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公开(公告)号：US07066707B1
公开(公告)日：2006-06-27
申请号：US10087400
申请日：2002-03-01
IPC分类号： B65G49/07
CPC分类号： H01L21/67778 , H01L21/67766 , H01L21/67775 , H01L21/68707 , Y10S414/137
摘要： An integrated system is disclosed for workpiece handling and/or inspection at the front end of a tool. The system comprises a rigid member of unitary construction such as a metal plate which mounts to the front of a tool associated with a semiconductor process. The front end components, including the load port assemblies, prealigners and workpiece handling robot, are mounted to the plate to provide precise and repeatable positioning of the front end components with respect to each other.
摘要翻译： 公开了一种用于工具前端的工件处理和/或检查的集成系统。 该系统包括一体式结构的刚性构件，例如安装到与半导体工艺相关联的工具的前部的金属板。 包括负载端口组件，预对准器和工件处理机器人的前端部件安装到板上，以提供前端部件相对于彼此的精确和可重复的定位。
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公开(公告)号：US08851817B2
公开(公告)日：2014-10-07
申请号：US12943198
申请日：2010-11-10
IPC分类号： H01L21/677 , H01L21/687
CPC分类号： H01L21/67778 , H01L21/67766 , H01L21/67775 , H01L21/68707 , Y10S414/139
摘要： The present invention is a wafer transfer system that transports individual wafers between chambers within an isolated environment. In one embodiment, a wafer is transported by a wafer shuttle that travel within a transport enclosure. The interior of the transport enclosure is isolated from the atmospheric conditions of the surrounding wafer fabrication facility. Thus, an individual wafer may be transported throughout the wafer fabrication facility without having to maintain a clean room environment for the entire facility. The wafer shuttle may be propelled by various technologies, such as, but not limited to, magnetic levitation or air bearings. The wafer shuttle may also transport more than one wafer simultaneously. The interior of the transport enclosure may also be under vacuum, gas-filled, or subject to filtered air.
摘要翻译： 本发明是一种晶片传送系统，其在隔离环境中的室之间输送各个晶片。 在一个实施例中，晶片由在运输箱内传播的晶片梭运送。 运输箱的内部与周围的晶片制造设备的大气条件隔离。 因此，单个晶片可以在整个晶片制造设备中运输，而不必为整个设备保持洁净室环境。 晶片梭可以通过各种技术来推动，例如但不限于磁悬浮或空气轴承。 晶片梭可能同时传送多于一个晶片。 运输箱的内部也可以在真空下，充满气体，或经过过滤的空气。
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公开(公告)号：US07784606B2
公开(公告)日：2010-08-31
申请号：US12331395
申请日：2008-12-09
申请人： Anthony C. Bonora , Michael Krolak , Roger G. Hine
发明人： Anthony C. Bonora , Michael Krolak , Roger G. Hine
IPC分类号： B65G15/00
CPC分类号： H01L21/67763 , B65G15/12 , B65G43/10 , B65G47/268 , B65G2201/0297 , H01L21/67706 , H01L21/6773
摘要： A conveyor and conveyor system is defined for moving a container used to hold semiconductor wafers. The conveyor includes a first belt having a first support surface for movably supporting the container and a second belt having a second support surface for movably supporting the container. The first belt and the second belt each have a raised guide. The conveyor further includes a drive assembly for moving at least the first belt and causing the container to move over the first and second belts when placed on the first and second support surfaces. Methods for making the conveyor and operating the conveyor are also defined herein.
摘要翻译： 输送机和输送机系统被定义为用于移动用于保持半导体晶片的容器。 所述输送机包括具有用于可移动地支撑所述容器的第一支撑表面的第一带和具有用于可移动地支撑所述容器的第二支撑表面的第二带。 第一带和第二带每个都具有升高的引导件。 输送机还包括用于移动至少第一带的驱动组件，并且当放置在第一和第二支撑表面上时使容器移动到第一和第二带上。 制造输送机和操作输送机的方法也在本文中定义。
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公开(公告)号：US07585144B2
公开(公告)日：2009-09-08
申请号：US11774764
申请日：2007-07-09
IPC分类号： B65G49/07
CPC分类号： H01L21/67772 , H01L21/67775 , Y10S414/139
摘要： A variable lot size load port assembly is described having a tool interface, a port door, a latch key, an advance plate, and an elevator. The tool interface extends generally in a vertical dimension and has an aperture. The port door has a closed position wherein the port door at least partially occludes the aperture. The latch key extends from the port door and is configured to mate with a latch key receptacle of a door of a front opening unified pod (FOUP). The advance plate is configured to support a front opening unified pod (FOUP) and translate between a retracted position and an advanced position. The elevator raises and lowers the advance plate to bring the latch key receptacle of the door of the FOUP into alignment with the latch key of the port door.
