公开(公告)号：US20120270352A1

公开(公告)日：2012-10-25

申请号：US13089532

申请日：2011-04-19

Applicant: James D. Huffman ,  Maria J. Lehmann

Inventor： James D. Huffman ,  Maria J. Lehmann

IPC: H01L21/02

CPC classification number: B81C1/00182 ,  B81B2201/038 ,  B81B2203/053 ,  G01H11/06 ,  H02N1/002 ,  H04R1/222 ,  H04R17/02 ,  H04R31/00 ,  H04R2201/003

Abstract: A method of fabricating a MEMS composite transducer includes providing a substrate having a first surface and a second surface opposite the first surface. A transducing material is deposited over the first surface of the substrate. The transducing material is patterned by retaining transducing material in a first region and removing transducing material in a second region. A polymer layer is deposited over the first region and the second region. The polymer layer is patterned by retaining polymer in a third region and removing polymer in a fourth region. A first portion of the third region is coincident with a portion of the first region and a second portion of the third region is coincident with a portion of the second region. A cavity is etched from the second surface to the first surface of the substrate. An outer boundary of the cavity at the first surface of the substrate intersects the first region where transducing material is retained, so that a first portion of the transducing material is anchored to the first surface of the substrate and a second portion of the transducing material extends over at least a portion of the cavity.

Abstract translation: 制造MEMS复合换能器的方法包括提供具有第一表面和与第一表面相对的第二表面的基底。 在衬底的第一表面上沉积换能材料。 通过将传感材料保持在第一区域中并且在第二区域中去除换能材料来对转导材料进行图案化。 聚合物层沉积在第一区域和第二区域上。 通过在第三区域中保持聚合物并在第四区域中除去聚合物来对聚合物层进行图案化。 第三区域的第一部分与第一区域的一部分重合，第三区域的第二部分与第二区域的一部分重合。 空腔从第二表面蚀刻到衬底的第一表面。 在基板的第一表面处的空腔的外边界与保持换能材料的第一区域相交，使得转换材料的第一部分锚定到基板的第一表面，并且换能材料的第二部分延伸 在空腔的至少一部分上方。

公开(公告)号：US08409900B2

公开(公告)日：2013-04-02

申请号：US13089532

申请日：2011-04-19

Applicant: James D. Huffman ,  Maria J. Lehmann

Inventor： James D. Huffman ,  Maria J. Lehmann

IPC: H01L21/02

CPC classification number: B81C1/00182 ,  B81B2201/038 ,  B81B2203/053 ,  G01H11/06 ,  H02N1/002 ,  H04R1/222 ,  H04R17/02 ,  H04R31/00 ,  H04R2201/003

Abstract: A method of fabricating a MEMS composite transducer includes providing a substrate having a first surface and a second surface opposite the first surface. A transducing material is deposited over the first surface of the substrate. The transducing material is patterned by retaining transducing material in a first region and removing transducing material in a second region. A polymer layer is deposited over the first region and the second region. The polymer layer is patterned by retaining polymer in a third region and removing polymer in a fourth region. A first portion of the third region is coincident with a portion of the first region and a second portion of the third region is coincident with a portion of the second region. A cavity is etched from the second surface to the first surface of the substrate. An outer boundary of the cavity at the first surface of the substrate intersects the first region where transducing material is retained, so that a first portion of the transducing material is anchored to the first surface of the substrate and a second portion of the transducing material extends over at least a portion of the cavity.

Abstract translation: 制造MEMS复合换能器的方法包括提供具有第一表面和与第一表面相对的第二表面的基底。 在衬底的第一表面上沉积换能材料。 通过将传感材料保持在第一区域中并且在第二区域中去除换能材料来对转导材料进行图案化。 聚合物层沉积在第一区域和第二区域上。 通过在第三区域中保持聚合物并在第四区域中除去聚合物来对聚合物层进行图案化。 第三区域的第一部分与第一区域的一部分重合，第三区域的第二部分与第二区域的一部分重合。 空腔从第二表面蚀刻到衬底的第一表面。 在基板的第一表面处的空腔的外边界与保持换能材料的第一区域相交，使得转换材料的第一部分锚定到基板的第一表面，并且换能材料的第二部分延伸 在空腔的至少一部分上方。

公开(公告)号：US20120098907A1

公开(公告)日：2012-04-26

申请号：US12911751

申请日：2010-10-26

Applicant: Yonglin Xie ,  Carolyn R. Ellinger ,  Maria J. Lehmann ,  Joseph Jech, JR. ,  Qing Yang

Inventor： Yonglin Xie ,  Carolyn R. Ellinger ,  Maria J. Lehmann ,  Joseph Jech, JR. ,  Qing Yang

