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    Dual collector optical flaw detector
    1.
    发明授权
    Dual collector optical flaw detector 失效
    双收集器光学缺陷探测器

    公开(公告)号：US4597665A

    公开(公告)日：1986-07-01

    申请号：US610101

    申请日：1984-05-14

    Applicant: Lee K. Galbraith ,  Karel Urbanek

    Inventor： Lee K. Galbraith ,  Karel Urbanek

    IPC: G01N21/88 ,  G01J1/02 ,  G01N21/84 ,  G01N21/894 ,  G01N21/94 ,  G01N21/95 ,  G01N21/956 ,  G01N21/00

    CPC classification number: G01J1/04 ,  G01J1/0422 ,  G01J1/0455 ,  G01N21/894 ,  G01N21/94 ,  G01N21/9501 ,  G01N21/474 ,  G01N2201/064 ,  G01N2201/112

    Abstract: A flaw detector for optically transmissive surfaces having a first light collector above the surface and a second light collector below the surface. A scanning light beam is directed into the first light collector through a beam entrance aperture and only light scattered from the surface is collected. Light specularly reflected from the surface exits the collector through the beam entrance aperture. Similarly, light passing through the surface enters the second collector, but the axial beam component is dumped through an opening in the second collector, while only diffracted light is collected. Preferably, two-stage light collectors are used with the first stage admitting the beam and generating a scattered or diffracted beam component, with the second stage admitting the scattered or diffracted beam component and integrating the component over a collection surface and sampling the integrated portion at a photoelectric detector. An electrical output signal from the detector may be displayed.

    Abstract translation: 一种用于光学透射表面的探伤仪，其具有在表面上方的第一光收集器和在该表面下方的第二光收集器。 扫描光束通过光束入射孔被引导到第一光收集器中，并且仅收集从表面散射的光。 从表面镜面反射的光通过光束入射孔离开收集器。 类似地，穿过表面的光进入第二集电器，但是轴向光束分量通过第二收集器中的开口倾倒，而仅收集衍射光。 优选地，使用两级集光器，其中第一阶段允许光束并产生散射或衍射光束分量，其中第二阶段允许散射或衍射的光束分量并将分量集成在集合表面上，并将集成部分采样 光电探测器。 可以显示来自检测器的电输出信号。

    Dual beam laser inspection apparatus
    2.
    发明授权
    Dual beam laser inspection apparatus 失效
    双光束激光检测仪

    公开(公告)号：US4643569A

    公开(公告)日：1987-02-17

    申请号：US746177

    申请日：1985-06-18

    Applicant: Sean Sullivan ,  Glenn E. Stutz

    Inventor： Sean Sullivan ,  Glenn E. Stutz

    IPC: G01N21/88 ,  G01N21/89 ,  G01N21/956 ,  G02B26/10 ,  G06T1/00 ,  H05K3/00

    CPC classification number: G01N21/8901 ,  G01N21/956 ,  G01N2201/112

    Abstract: An optical input beam is split into first and second beams lying in first and second non-parallel planes. A polygon mirror scanner receives the first and second beams on a single facet and generates first and second angularly displaced, non-parallel synchronized scans. Redirecting means is positioned in the optical path between the scanner and a scanned plane for redirecting a portion of the first and second synchronized scans onto a timing plane to generate third and fourth non-coincident, synchronized scans. A beam position signal consisting of equally spaced, sequential pulses is generated in response to the travel of either the third or fourth synchronized scan along a second scanned line lying within a timing plane. The beam position signal is representative of the position of both the first and second synchronized scans along the first scanned line. The second section of the laser inspection apparatus reads information from a surface having an area illuminated by the dual beams of the optical scanner. The first and second synchronized scans from the optical scanner cause the illuminated area to emit radiation in the form of first and second modulated scans. Segmented radiation detection means includes first, second and sandwiched radiation detection means which each generated an electrical output signal representative of the detected radiation emitted by the first and second modulated scans. Signal processing means receives and selectively combines the electrical output signals from each of the three sections of the segmented radiation detection means in response to the beam position signal and generates first and second modulated output signals. The first modulated output signal is representative of the information residing within the area scanned by the first scan, while the second modulated signal is representative of the information residing within the area scanned by the second scan.

    Abstract translation: 光输入光束被分成位于第一和第二非平行平面中的第一和第二光束。 多面镜扫描器在单个面上接收第一和第二光束，并产生第一和第二角度位移的非平行同步扫描。 重定向装置位于扫描器和扫描平面之间的光路中，用于将第一和第二同步扫描的一部分重定向到定时平面上，以产生第三和第四不一致的同步扫描。 响应于沿着位于定时平面内的第二扫描线的第三或第四同步扫描的行进而产生由等间隔的顺序脉冲组成的波束位置信号。 光束位置信号表示沿着第一扫描线的第一和第二同步扫描的位置。 激光检查装置的第二部分从具有由光学扫描器的双光束照射的区域的表面读取信息。 来自光学扫描仪的第一和第二同步扫描使照明区域以第一和第二调制扫描的形式发射辐射。 分段辐射检测装置包括第一，第二和夹层的辐射检测装置，其每个产生代表由第一和第二调制扫描发射的检测到的辐射的电输出信号。 信号处理装置响应于波束位置信号接收并选择性地组合分段放射线检测装置的三个部分中的每一个的电输出信号，并产生第一和第二调制输出信号。 第一调制输出信号表示位于由第一次扫描扫描的区域内的信息，而第二调制信号表示位于由第二扫描扫描的区域内的信息。

