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公开(公告)号:US12297532B2
公开(公告)日:2025-05-13
申请号:US18332638
申请日:2023-06-09
Inventor: Kyung-Eun Byun , Hyoungsub Kim , Taejin Park , Hyeonjin Shin , Hoijoon Kim , Wonsik Ahn , Mirine Leem
IPC: C23C16/30 , B22F7/00 , C23C16/448 , C23C16/455 , C23C16/46 , H01L21/02 , H01L21/285 , H01L31/032
Abstract: Provided are a metal chalcogenide thin film and a method and device for manufacturing the same. The metal chalcogenide thin film includes a transition metal element and a chalcogen element, and at least one of the transition metal element and the chalcogen element having a composition gradient along the surface of the metal chalcogenide thin film, the composition gradient being an in-plane composition gradient. The metal chalcogenide thin film may be prepared by using a manufacturing method including providing a transition metal precursor and a chalcogen precursor on a substrate by using a confined reaction space in such a manner that at least one of the transition metal precursor and the chalcogen precursor forms a concentration gradient according to a position on the surface of the substrate; and heat-treating the substrate.
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132.
公开(公告)号:US12297385B2
公开(公告)日:2025-05-13
申请号:US17573734
申请日:2022-01-12
Applicant: Samsung Electronics Co., Ltd. , DONGWOO FINE-CHEM CO., LTD.
Inventor: Min Hyung Cho , Hyo Joong Yoon , Min Ju Im , Jung Min Oh , Sang Won Bae , Hyo San Lee
IPC: C09K13/00 , H01L21/3213 , H01L21/768
Abstract: Etching compositions are provided. The etching compositions can be used for etching cobalt. The etching compositions may include a chelator, water, an oxidizer, and an organic solvent, and the chelator may include an organic acid, an amine compound and/or a polyhydric alcohol. Water may be present in an amount of 1 wt % to 10 wt % based on a total weight of the etching composition.
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公开(公告)号:US20250151629A1
公开(公告)日:2025-05-08
申请号:US18799264
申请日:2024-08-09
Applicant: Samsung Electronics Co., Ltd.
Inventor: Hyungjong JEONG
IPC: H10N50/10 , H01L23/528 , H10B61/00 , H10N50/01 , H10N50/80
Abstract: A magnetoresistive random access memory device may include a wiring structure on a substrate, an etch stop layer on the wiring structure, an interlayer insulation layer on the etch stop layer, a plurality of contact structures penetrating the interlayer insulation layer and the etch stop layer to contact the wiring structure, each of the plurality of contact structures including a first portion having a sidewall facing the interlayer insulation layer and a second portion having a sidewall facing the etch stop layer, and a plurality of magnetic tunnel junction structures on the plurality of contact structures and connected to corresponding ones of the plurality of contact structures, respectively, wherein a first width of the first portion in a first horizontal direction is greater than a second width of the second portion in the first horizontal direction.
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公开(公告)号:US20250151628A1
公开(公告)日:2025-05-08
申请号:US18500692
申请日:2023-11-02
Inventor: Roman Chepulskyy , Dmytro Apalkov , FNU Ikhtiar , Jaewoo Jeong , Chirag Garg , Panagiotis Charilaos Filippou , See-Hun Yang , Mahesh G. Samant
Abstract: Methods and apparatuses are provided for MRAM devices including an Mn—Sb compound free layer MTJ. A device includes an MTJ including a reference layer, a tunneling barrier layer, and a top free layer, wherein the tunneling barrier layer is formed on the reference layer, the top free layer is formed over the tunneling barrier layer, and the top free layer includes an Mn—Sb compound; and a capping layer formed over the top free layer of the MTJ.
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135.
公开(公告)号:US20250151496A1
公开(公告)日:2025-05-08
申请号:US18793404
申请日:2024-08-02
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Keewon LEE , Kihyung KANG , Myunghee KIM , Changjae KIM
IPC: H01L27/15
Abstract: A method of manufacturing a display device including: providing a plurality of light emitting elements to a base substrate through a fluid layer, the base substrate including an alignment area and a non-alignment area; aligning a first light emitting element provided to the alignment area of the base substrate to at least one electrode using an electric field; and moving a second light emitting element provided to the non-alignment area of the base substrate to the alignment area by applying a flow to the fluid layer.
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公开(公告)号:US20250151445A1
公开(公告)日:2025-05-08
申请号:US18742302
申请日:2024-06-13
Applicant: Samsung Electronics Co., Ltd.
