发明授权
- 专利标题: Belt conveyor for use with semiconductor containers
- 专利标题(中): 带式输送机用于半导体容器
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申请号: US11484218申请日: 2006-07-10
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公开(公告)号: US07472788B2公开(公告)日: 2009-01-06
- 发明人: Anthony C. Bonora , Michael Krolak , Roger G. Hine
- 申请人: Anthony C. Bonora , Michael Krolak , Roger G. Hine
- 申请人地址: US CA Fremont
- 专利权人: Asyst Technologies, Inc.
- 当前专利权人: Asyst Technologies, Inc.
- 当前专利权人地址: US CA Fremont
- 代理机构: Martine Penilla & Gencarella, LLP
- 主分类号: B65G15/10
- IPC分类号: B65G15/10
摘要:
The present invention comprises a conveyor for moving a semiconductor containers throughout a fabrication facility. In one embodiment, the conveyor comprises a plurality of individually controlled conveyor zones. Each conveyor zone includes a first belt, a second belt, a drive assembly for rotating the first belt and the second belt at substantially the same speed. The first belt and the second belt are driven at substantially the same speed and movably support the container's bottom plate as the container moves along the conveyor. In another embodiment, the conveyor includes sensors to determine, among other things, the position of the container.
公开/授权文献
- US20070010908A1 Belt conveyor for use with semiconductor containers 公开/授权日:2007-01-11
信息查询
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