摘要翻译： 描述了具有工具接口，端口门，闩锁键，前进板和升降机的可变批量装载端口组件。 工具界面通常在垂直方向上延伸并具有孔径。 端口门具有关闭位置，其中端口门至少部分地封闭孔。 闩锁键从端口门延伸并且被配置为与前开口统一盒（FOUP）的门的闩锁钥匙插座配合。 前进板被构造成支撑前开口统一舱（FOUP）并且在缩回位置和前进位置之间平移。 升降机提升并降低推进板，使FOUP的门的闩锁键座与门口的闩锁键对齐。
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公开(公告)号：US20090028673A1
公开(公告)日：2009-01-29
申请号：US12246379
申请日：2008-10-06
申请人： Anthony C. Bonora , Michael Krolak , Roger G. Hine
发明人： Anthony C. Bonora , Michael Krolak , Roger G. Hine
IPC分类号： H01L21/677 , B65G1/133
CPC分类号： H01L21/67775 , H01L21/67736 , Y10S414/14
摘要： Systems for loading and unloading semiconductor wafers to and from semiconductor processing or storage equipment are disclosed. One system includes a pair of conveyor rails for transporting a container capable of holding semiconductor wafers around a processing facility. The pair of conveyor rails defining a plane on which the container is supported and transported. The system includes a load port positioned adjacent to the conveyor rails. The load port has a support plate for holding a container and an arm coupled to the support plate. The arm is configured to move between a lower position and an upper position, and the lower position is defined between the pair of conveyor rails and below the plane of the conveyor rails. The upper position is in a load/unload position, and the arm has a bend that enables the support plate to be placed over one of the pair of conveyor rails without requiring a notch in the one conveyor rail.
摘要翻译： 公开了将半导体晶片装载到半导体处理或存储设备之外的系统。 一个系统包括一对输送轨道，用于输送能够将半导体晶片保持在处理设备周围的容器。 一对输送机轨道限定了一个平面，容器被支撑和运送到该平面上。 该系统包括邻近传送轨道定位的装载口。 负载端口具有用于保持容器的支撑板和联接到支撑板的臂。 臂构造成在下部位置和上部位置之间移动，并且下部位置限定在一对输送轨道之间并且在传送轨道的平面之下。 上部位置处于装载/卸载位置，并且臂具有使支撑板能够放置在一对输送轨道中的一个上的弯曲部，而不需要在一个输送轨道中的切口。
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公开(公告)号：US20080267742A1
公开(公告)日：2008-10-30
申请号：US12167169
申请日：2008-07-02
申请人： Anthony C. Bonora , Michael Krolak , Roger G. Hine
发明人： Anthony C. Bonora , Michael Krolak , Roger G. Hine
IPC分类号： H01L21/67
CPC分类号： H01L21/67775 , H01L21/67736 , Y10S414/14
摘要： The present invention comprises a container transport and loading system. The system generally comprises a load port for presenting articles to a tool and a container transport system. In one embodiment, the load port includes a vertically movable FOUP advance plate assembly that is adapted to load and unload a FOUP from a conveyor that passes by the load port and move the FOUP horizontally. In another embodiment, the load port includes a vertically movable support structure that is adapted to load and unload a container from a shuttle that passes by the load port. The various embodiments of the load port and container transport system are improvements over conventional container transport systems. The present invention also includes a shuttle for simultaneously transporting multiple containers that a load port may load or unload a container from.
摘要翻译： 本发明包括一个集装箱运输和装载系统。 该系统通常包括用于将物品呈现给工具的装载端口和容器运输系统。 在一个实施例中，负载端口包括可垂直移动的FOUP提前板组件，其适于从通过负载端口的传送器加载和卸载FOUP并水平移动FOUP。 在另一个实施例中，负载端口包括可垂直移动的支撑结构，其适于从穿过负载端口的梭子加载和卸载容器。 负载端口和集装箱运输系统的各种实施例是相对于常规集装箱运输系统的改进。 本发明还包括用于同时运送多个容器的梭子，负载口可装载或卸载容器。
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公开(公告)号：US20120213614A1
公开(公告)日：2012-08-23
申请号：US12943198
申请日：2010-11-10
IPC分类号： H01L21/677
CPC分类号： H01L21/67778 , H01L21/67766 , H01L21/67775 , H01L21/68707 , Y10S414/139
摘要： The present invention is a wafer transfer system that transports individual wafers between chambers within an isolated environment. In one embodiment, a wafer is transported by a wafer shuttle that travel within a transport enclosure. The interior of the transport enclosure is isolated from the atmospheric conditions of the surrounding wafer fabrication facility. Thus, an individual wafer may be transported throughout the wafer fabrication facility without having to maintain a clean room environment for the entire facility. The wafer shuttle may be propelled by various technologies, such as, but not limited to, magnetic levitation or air bearings. The wafer shuttle may also transport more than one wafer simultaneously. The interior of the transport enclosure may also be under vacuum, gas-filled, or subject to filtered air.