IPC: B41J2/185 ,  B41J2/18

CPC classification number: B41J2/1404 ,  B41J2/1433 ,  B41J2002/14403 ,  B41J2202/12

Abstract: A liquid dispenser includes a liquid supply channel, a liquid return channel, and a liquid dispensing channel. The liquid dispensing channel includes a wall. The wall includes a surface. A portion of the wall defines an outlet opening. A drain is located in the wall downstream from the outlet opening. The drain includes a radius of curvature as viewed from a direction perpendicular to the wall. A liquid supply provides liquid that flows from the liquid supply channel through the liquid dispensing channel to the liquid return channel. A diverter member selectively diverts a portion of the flowing liquid through the outlet opening of the liquid dispensing channel.

Abstract translation: 液体分配器包括液体供应通道，液体返回通道和液体分配通道。 液体分配通道包括壁。 墙壁包括一个表面。 壁的一部分限定出口开口。 排水口位于出口开口下游的墙壁中。 漏极包括从垂直于壁的方向观察的曲率半径。 液体供应液体从液体供应通道通过液体分配通道流到液体返回通道。 分流器构件选择性地将流动的液体的一部分转过液体分配通道的出口。

公开(公告)号：US08328335B2

公开(公告)日：2012-12-11

申请号：US12911758

申请日：2010-10-26

Applicant: Yonglin Xie ,  Joseph Jech, Jr. ,  Carolyn R. Ellinger ,  Maria J. Lehmann ,  Ali G. Lopez ,  Qing Yang

Inventor： Yonglin Xie ,  Joseph Jech, Jr. ,  Carolyn R. Ellinger ,  Maria J. Lehmann ,  Ali G. Lopez ,  Qing Yang

IPC: B41J2/04

CPC classification number: B41J2/14016 ,  B41J2002/14403 ,  B41J2002/14475 ,  B41J2202/12

Abstract: A liquid dispenser is provided that includes a liquid supply channel, a liquid dispensing channel, and a liquid return channel. The liquid dispensing channel includes a wall. The wall includes a surface. A portion of the wall defines an outlet opening that includes a downstream edge relative to a direction of liquid flow through the liquid dispensing channel. The downstream edge is sloped relative to the surface of the wall of the liquid dispensing channel. A liquid is provided that flows from the liquid supply channel through the liquid dispensing channel to the liquid return channel. A liquid drop is caused to be ejected from the outlet opening of the liquid dispensing channel by selectively actuating a diverter member to divert a portion of the flowing liquid through the outlet opening of the liquid dispensing channel.

Abstract translation: 提供了一种液体分配器，其包括液体供应通道，液体分配通道和液体返回通道。 液体分配通道包括壁。 墙壁包括一个表面。 壁的一部分限定出口开口，其包括相对于流过液体分配通道的液体流动方向的下游边缘。 下游边缘相对于液体分配通道的壁的表面倾斜。 提供从液体供应通道通过液体分配通道流到液体返回通道的液体。 通过选择性地致动分流器构件以使流动的液体的一部分通过液体分配通道的出口开口而使液滴从液体分配通道的出口开口排出。

公开(公告)号：US08303091B2

公开(公告)日：2012-11-06

申请号：US12911755

申请日：2010-10-26

Applicant: Yonglin Xie ,  Carolyn R. Ellinger ,  Maria J. Lehmann ,  Joseph Jech, Jr. ,  Qing Yang

Inventor： Yonglin Xie ,  Carolyn R. Ellinger ,  Maria J. Lehmann ,  Joseph Jech, Jr. ,  Qing Yang

IPC: B41J2/05

CPC classification number: B41J2/14016 ,  B41J2002/14403 ,  B41J2002/14475 ,  B41J2202/12

Abstract: A liquid dispenser is provided that includes a liquid supply channel, a liquid dispensing channel, and a liquid return channel. The liquid dispensing channel includes a wall. The wall includes a surface. A portion of the wall defines an outlet opening. Another portion of the wall defines a drain located in the wall downstream from the outlet opening. The drain includes a radius of curvature as viewed from a direction perpendicular to the wall. A liquid is provided that flows from the liquid supply channel through the liquid dispensing channel to the liquid return channel. A liquid drop is caused to be ejected from the outlet opening of the liquid dispensing channel by selectively actuating a diverter member to divert a portion of the flowing liquid through the outlet opening of the liquid dispensing channel.

