公开(公告)号：US08409900B2

公开(公告)日：2013-04-02

申请号：US13089532

申请日：2011-04-19

Applicant: James D. Huffman ,  Maria J. Lehmann

Inventor： James D. Huffman ,  Maria J. Lehmann

IPC: H01L21/02

CPC classification number: B81C1/00182 ,  B81B2201/038 ,  B81B2203/053 ,  G01H11/06 ,  H02N1/002 ,  H04R1/222 ,  H04R17/02 ,  H04R31/00 ,  H04R2201/003

Abstract: A method of fabricating a MEMS composite transducer includes providing a substrate having a first surface and a second surface opposite the first surface. A transducing material is deposited over the first surface of the substrate. The transducing material is patterned by retaining transducing material in a first region and removing transducing material in a second region. A polymer layer is deposited over the first region and the second region. The polymer layer is patterned by retaining polymer in a third region and removing polymer in a fourth region. A first portion of the third region is coincident with a portion of the first region and a second portion of the third region is coincident with a portion of the second region. A cavity is etched from the second surface to the first surface of the substrate. An outer boundary of the cavity at the first surface of the substrate intersects the first region where transducing material is retained, so that a first portion of the transducing material is anchored to the first surface of the substrate and a second portion of the transducing material extends over at least a portion of the cavity.

Abstract translation: 制造MEMS复合换能器的方法包括提供具有第一表面和与第一表面相对的第二表面的基底。 在衬底的第一表面上沉积换能材料。 通过将传感材料保持在第一区域中并且在第二区域中去除换能材料来对转导材料进行图案化。 聚合物层沉积在第一区域和第二区域上。 通过在第三区域中保持聚合物并在第四区域中除去聚合物来对聚合物层进行图案化。 第三区域的第一部分与第一区域的一部分重合，第三区域的第二部分与第二区域的一部分重合。 空腔从第二表面蚀刻到衬底的第一表面。 在基板的第一表面处的空腔的外边界与保持换能材料的第一区域相交，使得转换材料的第一部分锚定到基板的第一表面，并且换能材料的第二部分延伸 在空腔的至少一部分上方。

公开(公告)号：US20120270352A1

公开(公告)日：2012-10-25

申请号：US13089532

申请日：2011-04-19

Applicant: James D. Huffman ,  Maria J. Lehmann

Inventor： James D. Huffman ,  Maria J. Lehmann

IPC: H01L21/02

CPC classification number: B81C1/00182 ,  B81B2201/038 ,  B81B2203/053 ,  G01H11/06 ,  H02N1/002 ,  H04R1/222 ,  H04R17/02 ,  H04R31/00 ,  H04R2201/003

Abstract: A method of fabricating a MEMS composite transducer includes providing a substrate having a first surface and a second surface opposite the first surface. A transducing material is deposited over the first surface of the substrate. The transducing material is patterned by retaining transducing material in a first region and removing transducing material in a second region. A polymer layer is deposited over the first region and the second region. The polymer layer is patterned by retaining polymer in a third region and removing polymer in a fourth region. A first portion of the third region is coincident with a portion of the first region and a second portion of the third region is coincident with a portion of the second region. A cavity is etched from the second surface to the first surface of the substrate. An outer boundary of the cavity at the first surface of the substrate intersects the first region where transducing material is retained, so that a first portion of the transducing material is anchored to the first surface of the substrate and a second portion of the transducing material extends over at least a portion of the cavity.

Abstract translation: 制造MEMS复合换能器的方法包括提供具有第一表面和与第一表面相对的第二表面的基底。 在衬底的第一表面上沉积换能材料。 通过将传感材料保持在第一区域中并且在第二区域中去除换能材料来对转导材料进行图案化。 聚合物层沉积在第一区域和第二区域上。 通过在第三区域中保持聚合物并在第四区域中除去聚合物来对聚合物层进行图案化。 第三区域的第一部分与第一区域的一部分重合，第三区域的第二部分与第二区域的一部分重合。 空腔从第二表面蚀刻到衬底的第一表面。 在基板的第一表面处的空腔的外边界与保持换能材料的第一区域相交，使得转换材料的第一部分锚定到基板的第一表面，并且换能材料的第二部分延伸 在空腔的至少一部分上方。

公开(公告)号：US08820883B2

公开(公告)日：2014-09-02

申请号：US13170693

申请日：2011-06-28

Applicant: Yongcai Wang ,  Weibin Zhang ,  John A. Lebens ,  James D. Huffman ,  Robert E. McCovick

Inventor： Yongcai Wang ,  Weibin Zhang ,  John A. Lebens ,  James D. Huffman ,  Robert E. McCovick

IPC: B41J2/15 ,  B41J2/16

CPC classification number: B41J2/1631 ,  B41J2/1603 ,  B41J2/162 ,  B41J2/1623 ,  B41J2/1645

Abstract: A microfluidic device includes a substrate; at least one inorganic layer provided on the substrate; a patterned epoxy layer formed over the at least one inorganic layer, the patterned epoxy layer including a wall that defines a location for a fluid in the microfluidic device; and an alkoxysilane material containing a primary or secondary amine for promoting adhesion between the at least one inorganic layer and the patterned epoxy layer.

