Methods for manufacturing a metal-oxide thin film transistor
    12.
    发明授权
    Methods for manufacturing a metal-oxide thin film transistor 有权
    金属氧化物薄膜晶体管的制造方法

    公开(公告)号:US08927330B2

    公开(公告)日:2015-01-06

    申请号:US13572710

    申请日:2012-08-13

    IPC分类号: H01L21/363 H01L29/786

    CPC分类号: H01L29/7869

    摘要: Disclosed herein is a method for manufacturing a metal-oxide thin film transistor. The method includes the steps of: (a1) forming a gate electrode on a substrate; (a2) forming a gate insulating layer over the gate electrode; (a3) forming a metal-oxide semiconductor layer having a channel region on the gate insulating layer; (a4) forming a source electrode and a drain electrode on the metal-oxide semiconductor layer, wherein the source electrode is spaced apart from the drain electrode by a gap exposing the channel region; (a5) forming a mobility-enhancing layer on the channel region, wherein the mobility-enhancing layer is not in contact with the source electrode and the drain electrode; and (a6) annealing the metal-oxide semiconductor layer and the mobility-enhancing layer in an environment at a temperature of about 200° C. to 350° C.

    摘要翻译: 本文公开了一种制造金属氧化物薄膜晶体管的方法。 该方法包括以下步骤:(a1)在基板上形成栅电极; (a2)在所述栅电极上形成栅极绝缘层; (a3)在栅极绝缘层上形成具有沟道区的金属氧化物半导体层; (a4)在所述金属氧化物半导体层上形成源电极和漏电极,其中所述源电极通过所述沟道区域露出的间隙与所述漏电极间隔开; (a5)在沟道区上形成迁移率增强层,其中迁移率增强层不与源电极和漏电极接触; 和(a6)在约200℃至350℃的温度的环境中退火金属氧化物半导体层和迁移率增强层。

    METAL OXIDE SEMICONDUCTOR TRANSISTOR
    13.
    发明申请
    METAL OXIDE SEMICONDUCTOR TRANSISTOR 有权
    金属氧化物半导体晶体管

    公开(公告)号:US20120313084A1

    公开(公告)日:2012-12-13

    申请号:US13480742

    申请日:2012-05-25

    IPC分类号: H01L29/22 H01L51/30

    摘要: A metal oxide semiconductor transistor includes a gate, a metal oxide active layer, a gate insulating layer, a source, and a drain. The metal oxide active layer has a first surface and a second surface, and the first surface faces to the gate. The gate insulating layer is disposed between the gate and the metal oxide active layer. The source and the drain are respectively connected to the metal oxide active layer. The second surface defines a mobility enhancing region between the source and the drain. An oxygen content of the metal oxide active layer in the mobility enhancing region is less than an oxygen content of the metal oxide active layer in the region outside the mobility enhancing region. The metal oxide semiconductor transistor has high carrier mobility.

    摘要翻译: 金属氧化物半导体晶体管包括栅极,金属氧化物有源层,栅极绝缘层,源极和漏极。 金属氧化物活性层具有第一表面和第二表面,并且第一表面面向栅极。 栅极绝缘层设置在栅极和金属氧化物有源层之间。 源极和漏极分别连接到金属氧化物活性层。 第二表面限定了源极和漏极之间的迁移率增强区域。 迁移率增强区域中的金属氧化物活性层的氧含量小于迁移率增强区域外的区域中的金属氧化物活性层的氧含量。 金属氧化物半导体晶体管具有高载流子迁移率。

    PHOTO TRANSISTOR
    14.
    发明申请
    PHOTO TRANSISTOR 审中-公开
    照片晶体管

    公开(公告)号:US20120018719A1

    公开(公告)日:2012-01-26

    申请号:US13027554

    申请日:2011-02-15

    IPC分类号: H01L29/12 H01L31/113

    摘要: A phototransistor includes a substrate, a gate layer, a dielectric layer, an active layer, a source and a drain, and a light absorption layer. The gate layer is disposed on a top of the substrate, and the dielectric layer is disposed on a top of the gate layer. The active layer has a first bandgap and is disposed on a top of the dielectric layer, and the source and the drain are disposed on a top of the active layer. The light absorption layer has a second bandgap and is capped on the active layer, and the second bandgap is smaller than the first bandgap.

