公开(公告)号：US20240094646A1

公开(公告)日：2024-03-21

申请号：US18368995

申请日：2023-09-15

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Katsunobu NISHIHARA ,  Nozomi TANAKA ,  Tomoyuki JOHZAKI ,  Ken OZAWA ,  Atsushi SUNAHARA ,  Shinji UEYAMA ,  Shinsuke FUJIOKA ,  Yubo WANG

IPC: G03F7/00 ,  H05G2/00

CPC classification number: G03F7/70925 ,  G03F7/70033 ,  G03F7/70175 ,  H05G2/006

Abstract: An exposure apparatus includes a droplet supplier to supply a target droplet inside a vacuum chamber, an irradiator irradiating a pulsed laser onto the target droplet, a condensing mirror installed inside the vacuum chamber and configured to condense a light emitted from the target droplet by irradiation of the pulsed laser onto the target droplet, a gas supplier to flow a hydrogen gas along a surface of the condensing mirror, a controller to change a supply condition of the target droplet and an irradiation condition of the pulsed laser to conditions different from conditions during an exposure operation to increase an amount of production of hydrogen radicals in the vacuum chamber, and an exhaust pump to exhaust a gas from an inside of the vacuum chamber.

公开(公告)号：US20230305282A1

公开(公告)日：2023-09-28

申请号：US18175452

申请日：2023-02-27

Applicant: Samsung Electronics Co., Ltd.

Inventor： Ken OZAWA ,  Shinji UEYAMA ,  Tomoki ONISHI

IPC: G02B21/00 ,  G02B21/06 ,  G02B21/36

CPC classification number: G02B21/0092 ,  G02B21/06 ,  G02B21/361

Abstract: The polarized microscope includes a light source configured to generate illumination light, a polarizer configured to interact with the generated illumination light to transmit rectilinear polarized light having a first orientation, an analyzer configured to transmit a component of rectilinear polarized light reflected by a sample, the reflected rectilinear polarized light having a second orientation, an image obtainer configured to obtain an image of the reflected rectilinear polarized light, and an image processor configured to process the obtained image, wherein the image processor is configured to calculate a device integer, obtain a plurality of hysteresis loops for each of regions of interest (ROIs), and calculate a rotation angle of a Kerr rotation of each ROI by using the device integer and the plurality of hysteresis loops.

公开(公告)号：US20190025226A1

公开(公告)日：2019-01-24

申请号：US16037088

申请日：2018-07-17

Applicant: Samsung Electronics Co., Ltd.

Inventor： Akio ISHIKAWA ,  Ken OZAWA ,  Kwang-Soo KIM ,  Sean PARK ,  Mitsunori NUMATA

IPC: G01N21/88 ,  G02B27/42 ,  G06T7/00

CPC classification number: G01N21/8806 ,  G01N21/956 ,  G01N2201/06 ,  G02B27/42 ,  G06T7/0002 ,  G06T2207/10152

Abstract: An imaging apparatus includes an illumination light source to output an illumination light, an illumination optical system to transmit the illumination light toward a sample, an imaging optical system to transmit light reflected from the sample, a stage to move the sample in a predetermined transfer direction, and a photographing unit to receive the reflected light. The imaging apparatus may include one or more diffraction grids located at conjugate focal planes of the sample. The operation of the photographing unit may be synchronized with a movement of the sample by the stage to obtain an image in accordance with a time delay integration method.