Abstract translation: 提供了一种液体分配器，其包括液体供应通道，液体分配通道和液体返回通道。 液体分配通道包括壁。 墙壁包括一个表面。 壁的一部分限定出口开口。 壁的另一部分限定位于出口开口下游的壁中的排水口。 漏极包括从垂直于壁的方向观察的曲率半径。 提供从液体供应通道通过液体分配通道流到液体返回通道的液体。 通过选择性地致动分流器构件以使流动的液体的一部分通过液体分配通道的出口开口而使液滴从液体分配通道的出口开口排出。

公开(公告)号：US20120098892A1

公开(公告)日：2012-04-26

申请号：US12911758

申请日：2010-10-26

Applicant: Yonglin Xie ,  Joseph Jech, JR. ,  Carolyn R. Ellinger ,  Maria J. Lehmann ,  Ali G. Lopez ,  Qing Yang

Inventor： Yonglin Xie ,  Joseph Jech, JR. ,  Carolyn R. Ellinger ,  Maria J. Lehmann ,  Ali G. Lopez ,  Qing Yang

IPC: B41J2/04

CPC classification number: B41J2/14016 ,  B41J2002/14403 ,  B41J2002/14475 ,  B41J2202/12

Abstract: A liquid dispenser is provided that includes a liquid supply channel, a liquid dispensing channel, and a liquid return channel. The liquid dispensing channel includes a wall. The wall includes a surface. A portion of the wall defines an outlet opening that includes a downstream edge relative to a direction of liquid flow through the liquid dispensing channel. The downstream edge is sloped relative to the surface of the wall of the liquid dispensing channel. A liquid is provided that flows from the liquid supply channel through the liquid dispensing channel to the liquid return channel. A liquid drop is caused to be ejected from the outlet opening of the liquid dispensing channel by selectively actuating a diverter member to divert a portion of the flowing liquid through the outlet opening of the liquid dispensing channel.

Abstract translation: 提供了一种液体分配器，其包括液体供应通道，液体分配通道和液体返回通道。 液体分配通道包括壁。 墙壁包括一个表面。 壁的一部分限定出口开口，其包括相对于流过液体分配通道的液体流动方向的下游边缘。 下游边缘相对于液体分配通道的壁的表面倾斜。 提供从液体供应通道通过液体分配通道流到液体返回通道的液体。 通过选择性地致动分流器构件以使流动的液体的一部分通过液体分配通道的出口开口而使液滴从液体分配通道的出口开口排出。

公开(公告)号：US08573743B2

公开(公告)日：2013-11-05

申请号：US12911751

申请日：2010-10-26

Applicant: Yonglin Xie ,  Carolyn R. Ellinger ,  Maria J. Lehmann ,  Joseph Jech, Jr. ,  Qing Yang

Inventor： Yonglin Xie ,  Carolyn R. Ellinger ,  Maria J. Lehmann ,  Joseph Jech, Jr. ,  Qing Yang

IPC: B41J2/16 ,  B41J2/18

CPC classification number: B41J2/1404 ,  B41J2/1433 ,  B41J2002/14403 ,  B41J2202/12

Abstract: A liquid dispenser includes a liquid supply channel, a liquid return channel, and a liquid dispensing channel. The liquid dispensing channel includes a wall. The wall includes a surface. A portion of the wall defines an outlet opening. A drain is located in the wall downstream from the outlet opening. The drain includes a radius of curvature as viewed from a direction perpendicular to the wall. A liquid supply provides liquid that flows from the liquid supply channel through the liquid dispensing channel to the liquid return channel. A diverter member selectively diverts a portion of the flowing liquid through the outlet opening of the liquid dispensing channel.

Abstract translation: 液体分配器包括液体供应通道，液体返回通道和液体分配通道。 液体分配通道包括壁。 墙壁包括一个表面。 壁的一部分限定出口开口。 排水口位于出口开口下游的墙壁中。 漏极包括从垂直于壁的方向观察的曲率半径。 液体供应液体从液体供应通道通过液体分配通道流到液体返回通道。 分流器构件选择性地将流动的液体的一部分转过液体分配通道的出口。

公开(公告)号：US08439481B2

公开(公告)日：2013-05-14

申请号：US12911756

申请日：2010-10-26

Applicant: Yonglin Xie ,  Joseph Jech, Jr. ,  Carolyn R. Ellinger ,  Maria J. Lehmann ,  Ali G. Lopez ,  Qing Yang

Inventor： Yonglin Xie ,  Joseph Jech, Jr. ,  Carolyn R. Ellinger ,  Maria J. Lehmann ,  Ali G. Lopez ,  Qing Yang

IPC: B41J2/135

CPC classification number: B41J2/14016 ,  B41J2/14112 ,  B41J2002/14387 ,  B41J2002/14403 ,  B41J2002/14475 ,  B41J2202/12 ,  Y10T137/6497

Abstract: A liquid dispenser includes a liquid supply channel, a liquid return channel; and a liquid dispensing channel. The liquid dispensing channel includes a wall. The wall includes a surface. A portion of the wall defines an outlet opening. The outlet opening includes a downstream edge relative to a direction of liquid flow through the liquid dispensing channel. The downstream edge is sloped relative to the surface of the wall of the liquid dispensing channel. A liquid supply provides liquid that flows from the liquid supply channel through the liquid dispensing channel to the liquid return channel. A diverter member selectively diverts a portion of the flowing liquid through the outlet opening of the liquid dispensing channel.

