知搜-全球专利检索

  1. 登录
  2. 注册

搜索结果

72 条记录 (耗时 0.026 秒)

    MEMS composite transducer including compliant membrane
    11.
    发明授权
    MEMS composite transducer including compliant membrane 有权
    MEMS复合传感器包括柔顺膜

    公开(公告)号：US08631711B2

    公开(公告)日：2014-01-21

    申请号：US13089541

    申请日：2011-04-19

    申请人： James D. Huffman

    发明人： James D. Huffman

    IPC分类号： G01B7/16

    CPC分类号： G01L1/106 ,  G01L9/0013 ,  G01L9/0022 ,  G01P15/0802 ,  G01P15/09 ,  G01P2015/0837

    摘要： A MEMS composite transducer includes a substrate, a MEMS transducer, and a compliant membrane. Portions of the substrate define an outer boundary of a cavity. A first portion of the MEMS transducing member is anchored to the substrate. A second portion of the MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. The compliant membrane is positioned in contact with the MEMS transducing member. A first portion of the compliant membrane covers the MEMS transducing member and a second portion of the compliant membrane is anchored to the substrate.

    摘要翻译： MEMS复合换能器包括基板，MEMS换能器和柔性膜。 基板的一部分限定了空腔的外边界。 MEMS转换构件的第一部分被锚定到基底。 MEMS转换构件的第二部分在空腔的至少一部分上延伸并且相对于空腔自由移动。 柔性膜定位成与MEMS换能件接触。 柔性膜的第一部分覆盖MEMS换能构件，并且柔性膜的第二部分锚定到基底。

    Fabricating MEMS composite transducer including compliant membrane
    12.
    发明授权
    Fabricating MEMS composite transducer including compliant membrane 有权
    制造MEMS复合传感器，包括合适的膜

    公开(公告)号：US08409900B2

    公开(公告)日：2013-04-02

    申请号：US13089532

    申请日：2011-04-19

    申请人： James D. Huffman ,  Maria J. Lehmann

    发明人： James D. Huffman ,  Maria J. Lehmann

    IPC分类号： H01L21/02

    CPC分类号： B81C1/00182 ,  B81B2201/038 ,  B81B2203/053 ,  G01H11/06 ,  H02N1/002 ,  H04R1/222 ,  H04R17/02 ,  H04R31/00 ,  H04R2201/003

    摘要： A method of fabricating a MEMS composite transducer includes providing a substrate having a first surface and a second surface opposite the first surface. A transducing material is deposited over the first surface of the substrate. The transducing material is patterned by retaining transducing material in a first region and removing transducing material in a second region. A polymer layer is deposited over the first region and the second region. The polymer layer is patterned by retaining polymer in a third region and removing polymer in a fourth region. A first portion of the third region is coincident with a portion of the first region and a second portion of the third region is coincident with a portion of the second region. A cavity is etched from the second surface to the first surface of the substrate. An outer boundary of the cavity at the first surface of the substrate intersects the first region where transducing material is retained, so that a first portion of the transducing material is anchored to the first surface of the substrate and a second portion of the transducing material extends over at least a portion of the cavity.

    摘要翻译： 制造MEMS复合换能器的方法包括提供具有第一表面和与第一表面相对的第二表面的基底。 在衬底的第一表面上沉积换能材料。 通过将传感材料保持在第一区域中并且在第二区域中去除换能材料来对转导材料进行图案化。 聚合物层沉积在第一区域和第二区域上。 通过在第三区域中保持聚合物并在第四区域中除去聚合物来对聚合物层进行图案化。 第三区域的第一部分与第一区域的一部分重合，第三区域的第二部分与第二区域的一部分重合。 空腔从第二表面蚀刻到衬底的第一表面。 在基板的第一表面处的空腔的外边界与保持换能材料的第一区域相交，使得转换材料的第一部分锚定到基板的第一表面，并且换能材料的第二部分延伸 在空腔的至少一部分上方。

    MEMS COMPOSITE TRANSDUCER INCLUDING COMPLIANT MEMBRANE
    13.
    发明申请
    MEMS COMPOSITE TRANSDUCER INCLUDING COMPLIANT MEMBRANE 有权
    包括合成膜的MEMS复合传感器

