Radiation sensitive self-assembled monolayers and uses thereof
    111.
    发明申请
    Radiation sensitive self-assembled monolayers and uses thereof 有权
    辐射敏感的自组装单层及其用途

    公开(公告)号:US20070278179A1

    公开(公告)日:2007-12-06

    申请号:US11445326

    申请日:2006-06-02

    CPC classification number: C23C22/02 B82Y10/00 G03F7/165 G03F7/405

    Abstract: The invention is directed to a radiation sensitive compound comprising a surface binding group proximate to one end of the compound for attachment to a substrate, and a metal binding group proximate to an opposite end of the compound. The metal binding group is not radiation sensitive. The radiation sensitive compound also includes a body portion disposed between the surface binding group and the metal binding group, and a radiation sensitive group positioned in the body portion or adjacent to the metal binding group. The surface binding group is capable of attaching to a substrate selected from a metal, a metal oxide, or a semiconductor material.

    Abstract translation: 本发明涉及一种辐射敏感化合物,其包含接近化合物一端的表面结合基团,用于连接至底物,以及靠近化合物相对端的金属结合基团。 金属结合组不辐射敏感。 辐射敏感化合物还包括设置在表面结合基团和金属结合基团之间的主体部分和位于主体部分中或与金属结合基团相邻的辐射敏感组。 表面结合基团能够附着于选自金属,金属氧化物或半导体材料的基板。

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