Abstract translation: 液体分配器包括液体供应通道，液体返回通道; 和液体分配通道。 液体分配通道包括壁。 墙壁包括一个表面。 壁的一部分限定出口开口。 出口开口包括相对于流过液体分配通道的液体流动方向的下游边缘。 下游边缘相对于液体分配通道的壁的表面倾斜。 液体供应液体从液体供应通道通过液体分配通道流到液体返回通道。 分流器构件选择性地将流动的液体的一部分转过液体分配通道的出口。

公开(公告)号：US20120098891A1

公开(公告)日：2012-04-26

申请号：US12911755

申请日：2010-10-26

Applicant: Yonglin Xie ,  Carolyn R. Ellinger ,  Maria J. Lehmann ,  Joseph Jech, JR. ,  Qing Yang

Inventor： Yonglin Xie ,  Carolyn R. Ellinger ,  Maria J. Lehmann ,  Joseph Jech, JR. ,  Qing Yang

IPC: B41J2/04

CPC classification number: B41J2/14016 ,  B41J2002/14403 ,  B41J2002/14475 ,  B41J2202/12

Abstract: A liquid dispenser is provided that includes a liquid supply channel, a liquid dispensing channel, and a liquid return channel. The liquid dispensing channel includes a wall. The wall includes a surface. A portion of the wall defines an outlet opening. Another portion of the wall defines a drain located in the wall downstream from the outlet opening. The drain includes a radius of curvature as viewed from a direction perpendicular to the wall. A liquid is provided that flows from the liquid supply channel through the liquid dispensing channel to the liquid return channel. A liquid drop is caused to be ejected from the outlet opening of the liquid dispensing channel by selectively actuating a diverter member to divert a portion of the flowing liquid through the outlet opening of the liquid dispensing channel.

Abstract translation: 提供了一种液体分配器，其包括液体供应通道，液体分配通道和液体返回通道。 液体分配通道包括壁。 墙壁包括一个表面。 壁的一部分限定出口开口。 壁的另一部分限定位于出口开口下游的壁中的排水口。 漏极包括从垂直于壁的方向观察的曲率半径。 提供从液体供应通道通过液体分配通道流到液体返回通道的液体。 通过选择性地致动分流器构件以使流动的液体的一部分通过液体分配通道的出口开口而使液滴从液体分配通道的出口开口排出。

公开(公告)号：US20120098887A1

公开(公告)日：2012-04-26

申请号：US12911756

申请日：2010-10-26

Applicant: Yonglin Xie ,  Joseph Jech, JR. ,  Carolyn R. Ellinger ,  Maria J. Lehmann ,  Ali G. Lopez ,  Qing Yang

Inventor： Yonglin Xie ,  Joseph Jech, JR. ,  Carolyn R. Ellinger ,  Maria J. Lehmann ,  Ali G. Lopez ,  Qing Yang

IPC: B41J2/135

CPC classification number: B41J2/14016 ,  B41J2/14112 ,  B41J2002/14387 ,  B41J2002/14403 ,  B41J2002/14475 ,  B41J2202/12 ,  Y10T137/6497

Abstract: A liquid dispenser includes a liquid supply channel, a liquid return channel; and a liquid dispensing channel. The liquid dispensing channel includes a wall. The wall includes a surface. A portion of the wall defines an outlet opening. The outlet opening includes a downstream edge relative to a direction of liquid flow through the liquid dispensing channel. The downstream edge is sloped relative to the surface of the wall of the liquid dispensing channel. A liquid supply provides liquid that flows from the liquid supply channel through the liquid dispensing channel to the liquid return channel. A diverter member selectively diverts a portion of the flowing liquid through the outlet opening of the liquid dispensing channel.

Abstract translation: 液体分配器包括液体供应通道，液体返回通道; 和液体分配通道。 液体分配通道包括壁。 墙壁包括一个表面。 壁的一部分限定出口开口。 出口开口包括相对于流过液体分配通道的液体流动方向的下游边缘。 下游边缘相对于液体分配通道的壁的表面倾斜。 液体供应液体从液体供应通道通过液体分配通道流到液体返回通道。 分流器构件选择性地将流动的液体的一部分转过液体分配通道的出口。