发明授权
US07472788B2 Belt conveyor for use with semiconductor containers 有权
带式输送机用于半导体容器

Belt conveyor for use with semiconductor containers
摘要:
The present invention comprises a conveyor for moving a semiconductor containers throughout a fabrication facility. In one embodiment, the conveyor comprises a plurality of individually controlled conveyor zones. Each conveyor zone includes a first belt, a second belt, a drive assembly for rotating the first belt and the second belt at substantially the same speed. The first belt and the second belt are driven at substantially the same speed and movably support the container's bottom plate as the container moves along the conveyor. In another embodiment, the conveyor includes sensors to determine, among other things, the position of the container.
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