公开(公告)号：US20160280537A1

公开(公告)日：2016-09-29

申请号：US15178512

申请日：2016-06-09

Applicant: CALIFORNIA INSTITUTE OF TECHNOLOGY

Inventor： Michael D. HENRY ,  Andrew P. HOMYK ,  Axel SCHERER ,  Thomas A. TOMBRELLO ,  Sameer WALAVALKAR

IPC: B81C1/00 ,  B81B1/00 ,  B01J19/00

CPC classification number: B81C1/00111 ,  B01J19/0046 ,  B01J2219/00504 ,  B01J2219/00664 ,  B81B1/006 ,  B81B2203/0361 ,  B81B2207/056 ,  B81C2201/0112 ,  B81C2201/0132 ,  B81C2201/0133 ,  B81C2201/0159 ,  G01N1/405 ,  H01L21/3065 ,  H01L21/30655 ,  H01L21/3081 ,  H01L21/3086 ,  Y10T436/25375

Abstract: Methods for fabricating of high aspect ratio probes and deforming micropillars and nanopillars are described. Use of polymers in deforming nanopillars and micropillars is also described.

公开(公告)号：US20160069810A1

公开(公告)日：2016-03-10

申请号：US14621295

申请日：2015-02-12

Applicant: CALIFORNIA INSTITUTE OF TECHNOLOGY

Inventor： Sameer WALAVALKAR ,  Axel SCHERER ,  Thomas A. TOMBRELLO

IPC: G01N21/65 ,  G01N33/18 ,  G01N33/483 ,  G01N33/00

CPC classification number: G01N21/658 ,  A61B5/00 ,  A61B5/0031 ,  A61B5/14503 ,  A61B5/1455 ,  A61B5/14552 ,  A61B5/1459 ,  A61B5/686 ,  G01N33/0004 ,  G01N33/18 ,  G01N33/483

Abstract: Methods and systems for nanopillar sensors are described. Nanopillars can be defined on a substrate, and metal deposited on the nanopillars. A thermal treatment can reflow the metal on the nanopillars forming metallic bulbs on the top end of the nanopillars. These structures can have enhanced optical detection when functionalized with biological agents, or can detect gases, particles and liquids through interaction with the metal layer on the nanopillars.

Abstract translation: 描述了纳米柱传感器的方法和系统。 纳米玻璃可以在基底上定义，金属沉积在纳米柱上。 热处理可以回流纳米柱上的金属，在纳米柱的顶端形成金属灯泡。 这些结构可以在用生物制剂进行功能化时具有增强的光学检测，或者可以通过与纳米柱上的金属层相互作用来检测气体，颗粒和液体。

公开(公告)号：US20140072993A1

公开(公告)日：2014-03-13

申请号：US13852476

申请日：2013-03-28

Applicant: CALIFORNIA INSTITUTE OF TECHNOLOGY

Inventor： Aditya RAJAGOPAL ,  Axel SCHERER ,  Michael D. HENRY ,  Sameer WALAVALKAR ,  Thomas A. TOMBRELLO ,  Andrew P. HOMYK

IPC: G01N27/327

CPC classification number: C12Q1/02 ,  A61B5/04001 ,  G01N27/3275 ,  G01N27/4146 ,  G01R1/06711 ,  G01R1/07342 ,  H01L29/413 ,  H01L29/42376 ,  H01L29/4966 ,  H01L29/66477 ,  H01L29/78 ,  H01L29/7831

Abstract: The basic structure and functionality of a probe as disclosed herein allows for flexibly incorporating into the probe, various sensing elements for various sensing applications. Two example applications among these various sensing applications include bio-sensing and chemical-sensing applications. For bio-sensing applications the probe, which is fabricated upon a silicon substrate, includes a bio-sensing element such as a nano-pillar transistor, and for chemical-sensing applications the probe includes a sensing element that has a functionalized contact area whereby the sensing element generates a voltage when exposed to one or more chemicals of interest.

Abstract translation: 本文公开的探针的基本结构和功能允许灵活地并入到探针中，用于各种感测应用的各种感测元件。 这些各种感测应用中的两个示例应用包括生物感测和化学感测应用。 对于生物感测应用，制造在硅衬底上的探针包括诸如纳米柱晶体管的生物感测元件，并且对于化学感测应用，探针包括具有功能化接触区域的感测元件， 当暴露于感兴趣的一种或多种化学品时，感测元件产生电压。

公开(公告)号：US20150050746A1

公开(公告)日：2015-02-19

申请号：US14527039

申请日：2014-10-29

Applicant: CALIFORNIA INSTITUTE OF TECHNOLOGY

Inventor： Michael D. HENRY ,  Andrew P. HOMYK ,  Axel SCHERER ,  Thomas A. TOMBRELLO ,  Sameer WALAVALKAR

IPC: G01N1/40

CPC classification number: B81C1/00111 ,  B01J19/0046 ,  B01J2219/00504 ,  B01J2219/00664 ,  B81B1/006 ,  B81B2203/0361 ,  B81B2207/056 ,  B81C2201/0112 ,  B81C2201/0132 ,  B81C2201/0133 ,  B81C2201/0159 ,  G01N1/405 ,  H01L21/3065 ,  H01L21/30655 ,  H01L21/3081 ,  H01L21/3086 ,  Y10T436/25375

Abstract: Methods for fabricating of high aspect ratio probes and deforming micropillars and nanopillars are described. Use of polymers in deforming nanopillars and micropillars is also described.