Abstract translation: 微流体装置包括：基底; 设置在基板上的至少一个无机层; 形成在所述至少一个无机层上的图案化环氧树脂层，所述图案化环氧树脂层包括限定所述微流体装置中的流体位置的壁; 和含有伯胺或仲胺的烷氧基硅烷材料，用于促进至少一个无机层和图案化的环氧树脂层之间的粘附。

公开(公告)号：US08667846B2

公开(公告)日：2014-03-11

申请号：US13089524

申请日：2011-04-19

Applicant: James D. Huffman ,  Gary A. Kneezel

Inventor： James D. Huffman ,  Gary A. Kneezel

IPC: G01N29/04

CPC classification number: G01N29/2437 ,  B06B1/0622 ,  G01N29/04 ,  G10K9/122 ,  G10K13/00

Abstract: Operating an ultrasonic transmitter and receiver includes providing a MEMS composite transducer. The MEMS composite transducer includes a substrate. Portions of the substrate define an outer boundary of a cavity. A first MEMS transducing member includes a first size. A first portion of the first MEMS transducing member is anchored to the substrate. A second portion of the first MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. A second MEMS transducing member includes a second size smaller than the first size of the first MEMS transducing member. A first portion of the second MEMS transducing member is anchored to the substrate. A second portion of the second MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. A compliant membrane is positioned in contact with the first and second MEMS transducing members. A first portion of the compliant membrane covers the first and second MEMS transducing members. A second portion of the compliant membrane is anchored to the substrate. Electrical pulses are sent to the first MEMS transducing member which causes the first MEMS transducing member and the compliant membrane to vibrate. The vibrations of the first MEMS transducing member and the compliant membrane are transmitted to an object. Echo signals are received from the object. The received echo signals are converted into electrical signals by the second MEMS transducing member.

Abstract translation: 操作超声波发射器和接收器包括提供MEMS复合传感器。 MEMS复合传感器包括基板。 基板的一部分限定了空腔的外边界。 第一MEMS转换构件包括第一尺寸。 第一MEMS转换构件的第一部分被锚固到基底。 第一MEMS转换构件的第二部分在空腔的至少一部分上延伸并且相对于空腔自由移动。 第二MEMS转换构件包括小于第一MEMS转换构件的第一尺寸的第二尺寸。 第二MEMS转换构件的第一部分被锚固到基底。 第二MEMS转换构件的第二部分在空腔的至少一部分上延伸并且相对于空腔自由移动。 柔性膜定位成与第一和第二MEMS转导构件接触。 柔性膜的第一部分覆盖第一和第二MEMS转导构件。 顺应性膜的第二部分锚定到基底。 电脉冲被发送到第一MEMS转换构件，这导致第一MEMS换能构件和柔性膜振动。 第一MEMS转换构件和柔性膜的振动被传送到物体。 从对象接收回波信号。 所接收的回波信号由第二MEMS转换构件转换成电信号。

公开(公告)号：US08631711B2

公开(公告)日：2014-01-21

申请号：US13089541

申请日：2011-04-19

Applicant: James D. Huffman

Inventor： James D. Huffman

IPC: G01B7/16

CPC classification number: G01L1/106 ,  G01L9/0013 ,  G01L9/0022 ,  G01P15/0802 ,  G01P15/09 ,  G01P2015/0837

Abstract: A MEMS composite transducer includes a substrate, a MEMS transducer, and a compliant membrane. Portions of the substrate define an outer boundary of a cavity. A first portion of the MEMS transducing member is anchored to the substrate. A second portion of the MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. The compliant membrane is positioned in contact with the MEMS transducing member. A first portion of the compliant membrane covers the MEMS transducing member and a second portion of the compliant membrane is anchored to the substrate.

Abstract translation: MEMS复合换能器包括基板，MEMS换能器和柔性膜。 基板的一部分限定了空腔的外边界。 MEMS转换构件的第一部分被锚定到基底。 MEMS转换构件的第二部分在空腔的至少一部分上延伸并且相对于空腔自由移动。 柔性膜定位成与MEMS换能件接触。 柔性膜的第一部分覆盖MEMS换能构件，并且柔性膜的第二部分锚定到基底。

公开(公告)号：US20120266686A1

公开(公告)日：2012-10-25

申请号：US13089541

申请日：2011-04-19

Applicant: James D. Huffman

Inventor： James D. Huffman

IPC: G01N3/08

CPC classification number: G01L1/106 ,  G01L9/0013 ,  G01L9/0022 ,  G01P15/0802 ,  G01P15/09 ,  G01P2015/0837

Abstract: A MEMS composite transducer includes a substrate, a MEMS transducer, and a compliant membrane. Portions of the substrate define an outer boundary of a cavity. A first portion of the MEMS transducing member is anchored to the substrate. A second portion of the MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. The compliant membrane is positioned in contact with the MEMS transducing member. A first portion of the compliant membrane covers the MEMS transducing member and a second portion of the compliant membrane is anchored to the substrate.

