LINE NARROWING MODULE, GAS LASER DEVICE, AND ELECTRONIC DEVICE MANUFACTURING METHOD

    公开(公告)号:US20240039236A1

    公开(公告)日:2024-02-01

    申请号:US18483903

    申请日:2023-10-10

    Inventor: Hitoshi OHGA

    CPC classification number: H01S3/136 H01S3/1305 G03F7/70025 G02B27/4233

    Abstract: A line narrowing module includes: a prism; a mirror including a reflective surface, first and second adjacent surfaces, and an opposing surface; a grating wavelength-dispersing light reflected by the reflective surface; a holding part holding the mirror; a first adhesive provided between the holding part and the first adjacent surface or between the holding part and the opposing surface and bonding the mirror to the holding part; a second adhesive provided between the holding part and the second adjacent surface and bonding the mirror to the holding part; and a driving unit rotating the holding part to rotate the mirror about an axis perpendicular to a plane where the light is wavelength-dispersed. The second adhesive is located on an opposite side of the first adhesive with respect to a center line of the mirror in parallel to the axis.

    PULSE WIDTH EXTENSION DEVICE, LASER DEVICE, AND ELECTRONIC DEVICE MANUFACTURING METHOD

    公开(公告)号:US20230061530A1

    公开(公告)日:2023-03-02

    申请号:US18053732

    申请日:2022-11-08

    Abstract: A pulse width extension device includes a first delay optical system having a first loop optical path formed on a first plane and configured by a first beam splitter and a plurality of first concave mirrors, a second delay optical system having a second loop optical path formed on a second plane parallel to and different from the first plane and configured by a second beam splitter and a plurality of second concave mirrors, and a first beam rotation mechanism arranged on an optical path between the first delay optical system and the second delay optical system and configured to rotate a beam of pulse laser light having passed through the first delay optical system so that a longitudinal direction of a beam cross-sectional shape of the pulse laser light traveling on the second loop optical path is perpendicular to the second plane.

    LINE NARROWING MODULE, MANUFACTURING METHOD OF LINE NARROWING MODULE, AND ELECTRONIC DEVICE MANUFACTURING METHOD

    公开(公告)号:US20250070526A1

    公开(公告)日:2025-02-27

    申请号:US18938048

    申请日:2024-11-05

    Abstract: A line narrowing module includes a mirror including a bottom surface and a reflection surface of light; a grating configured to wavelength-disperse the light reflected by the reflection surface; a base plate to which the bottom surface of the mirror is fixed with an adhesive; a rotation stage configured to rotate the base plate, arranged thereon, about a rotation axis perpendicular to a plane in which the light is wavelength-dispersed to rotate the mirror about the rotation axis; and a drive unit configured to rotate the rotation stage about the rotation axis. A centroid of the mirror, a centroid of the adhesive, a centroid of the base plate, and a centroid of the rotation stage are located on the rotation axis.

    ALIGNMENT ADJUSTER AND METHOD FOR MANUFACTURING ELECTRONIC DEVICES

    公开(公告)号:US20230066377A1

    公开(公告)日:2023-03-02

    申请号:US18053452

    申请日:2022-11-08

    Inventor: Hitoshi OHGA

    Abstract: An alignment adjuster includes a first holder made of a first material and configured to support an optical element, a first adjuster including a first expandable/contractable section made of a second material different from the first material and configured to rotate the first holder and the optical element around a first axis by adjusting the length of the first expandable/contractable section with the first expandable/contractable section being in contact with the first holder, and a first support member made of the second material and configured to support the first adjuster, and the first adjuster is configured to be capable of adjusting the position where the first expandable/contractable section and the first holder are in contact with each other to be located in a first plane containing a first end section of the first support member and the first axis.

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