Inventor: Ingyu BAEK , Jinmyoung LEE , Soonhyung HONG
IPC: H01L27/146
Abstract: An image sensor that includes a first layer and a second layer bonded to the first layer. The first layer includes a first substrate including a first front surface and a first back surface, a floating diffusion region formed in the first substrate, a first pad, and a first conductive line provided between the floating diffusion region and the first pad. The second layer includes a second substrate including a second front surface and a second back surface, pixel transistors formed on the second substrate, a second pad, and a second conductive line provided between one of the pixel transistors and the second pad. The second conductive line passes through the second substrate and is electrically connected to a lower portion of the pixel transistor.
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137.
公开(公告)号:US20250151438A1
公开(公告)日:2025-05-08
申请号:US18937958
申请日:2024-11-05
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Jongwoo HONG , Changhyun KIM , Byoungho LEE , Youngjin KIM , Gun-Yeal LEE , Junhyeok JANG , Yoonchan JEONG
IPC: H01L27/146 , G06F30/23
Abstract: A method of manufacturing a color-routing element, may include: generating an initial pattern; performing blurring on the initial pattern to generate a reference pattern; performing edge detection on the reference pattern to generate at least one comparison pattern reflecting a process error; performing a simulation to obtain at least one color-routing figure of merit based on the reference pattern and the at least one comparison pattern; updating the initial pattern based on a calculation result of the at least one color-routing figure of merit; generating the updated initial pattern as a target pattern of the color-routing element; and manufacturing the color-routing element based on the target pattern.
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公开(公告)号:US20250151304A1
公开(公告)日:2025-05-08
申请号:US19009795
申请日:2025-01-03
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Choongsun Kim , Shigenobu Maeda , Myoungkyu Park
Abstract: A method of manufacturing a semiconductor device includes forming an active fin protruding from a substrate and extending in a first direction; forming sacrificial gate patterns intersecting the active fin and extend in a second direction; forming recess regions by etching the active fin on at least one side of each of the sacrificial gate patterns; forming source/drain regions on the recess regions; removing the sacrificial gate patterns to form openings; and forming a gate dielectric layer and a gate electrode such that gate structures are formed to cover the active fin in the openings. The source/drain regions are formed by an epitaxial growth process and an in-situ doping process of doping first conductivity-type impurity elements. In at least one of the source/drain regions, after the in-situ doping process is performed, counter-doping is performed using second conductivity-type impurity elements different from the first conductivity-type impurity elements to decrease carrier concentration.
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公开(公告)号:US20250151292A1
公开(公告)日:2025-05-08
申请号:US18732795
申请日:2024-06-04
Applicant: Samsung Electronics Co., Ltd.
Inventor: Changyoung Lee , Keonwoo Park , Hyunchul Yoon
IPC: H10B80/00 , G06F11/10 , G11C11/408 , G11C11/4091 , H01L23/00 , H01L25/065 , H01L25/18
Abstract: A memory device includes a first semiconductor layer and a second semiconductor layer. The first semiconductor layer includes a memory cell array. The memory cell array is connected to a plurality of wordlines and a plurality of bitlines, and includes a plurality of normal memory cells storing normal data and a plurality of error correction code (ECC) memory cells storing ECC data. The second semiconductor layer is disposed with respect to the first semiconductor layer in a vertical direction, and includes a peripheral circuit. The peripheral circuit controls the memory cell array, and includes a row decoder. At least a portion of a region in which the plurality of ECC memory cells are disposed in the first semiconductor layer and at least a portion of a region in which the row decoder is disposed in the second semiconductor layer overlap in a plan view.
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公开(公告)号:US20250151279A1
公开(公告)日:2025-05-08
申请号:US18668971
申请日:2024-05-20
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: JUNHYOUNG KIM , JIYOUNG KIM , IK-HYUNG JOO , SUKKANG SUNG , SEHOON LEE
Abstract: A semiconductor device includes a semiconductor substrate, and a first transistor disposed on the semiconductor substrate. The first transistor includes an insulation structure disposed on the semiconductor substrate, a channel region disposed on the insulation structure and including a first semiconductor layer, and extending in a direction crossing the semiconductor substrate, first source and drain regions electrically connected to the channel region, a first gate insulating layer disposed on the channel region, and a first gate electrode disposed on the first gate insulating layer. A first region that is one of the first source and drain regions and a second region that is another one of the first source and drain regions include different materials or have different crystal structures.
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