摘要翻译： 本发明是一种晶片传送系统，其在隔离环境中的室之间输送各个晶片。 在一个实施例中，晶片由在运输箱内传播的晶片梭运送。 运输箱的内部与周围的晶片制造设备的大气条件隔离。 因此，单个晶片可以在整个晶片制造设备中运输，而不必为整个设备保持洁净室环境。 晶片梭可以通过各种技术来推动，例如但不限于磁悬浮或空气轴承。 晶片梭可能同时传送多于一个晶片。 运输箱的内部也可以在真空下，充满气体，或经过过滤的空气。
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公开(公告)号：US20100051422A1
公开(公告)日：2010-03-04
申请号：US12331395
申请日：2008-12-09
申请人： Anthony C. Bonora , Michael Krolak , Roger G. Hine
发明人： Anthony C. Bonora , Michael Krolak , Roger G. Hine
CPC分类号： H01L21/67763 , B65G15/12 , B65G43/10 , B65G47/268 , B65G2201/0297 , H01L21/67706 , H01L21/6773
摘要： A conveyor and conveyor system is defined for moving a container used to hold semiconductor wafers. The conveyor includes a first belt having a first support surface for movably supporting the container and a second belt having a second support surface for movably supporting the container. The first belt and the second belt each have a raised guide. The conveyor further includes a drive assembly for moving at least the first belt and causing the container to move over the first and second belts when placed on the first and second support surfaces. Methods for making the conveyor and operating the conveyor are also defined herein.
摘要翻译： 输送机和输送机系统被定义为用于移动用于保持半导体晶片的容器。 所述输送机包括具有用于可移动地支撑所述容器的第一支撑表面的第一带和具有用于可移动地支撑所述容器的第二支撑表面的第二带。 第一带和第二带每个都具有升高的引导件。 输送机还包括用于移动至少第一带的驱动组件，并且当放置在第一和第二支撑表面上时使容器移动到第一和第二带上。 制造输送机和操作输送机的方法也在本文中定义。
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公开(公告)号：US07651307B2
公开(公告)日：2010-01-26
申请号：US12167169
申请日：2008-07-02
申请人： Anthony C. Bonora , Michael Krolak , Roger G. Hine
发明人： Anthony C. Bonora , Michael Krolak , Roger G. Hine
IPC分类号： B65G1/133
CPC分类号： H01L21/67775 , H01L21/67736 , Y10S414/14
摘要： The present invention comprises a container transport and loading system. The system generally comprises a load port for presenting articles to a tool and a container transport system. In one embodiment, the load port includes a vertically movable FOUP advance plate assembly that is adapted to load and unload a FOUP from a conveyor that passes by the load port and move the FOUP horizontally. In another embodiment, the load port includes a vertically movable support structure that is adapted to load and unload a container from a shuttle that passes by the load port. The various embodiments of the load port and container transport system are improvements over conventional container transport systems. The present invention also includes a shuttle for simultaneously transporting multiple containers that a load port may load or unload a container from.
摘要翻译： 本发明包括一个集装箱运输和装载系统。 该系统通常包括用于将物品呈现给工具的装载端口和容器运输系统。 在一个实施例中，负载端口包括可垂直移动的FOUP提前板组件，其适于从通过负载端口的传送器加载和卸载FOUP并水平移动FOUP。 在另一个实施例中，负载端口包括可垂直移动的支撑结构，其适于从穿过负载端口的梭子加载和卸载容器。 负载端口和集装箱运输系统的各种实施例是相对于常规集装箱运输系统的改进。 本发明还包括用于同时运送多个容器的梭子，负载口可装载或卸载容器。
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公开(公告)号：US07472788B2
公开(公告)日：2009-01-06
申请号：US11484218
申请日：2006-07-10
申请人： Anthony C. Bonora , Michael Krolak , Roger G. Hine
发明人： Anthony C. Bonora , Michael Krolak , Roger G. Hine
IPC分类号： B65G15/10
CPC分类号： H01L21/67763 , B65G15/12 , B65G43/10 , B65G47/268 , B65G2201/0297 , H01L21/67706 , H01L21/6773
摘要： The present invention comprises a conveyor for moving a semiconductor containers throughout a fabrication facility. In one embodiment, the conveyor comprises a plurality of individually controlled conveyor zones. Each conveyor zone includes a first belt, a second belt, a drive assembly for rotating the first belt and the second belt at substantially the same speed. The first belt and the second belt are driven at substantially the same speed and movably support the container's bottom plate as the container moves along the conveyor. In another embodiment, the conveyor includes sensors to determine, among other things, the position of the container.
摘要翻译： 本发明包括用于在整个制造设施中移动半导体容器的输送机。 在一个实施例中，输送机包括多个独立控制的输送带。 每个传送带包括第一带，第二带，用于以基本上相同的速度旋转第一带和第二带的驱动组件。 第一带和第二带以大致相同的速度驱动，并且随着容器沿着输送机移动，可移动地支撑容器的底板。 在另一个实施例中，输送机包括用于确定容器位置的传感器。
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