    Particle detection on patterned wafers and the like
    4.
    发明授权
    Particle detection on patterned wafers and the like 失效
    图案化晶片上的粒子检测等

    公开(公告)号：US4898471A

    公开(公告)日：1990-02-06

    申请号：US248309

    申请日：1988-09-19

    Applicant: John L. Vaught ,  Armand P. Neukermans ,  Herman F. Keldermann ,  Franklin R. Koenig

    Inventor： John L. Vaught ,  Armand P. Neukermans ,  Herman F. Keldermann ,  Franklin R. Koenig

    IPC: G01N21/94 ,  G01N21/956

    CPC classification number: G01N21/94 ,  G01N2021/95615 ,  G01N2021/95676 ,  G01N21/95607 ,  G01N2201/112

    Abstract: A particle detection on a periodic patterned surface is achieved in a method and apparatus using a single light beam scanning at a shallow angle over the surface. The surface contains a plurality of identical die with streets between die. The beam scans parallel to a street direction, while a light collection system collects light scattered from the surface with a constant solid angle. The position of the collection system as well as the polarization of the light beam and collected scattered light may be arranged to maximize the particle signal compared to the pattern signal. A detector produces an electrical signal corresponding to the intensity of scattered light that is colelcted. A processor constructs templates from the electrical signal corresponding to individual die and compares the templates to identify particles. A reference template is constantly updated so that comparisons are between adjacent die. In one embodiment, the templates are made up of registered positions where the signal crosses a threshold, and the comparison is between corresponding positions to eliminate periodic pattern features, leaving only positions representing particles.

    Abstract translation: 在使用在表面上以浅角度扫描的单个光束的方法和装置中实现周期性图案化表面上的粒子检测。 表面包含多个相同的模具，在模具之间具有街道。 光束平行于街道方向扫描，而光采集系统以恒定立体角收集从表面散射的光。 收集系统的位置以及光束和收集的散射光的偏振可以被布置成与图案信号相比最大化粒子信号。 检测器产生对应于被烧焦的散射光的强度的电信号。 处理器从对应于各个管芯的电信号构建模板，并比较模板以识别粒子。 参考模板不断更新，以便相邻模具之间进行比较。 在一个实施例中，模板由信号跨越阈值的注册位置组成，并且在相应位置之间进行比较以消除周期性图案特征，仅留下表示粒子的位置。

    Scanning sample, signal generation, data digitizing and retiming system
    6.
    发明授权
    Scanning sample, signal generation, data digitizing and retiming system 失效
    扫描样本，信号生成，数据数字化和重新定时系统

    公开(公告)号：US4600951A

    公开(公告)日：1986-07-15

    申请号：US563472

    申请日：1983-12-20

    Applicant: Frank H. Blitchington

    Inventor： Frank H. Blitchington

    IPC: G01N21/64 ,  G01N21/956 ,  H04N1/00 ,  H04N1/053 ,  H04N1/113 ,  H04N1/12 ,  H04N1/40

    CPC classification number: H04N1/053 ,  G01N21/956 ,  H04N1/00283 ,  G01N21/64 ,  G01N21/8851 ,  G01N2201/112 ,  H04N1/1135 ,  H04N1/12 ,  H04N2201/0471

    Abstract: A system for generating a substantially-continuous stream of binary signals representative of the presence of copper on the surface of a fluorescent, substrate of a board. A beam is swept by mirror facets of a rotating mirror drum along a path on the board. When the beam strikes copper it is merely reflected. When the beam strikes the substrate, a fluorescence is produced. The resultant light is gathered by cylindrical lenses and fiber optic bundles. The color of the light is blocked by filters and the fluorescence color energizes photomultiplier tubes. A threshold setting and sensing circuit senses the output of the photomultiplier tubes and controls their bias voltage to produce a constant level of output from fluorescence and then produces a stream of binary signals that are representative of the presence/absence of copper on the surface of the board. The swept beam is split to send a portion of its energy through an optical grating. The intermittent light passing through the optical grating is gathered by a fiber optic bundle and is sensed by a photomultiplier tube. The output of the photomultiplier tube is doubled in frequency and used to sample and store the binary signals in the memory of a scanning converter. The binary signals arrive in short bursts of higher-frequency signals separated by periods of absence of binary data. The binary signals stored in the scanning converter are then read out substantially continuously for subsequent processing at a lower frequency.

    Abstract translation: 一种用于产生基本上连续的二进制信号流的系统，其表示在荧光板的基板的表面上铜的存在。 光束由沿着板上路径的旋转镜筒的镜面扫过。 当光束撞击铜时，它仅仅被反射。 当光束撞击衬底时，产生荧光。 所产生的光由圆柱形透镜和光纤束收集。 光的颜色被滤光片遮挡，荧光色激发光电倍增管。 阈值设置和感测电路检测光电倍增管的输出并控制它们的偏置电压，以产生恒定的荧光输出水平，然后产生二进制信号流，其代表在表面上存在/不存在铜 板。 扫掠光束被分割以通过光栅发送其能量的一部分。 通过光栅的间歇光由光纤束收集，并由光电倍增管感测。 光电倍增管的输出频率加倍，用于将二进制信号采样并存储在扫描转换器的存储器中。 二进制信号以不存在二进制数据的周期分开的较高频率信号的短脉冲串中到达。 然后，存储在扫描转换器中的二进制信号基本连续读出，以便在较低频率下进行后续处理。

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