    摘要翻译: 光电晶体管包括基板,栅极层,电介质层,有源层,源极和漏极以及光吸收层。 栅极层设置在基板的顶部,并且电介质层设置在栅极层的顶部。 有源层具有第一带隙并且设置在电介质层的顶部上,并且源极和漏极设置在有源层的顶部上。 光吸收层具有第二带隙并且被覆盖在有源层上,并且第二带隙小于第一带隙。

    VERTICAL TRANSISTOR AND A METHOD OF FABRICATING THE SAME
    15.
    发明申请
    VERTICAL TRANSISTOR AND A METHOD OF FABRICATING THE SAME 审中-公开
    垂直晶体管及其制造方法

    公开(公告)号:US20110284949A1

    公开(公告)日:2011-11-24

    申请号:US12786343

    申请日:2010-05-24

    IPC分类号: H01L29/78 H01L21/336

    CPC分类号: H01L51/057 H01L51/0023

    摘要: A vertical transistor and a method of fabricating the vertical transistor are provided. The vertical transistor has a substrate, a first electrode formed on the substrate, a first insulation layer formed on the first electrode, with a portion of the first electrode exposed from the first insulation layer and having a thickness greater than 50 nm and no more than 300 nm, a grid electrode formed on the first insulation layer, a semiconductor layer formed on the first electrode, and a second electrode formed on the semiconductor layer.

    摘要翻译: 提供垂直晶体管和制造垂直晶体管的方法。 垂直晶体管具有基板,形成在基板上的第一电极,形成在第一电极上的第一绝缘层,第一电极的一部分从第一绝缘层露出并具有大于50nm且不大于 300nm,形成在第一绝缘层上的栅电极,形成在第一电极上的半导体层和形成在半导体层上的第二电极。

    Method of forming polysilicon thin film transistor structure
    16.
    发明授权
    Method of forming polysilicon thin film transistor structure 有权
    多晶硅薄膜晶体管结构的形成方法

    公开(公告)号:US06410373B1

    公开(公告)日:2002-06-25

    申请号:US09845438

    申请日:2001-04-30

    IPC分类号: H01L2100

    摘要: A method of forming a polysilicon thin film transistor. An amorphous silicon channel layer is formed over an insulating substrate. An active region is patterned out in the amorphous silicon channel layer. An oxide layer and a gate electrode are sequentially formed over the amorphous silicon channel layer. A lightly doped source/drain region is formed in the amorphous silicon channel layer and then a spacer is formed over the gate electrode. A source/drain region is formed in the amorphous silicon channel layer. A portion of the oxide layer above the source/drain region is removed. An isolation spacer is formed on the sidewalls of the spacer. A self-aligned silicide layer is formed at the top section of the spacer and the source/drain region. Finally, a metal-induced lateral crystallization process is conducted to transform the amorphous silicon channel layer into a lateral-crystallization-polysilicon channel layer.

    摘要翻译: 一种形成多晶硅薄膜晶体管的方法。 在绝缘基板上形成非晶硅沟道层。 在非晶硅沟道层中形成有源区。 在非晶硅沟道层上依次形成氧化物层和栅电极。 在非晶硅沟道层中形成轻掺杂的源极/漏极区,然后在栅极上形成间隔物。 源极/漏极区域形成在非晶硅沟道层中。 除去源极/漏极区上方的氧化物层的一部分。 在间隔物的侧壁上形成隔离间隔物。 在间隔物的顶部和源极/漏极区域上形成自对准的硅化物层。 最后,进行金属诱导的横向结晶工艺以将非晶硅沟道层转变成横向结晶 - 多晶硅沟道层。

    Vertical type sensor
    17.
    发明授权
    Vertical type sensor 有权
    立式传感器

    公开(公告)号:US08723503B2

    公开(公告)日:2014-05-13

    申请号:US13009440

    申请日:2011-01-19

    摘要: The present invention provides a vertical type sensor, including a substrate; a first electrode formed on the substrate; a sensing layer formed on the first electrode layer and reactive to a target substance, wherein the first electrode layer is interposed between the substrate and the sensing layer; and a second electrode layer formed on the sensing layer and having a plurality of openings, wherein the sensing layer is interposed between the first electrode layer and the second electrode layer, and the target substance contacts the sensing layer via the plurality of openings. The vertical type sensor of the present invention provides instant, sensitive and rapid detection.