    公开(公告)号：US20120266686A1

    公开(公告)日：2012-10-25

    申请号：US13089541

    申请日：2011-04-19

    申请人： James D. Huffman

    发明人： James D. Huffman

    IPC分类号： G01N3/08

    CPC分类号： G01L1/106 ,  G01L9/0013 ,  G01L9/0022 ,  G01P15/0802 ,  G01P15/09 ,  G01P2015/0837

    摘要： A MEMS composite transducer includes a substrate, a MEMS transducer, and a compliant membrane. Portions of the substrate define an outer boundary of a cavity. A first portion of the MEMS transducing member is anchored to the substrate. A second portion of the MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. The compliant membrane is positioned in contact with the MEMS transducing member. A first portion of the compliant membrane covers the MEMS transducing member and a second portion of the compliant membrane is anchored to the substrate.

    摘要翻译： MEMS复合换能器包括基板，MEMS换能器和柔性膜。 基板的一部分限定了空腔的外边界。 MEMS转换构件的第一部分被锚定到基底。 MEMS转换构件的第二部分在空腔的至少一部分上延伸并且相对于空腔自由移动。 柔性膜定位成与MEMS换能件接触。 柔性膜的第一部分覆盖MEMS换能构件，并且柔性膜的第二部分锚定到基底。

    CREATING AN IMPROVED PIEZOELECTRIC LAYER FOR TRANSDUCERS
    14.
    发明申请
    CREATING AN IMPROVED PIEZOELECTRIC LAYER FOR TRANSDUCERS 审中-公开
    为变压器创建改进的压电层

    公开(公告)号：US20120066876A1

    公开(公告)日：2012-03-22

    申请号：US12883219

    申请日：2010-09-16

    申请人： James D. Huffman

    发明人： James D. Huffman

    IPC分类号： H01L41/22

    CPC分类号： H01L41/29 ,  H01L41/047 ,  H01L41/0933 ,  H01L41/094 ,  H01L41/0973

    摘要： A method for forming a transducer, the method includes the steps of providing a substrate; providing a dielectric on the substrate; providing a first piezoelectric layer of the dielectric; providing a metal layer on the first piezoelectric layer; etching the metal layer to form a predetermined pattern having at least two electrodes; providing a second piezoelectric layer on the first piezoelectric layer and the etched metal layer; and etching a portion of the substrate surrounding the transducer to permit the transducer to move in a bender configuration.

    摘要翻译： 一种形成换能器的方法，所述方法包括提供基底的步骤; 在衬底上提供电介质; 提供电介质的第一压电层; 在所述第一压电层上提供金属层; 蚀刻金属层以形成具有至少两个电极的预定图案; 在第一压电层和蚀刻的金属层上提供第二压电层; 以及蚀刻围绕所述换能器的所述基底的一部分，以允许所述换能器以弯曲结构移动。

    Hidden hinge digital micromirror device with improved manufacturing yield and improved contrast ratio
    17.
    发明授权
    Hidden hinge digital micromirror device with improved manufacturing yield and improved contrast ratio 有权
    隐藏的铰链数字微镜装置，具有改进的制造成品率和改善的对比度

    公开(公告)号：US06819470B2

    公开(公告)日：2004-11-16

    申请号：US10359754

    申请日：2003-02-06

    申请人： Robert E. Meier ,  James D. Huffman

    发明人： Robert E. Meier ,  James D. Huffman

    IPC分类号： G02B2600

    CPC分类号： G02B26/0841

    摘要： An improved DMD type spatial light modulator having an array of pixels (18). The pixels (18) are of the “hidden hinge” design, each pixel having a mirror (30) supported over a hinged yoke (32). Addressing electrodes (26, 28) on an underlying metallization layer and addressing electrodes (50, 52) at the yoke level provide electrostatic forces that cause the mirrors to tilt and then to return to their flat state. The pixels (18) are designed to provide increased clearance between the leading edge of the yoke (32) and the underlying metallization layer when the mirrors (30) are tilted. Various features of the improved pixel (18) also improve the contrast ratio of images generated by the DMD.