Abstract translation: 描述了制造高纵横比探针和变形微柱和纳米柱的方法。 还描述了聚合物在变形纳米柱和微柱体中的使用。

公开(公告)号：US20140357974A1

公开(公告)日：2014-12-04

申请号：US14463392

申请日：2014-08-19

Applicant: CALIFORNIA INSTITUTE OF TECHNOLOGY

Inventor： Aditya RAJAGOPAL ,  Axel SCHERER ,  Michael D. HENRY ,  Sameer WALAVALKAR ,  Thomas A. TOMBRELLO ,  Andrew P. HOMYK

IPC: H01L29/423 ,  A61B5/04 ,  H01L29/49 ,  H01L29/78 ,  H01L29/41

CPC classification number: C12Q1/02 ,  A61B5/04001 ,  G01N27/3275 ,  G01N27/4146 ,  G01R1/06711 ,  G01R1/07342 ,  H01L29/413 ,  H01L29/42376 ,  H01L29/4966 ,  H01L29/66477 ,  H01L29/78 ,  H01L29/7831

Abstract: A field effect nano-pillar transistor has a pillar shaped gate element incorporating a biomimitec portion that provides various advantages over prior art devices. The small size of the nano-pillar transistor allows for advantageous insertion into cellular membranes, and the biomimitec character of the gate element operates as an advantageous interface for sensing small amplitude voltages such as transmembrane cell potentials. The nano-pillar transistor can be used in various embodiments to stimulate cells, to measure cell response, or to perform a combination of both actions.

公开(公告)号：US20140256114A1

公开(公告)日：2014-09-11

申请号：US14186839

申请日：2014-02-21

Applicant: CALIFORNIA INSTITUTE OF TECHNOLOGY

Inventor： Sameer WALAVALKAR ,  Mark D. GOLDBERG ,  Axel SCHERER

IPC: H01L21/762

CPC classification number: H01L21/76283 ,  H01L21/762

Abstract: Novel methods to fabricate biological sensors and electronics are disclosed. A silicon-on-insulator wafer can be employed by etching a pattern of holes in the silicon layer, then a pattern of cavities in the insulating layer, and then sealing the top of the cavities. Further, n or p doped regions and metallic regions can be defined in the processed wafer, thereby enabling integration of biological sensing and electronic capabilities in the same wafer.

Abstract translation: 公开了制造生物传感器和电子学的新方法。 可以通过蚀刻硅层中的孔的图案，然后在绝缘层中蚀刻空腔的图案，然后密封空腔的顶部来采用绝缘体上硅晶片。 此外，可以在经处理的晶片中限定n或p个掺杂区域和金属区域，从而使生物感测和电子能力能够集成在相同的晶片中。

公开(公告)号：US20140070286A1

公开(公告)日：2014-03-13

申请号：US13852480

申请日：2013-03-28

Applicant: California Institute of Technology

Inventor： Aditya RAJAGOPAL ,  Axel SCHERER ,  Michael D. HENRY ,  Sameer WALAVALKAR ,  Thomas A. TOMBRELLO ,  Andrew P. HOMYK

IPC: H01L29/78 ,  H01L29/66

CPC classification number: C12Q1/02 ,  A61B5/04001 ,  G01N27/3275 ,  G01N27/4146 ,  G01R1/06711 ,  G01R1/07342 ,  H01L29/413 ,  H01L29/42376 ,  H01L29/4966 ,  H01L29/66477 ,  H01L29/78 ,  H01L29/7831

Abstract: A field effect nano-pillar transistor has a pillar shaped gate element incorporating a biomimitec portion that provides various advantages over prior art devices. The small size of the nano-pillar transistor allows for advantageous insertion into cellular membranes, and the biomimitec character of the gate element operates as an advantageous interface for sensing small amplitude voltages such as transmembrane cell potentials. The nano-pillar transistor can be used in various embodiments to stimulate cells, to measure cell response, or to perform a combination of both actions.

Abstract translation: 场效应纳米柱晶体管具有结合有生物医学部分的柱形门元件，其提供了优于现有技术器件的各种优点。 纳米柱晶体管的小尺寸允许有利地插入到细胞膜中，并且栅极元件的生物学特性作为用于感测小幅度电压（例如跨膜电池电位）的有利接口。 纳米柱晶体管可用于各种实施例中以刺激细胞，测量细胞反应或执行两种动作的组合。