifying apparatus and configured to return the purified gas purified by the purifying apparatus to the laser apparatus, and an exhausting device provided in at least one of the first pipe, the purifying apparatus, and the second pipe.
-
公开(公告)号：US20170288361A1
公开(公告)日：2017-10-05
申请号：US15631676
申请日：2017-06-23
Applicant: Gigaphoton Inc.
Inventor： Natsushi SUZUKI , Osamu WAKABAYASHI , Hiroaki TSUSHIMA , Masanori YASHIRO
CPC classification number: H01S3/036 , B01D53/0446 , B01D53/346 , B01D53/685 , B01D53/82 , B01D53/86 , B01D2251/404 , B01D2251/602 , B01D2253/108 , B01D2255/20753 , B01D2255/20761 , B01D2257/2027 , B01D2258/0216 , B01D2259/40003 , H01S3/104 , H01S3/225
Abstract: A gas laser apparatus may include: a laser chamber connected through a first control valve to a first laser gas supply source that supplies a first laser gas containing a halogen gas and connected through a second control valve to a second laser gas supply source that supplies a second laser gas having a lower halogen gas concentration than the first laser gas; a purification column that removes at least a part of the halogen gas and a halogen compound from at least a part of a gas exhausted from the laser chamber; a booster pump, connected through a third control valve to the laser chamber, which raises a pressure of a gas having passed through the purification column to a gas pressure that is higher than an operating gas pressure of the laser chamber; and a controller that calculates, on a basis of a first amount of a gas supplied from the booster pump through the third control valve to the laser chamber, a second amount of the first laser gas that is to be supplied to the laser chamber and controls the first control valve on a basis of a result of the calculation of the second amount.
-
18.发明申请公开(公告)号：US20140286366A1
公开(公告)日：2014-09-25
申请号：US14220956
申请日：2014-03-20
Applicant: GIGAPHOTON INC.
Inventor： Takahito KUMAZAKI , Kouji KAKIZAKI , Masanori YASHIRO
CPC classification number: H01S3/038 , G02B5/208 , G03F7/20 , G03F7/70025 , H01S3/034 , H01S3/08004 , H01S3/08009 , H01S3/225
Abstract: An optical device includes a plate-like optical element made of a calcium fluoride crystal, a holding member to sandwich and hold the optical element, a seal member provided between the holding member and one surface of the optical element in close contact therewith, and a cushioning member provided between the holding member and the other surface of the optical element in contact therewith. The cushioning member is made of one of a 304 stainless steel, a 303 stainless steel, a 316 stainless steel, a Hastelloy™ alloy, a carbon steel for machine construction S45C, and Inconel™.
Abstract translation: 光学装置包括由氟化钙晶体制成的板状光学元件，夹持并保持光学元件的保持构件，设置在保持构件与光学元件的与其紧密接触的一个表面之间的密封构件， 缓冲构件设置在保持构件与光学元件的与其接触的另一表面之间。 缓冲构件由304不锈钢，303不锈钢，316不锈钢，Hastelloy™合金，用于机械结构S45C的碳素钢和Inconel™中的一种制成。
-
-
-
-
-
-
-
Search Results
18
records
(took 0.026 seconds)