    摘要翻译： 具有像素阵列（18）的改进的DMD型空间光调制器。 像素（18）是“隐藏的铰链”设计，每个像素具有支撑在铰接轭（32）上的反射镜（30）。 在底层金属化层上的寻址电极（26,28）和在磁轭级处的寻址电极（50,52）提供静电力，这些静电力使镜子倾斜然后返回到它们的平坦状态。 像素（18）被设计成当镜子（30）倾斜时，在轭（32）的前缘和下面的金属化层之间提供增大的间隙。 改进的像素（18）的各种特征还提高了由DMD产生的图像的对比度。

    Blocked stepped address voltage for micromechanical devices
    18.
    发明授权
    Blocked stepped address voltage for micromechanical devices 失效
    用于微机械器件的阻塞阶梯式寻址电压

    公开(公告)号：US06480177B2

    公开(公告)日：2002-11-12

    申请号：US09088673

    申请日：1998-06-02

    申请人： Donald B. Doherty ,  Henry Chu ,  James D. Huffman

    发明人： Donald B. Doherty ,  Henry Chu ,  James D. Huffman

    IPC分类号： G09G334

    CPC分类号： G09G3/346 ,  G09G2310/062

    摘要： A method of addressing an array of spatial light modulator elements. The method divides the array into blocks of elements, provides reset lines (MRST) to each of the block of elements, separate from the other blocks of elements, as well as address voltage supplies (VCCADDR) to each of the block of elements, separate from the other blocks of elements, addresses data to each of the blocks independent of the other blocks, resets each of the blocks, and steps address voltage to each of the block, where only blocks that are being reset receive the stepped address voltage. A spatial light modulator array (32) is also provided that has a layout to facilitate the method, including internal or external circuitry (34) to provide control of the stepped addressing voltages.

    摘要翻译： 寻址空间光调制器元件阵列的方法。 该方法将阵列分成多个元素块，为每个元素块提供复位线（MRST），与元素的其他块分离，以及每个元素块的地址电压供应（VCCADDR），分别 从其他块的块中，独立于其他块的块中的每个块地址数据，复位每个块，并且对每个块执行地址电压，其中只有正在复位的块接收阶梯式地址电压。 还提供了空间光调制器阵列（32），其具有便于该方法的布局，包括内部或外部电路（34）以提供对阶梯式寻址电压的控制。

    High yield spring-ring micromirror
    19.
    发明授权
    High yield spring-ring micromirror 有权
    高屈服弹簧环微镜

    公开(公告)号：US06285490B1

    公开(公告)日：2001-09-04

    申请号：US09475730

    申请日：1999-12-30

    申请人： Robert E. Meier ,  James D. Huffman ,  Richard L. Knipe

    发明人： Robert E. Meier ,  James D. Huffman ,  Richard L. Knipe

    IPC分类号： G02B2600

    CPC分类号： G02B26/0841

    摘要： An improved micromechanical device comprising a substrate (104), a deflectable member (102) suspended over the substrate (104), at least one spring-ring (124) supported above the substrate (104); and at least one address electrode (110) spaced apart from substrate (104). The spring-ring (124) resists deflection of the deflectable member (102) when the deflectable member (102) deflects to contact the spring-ring (124). By moving the address electrode (110) off the substrate level, the micromirror is much more immune to particle-caused short circuits, and a planer surface on which to fabricate the mirror (102) is provided without the need to utilize an inverse spacer layer.

    摘要翻译： 一种改进的微机械装置，包括衬底（104），悬置在衬底（104）上的可偏转构件（102），支撑在衬底（104）上方的至少一个弹簧环（124）; 以及与衬底（104）间隔开的至少一个地址电极（110）。 当可偏转构件（102）偏转以接触弹簧环（124）时，弹簧环（124）抵抗可偏转构件（102）的偏转。 通过将寻址电极（110）移动离开衬底水平，微镜对于颗粒引起的短路更加免疫，并且提供了在其上制造反射镜（102）的平面，而不需要使用反向间隔层 。