    摘要翻译: 本发明提供一种垂直型传感器,包括基板; 形成在所述基板上的第一电极; 感测层,其形成在所述第一电极层上并且与目标物质反应,其中所述第一电极层介于所述基板和所述感测层之间; 以及形成在所述感测层上并且具有多个开口的第二电极层,其中所述感测层插入在所述第一电极层和所述第二电极层之间,并且所述目标物质经由所述多个开口接触所述感测层。 本发明的垂直型传感器提供即时,灵敏和快速的检测。

    Method of fabricating an organic thin film transistor and method of surface treatment for gate insulating layer
    19.
    发明授权
    Method of fabricating an organic thin film transistor and method of surface treatment for gate insulating layer 有权
    制造有机薄膜晶体管的方法和栅极绝缘层的表面处理方法

    公开(公告)号:US08110433B2

    公开(公告)日:2012-02-07

    申请号:US12656331

    申请日:2010-01-26

    IPC分类号: H01L21/40

    摘要: A method of fabricating an organic thin film transistor is disclosed, which comprises steps of (S1) forming a gate electrode on a substrate; (S2) forming a gate insulating layer on the gate electrode; (S3) providing a gas on the surface of the gate insulating layer to form hydrophobic molecules on the surface of the gate insulating layer; (S4) forming an organic semiconductor layer, a source electrode, and a drain electrode over the gate insulating layer having hydrophobic molecules thereon, wherein the gas of step (S3) is at least one selected from the group consisting of halogen-substituted hydrocarbon, un-substituted hydrocarbon, and the mixtures thereof. The method of the present invention utilizes gases comprising carbon or fluorine atom to perform surface treatment on the surface of the gate insulating layer, therefore the hydrophobic character of the surface of the gate insulating layer can be enhanced and the electrical properties of the OTFT can be improved. Also, a method of surface treatment for the gate insulating layer is disclosed.

    摘要翻译: 公开了一种制造有机薄膜晶体管的方法,其包括以下步骤:(S1)在基板上形成栅电极; (S2),在所述栅电极上形成栅极绝缘层; (S3)在所述栅极绝缘层的表面上提供气体以在所述栅极绝缘层的表面上形成疏水性分子; (S4)在其上具有疏水分子的栅绝缘层上形成有机半导体层,源电极和漏电极,其中步骤(S3)的气体是选自卤素取代的烃, 未取代的烃,及其混合物。 本发明的方法利用包含碳或氟原子的气体在栅极绝缘层的表面上进行表面处理,因此可以提高栅极绝缘层表面的疏水性,并且可以使OTFT的电性能 改进。 此外,公开了一种用于栅绝缘层的表面处理方法。

    Liquid Crystal Display Apparatus and Bandgap Reference Circuit Thereof
    20.
    发明申请
    Liquid Crystal Display Apparatus and Bandgap Reference Circuit Thereof 审中-公开
    液晶显示装置及其带隙参考电路

    公开(公告)号:US20090167663A1

    公开(公告)日:2009-07-02

    申请号:US12102277

    申请日:2008-04-14

    IPC分类号: G09G3/36 G05F3/02

    摘要: A liquid crystal display apparatus comprises a system-on-glass (SOG) and a bandgap reference (BGR) circuit. The BGR circuit, which is formed on the SOG, comprises a current mirror set and a diode set. The current mirror set is configured to generate a plurality of fixed currents. The diode set, which is formed by a plurality of diode-connected thin film transistors (TFT), is configured to generate a BGR voltage according to the fixed currents.

    摘要翻译: 液晶显示装置包括玻璃系统(SOG)和带隙基准(BGR)电路。 形成在SOG上的BGR电路包括电流镜组和二极管组。 电流镜组被配置为产生多个固定电流。 由多个二极管连接的薄膜晶体管(TFT)形成的二极管组被配置为根据固定电流产生BGR电压。