ACOUSTIC RESONATOR PERFORMANCE ENHANCEMENT USING FILLED RECESS REGION
    11.
    发明申请
    ACOUSTIC RESONATOR PERFORMANCE ENHANCEMENT USING FILLED RECESS REGION 有权
    使用填充区域的声学谐振器性能提升

    公开(公告)号:US20080060181A1

    公开(公告)日:2008-03-13

    申请号:US11938078

    申请日:2007-11-09

    IPC分类号: H01L41/22 B05D1/32 H04R17/00

    摘要: An acoustic resonator that includes a substrate, a first electrode, a layer of piezoelectric material, a second electrode, and a fill region. The first electrode is adjacent the substrate, and the first electrode has an outer perimeter. The piezoelectric layer is adjacent the first electrode. The second electrode is adjacent the piezoelectric layer and the second electrode has an outer perimeter. The fill region is in one of the first and second electrodes.

    摘要翻译: 声谐振器,其包括基板,第一电极,压电材料层,第二电极和填充区域。 第一电极与衬底相邻,并且第一电极具有外周边。 压电层与第一电极相邻。 第二电极邻近压电层,第二电极具有外周。 填充区域位于第一和第二电极之一中。

    Acoustic resonator performance enhancement using filled recessed region
    12.
    发明申请
    Acoustic resonator performance enhancement using filled recessed region 有权
    使用填充凹陷区域的声谐振器性能提升

    公开(公告)号:US20060226932A1

    公开(公告)日:2006-10-12

    申请号:US11100311

    申请日:2005-04-06

    IPC分类号: H03H9/54

    摘要: An acoustic resonator that includes a substrate, a first electrode, a layer of piezoelectric material, a second electrode, and a fill region. The first electrode is adjacent the substrate, and the first electrode has an outer perimeter. The piezoelectric layer is adjacent the first electrode. The second electrode is adjacent the piezoelectric layer and the second electrode has an outer perimeter. The fill region is in one of the first and second electrodes.

    摘要翻译: 声谐振器,其包括基板,第一电极,压电材料层,第二电极和填充区域。 第一电极与衬底相邻,并且第一电极具有外周边。 压电层与第一电极相邻。 第二电极邻近压电层,第二电极具有外周。 填充区域位于第一和第二电极之一中。

    Integration of micro-electro mechanical systems and active circuitry
    13.
    发明申请
    Integration of micro-electro mechanical systems and active circuitry 审中-公开
    集成微机电系统和有源电路

    公开(公告)号:US20060125084A1

    公开(公告)日:2006-06-15

    申请号:US11012574

    申请日:2004-12-15

    IPC分类号: H01L21/50 H01L23/12

    摘要: A single integrated wafer package includes a micro-electro mechanical system (MEMS) wafer, an active device wafer, and a seal ring. The MEMS wafer has a first surface and includes at least one MEMS component on its first surface. The active device wafer has a first surface and includes an active device circuit on its first surface. The seal ring is adjacent the first surface of the MEMS wafer such that a seal is formed about the MEMS component. An external contact is provided on the wafer package. The external contact is accessible externally to the wafer package and is electrically coupled to the MEMS device or active device circuit of the active device wafer.

    摘要翻译: 单个集成晶片封装包括微机电系统(MEMS)晶片,有源器件晶片和密封环。 MEMS晶片具有第一表面并且在其第一表面上包括至少一个MEMS部件。 有源器件晶片具有第一表面并且在其第一表面上包括有源器件电路。 密封环与MEMS晶片的第一表面相邻,使得围绕MEMS部件形成密封。 在晶片封装上提供外部触点。 外部接触件可从晶片封装的外部访问并且电耦合到有源器件晶片的MEMS器件或有源器件电路。