Abstract translation: MEMS复合换能器包括基板，MEMS换能器和柔性膜。 基板的一部分限定了空腔的外边界。 MEMS转换构件的第一部分被锚定到基底。 MEMS转换构件的第二部分在空腔的至少一部分上延伸并且相对于空腔自由移动。 柔性膜定位成与MEMS换能件接触。 柔性膜的第一部分覆盖MEMS换能构件，并且柔性膜的第二部分锚定到基底。

公开(公告)号：US20120066876A1

公开(公告)日：2012-03-22

申请号：US12883219

申请日：2010-09-16

Applicant: James D. Huffman

Inventor： James D. Huffman

IPC: H01L41/22

CPC classification number: H01L41/29 ,  H01L41/047 ,  H01L41/0933 ,  H01L41/094 ,  H01L41/0973

Abstract: A method for forming a transducer, the method includes the steps of providing a substrate; providing a dielectric on the substrate; providing a first piezoelectric layer of the dielectric; providing a metal layer on the first piezoelectric layer; etching the metal layer to form a predetermined pattern having at least two electrodes; providing a second piezoelectric layer on the first piezoelectric layer and the etched metal layer; and etching a portion of the substrate surrounding the transducer to permit the transducer to move in a bender configuration.

Abstract translation: 一种形成换能器的方法，所述方法包括提供基底的步骤; 在衬底上提供电介质; 提供电介质的第一压电层; 在所述第一压电层上提供金属层; 蚀刻金属层以形成具有至少两个电极的预定图案; 在第一压电层和蚀刻的金属层上提供第二压电层; 以及蚀刻围绕所述换能器的所述基底的一部分，以允许所述换能器以弯曲结构移动。

公开(公告)号：US07116459B2

公开(公告)日：2006-10-03

申请号：US10328508

申请日：2002-12-23

Applicant: James D. Huffman

Inventor： James D. Huffman

IPC: G02F1/01

CPC classification number: G09G3/346 ,  G02B26/0841 ,  G09G2330/04

Abstract: An improved SLM that is capable of detecting when light incident on the SLM exceeds a predetermined threshold. A diode is fabricated around, or within the pixel array. Light incident on the array (and the diode) results in a current increase through the diode, which may detected and used to initiate a disable signal to control circuitry of the SLM.

公开(公告)号：US07026251B2

公开(公告)日：2006-04-11

申请号：US10317330

申请日：2002-12-12

Applicant: Jack C. Smith ,  James D. Huffman

Inventor： Jack C. Smith ,  James D. Huffman

IPC: H01L21/302

CPC classification number: G03F7/70291 ,  G03F7/70433 ,  G03F7/70475

Abstract: A method of providing a reticle layout for a die having at least three patterns, namely a right pattern, a center pattern, and a left pattern, where the center pattern is oversized relative to the photolithography step size. To avoid the non-uniformity effects resulting from stitching the center pattern, the center pattern size is minimized. This is accomplished by moving portions of the center pattern to the left and right patterns.

公开(公告)号：US06819470B2

公开(公告)日：2004-11-16

申请号：US10359754

申请日：2003-02-06

Applicant: Robert E. Meier ,  James D. Huffman

Inventor： Robert E. Meier ,  James D. Huffman

IPC: G02B2600

CPC classification number: G02B26/0841

Abstract: An improved DMD type spatial light modulator having an array of pixels (18). The pixels (18) are of the “hidden hinge” design, each pixel having a mirror (30) supported over a hinged yoke (32). Addressing electrodes (26, 28) on an underlying metallization layer and addressing electrodes (50, 52) at the yoke level provide electrostatic forces that cause the mirrors to tilt and then to return to their flat state. The pixels (18) are designed to provide increased clearance between the leading edge of the yoke (32) and the underlying metallization layer when the mirrors (30) are tilted. Various features of the improved pixel (18) also improve the contrast ratio of images generated by the DMD.

Abstract translation: 具有像素阵列（18）的改进的DMD型空间光调制器。 像素（18）是“隐藏的铰链”设计，每个像素具有支撑在铰接轭（32）上的反射镜（30）。 在底层金属化层上的寻址电极（26,28）和在磁轭级处的寻址电极（50,52）提供静电力，这些静电力使镜子倾斜然后返回到它们的平坦状态。 像素（18）被设计成当镜子（30）倾斜时，在轭（32）的前缘和下面的金属化层之间提供增大的间隙。 改进的像素（18）的各种特征还提高了由DMD产生的图像的对比度。