公开(公告)号：US20230193450A1

公开(公告)日：2023-06-22

申请号：US18167761

申请日：2023-02-10

Applicant: Samsung Display Co., LTD.

Inventor： Kyubum Kim ,  Sungjin Kim ,  Chunyoung Park ,  Uno Chang

IPC: C23C14/04 ,  G03F7/20 ,  H01L21/687 ,  H01L21/677 ,  H10K71/00

CPC classification number: C23C14/042 ,  G03F7/707 ,  G03F7/70733 ,  H01L21/67745 ,  H01L21/68764 ,  H01L21/68778 ,  H10K71/00 ,  B05B12/22

Abstract: A carrier, an apparatus for manufacturing a display apparatus and including the carrier, and a method of manufacturing a display apparatus are provided. The carrier includes a body portion; an electro permanent magnetic chuck arranged on a boundary portion of the body portion and configured to selectively fix a mask assembly; and a substrate fixing unit arranged in the body portion to selectively fix a display substrate.

公开(公告)号：US20160293472A1

公开(公告)日：2016-10-06

申请号：US15179677

申请日：2016-06-10

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Seok-Rak Chang ,  Myeng-Woo Nam ,  Hee-Cheol Kang ,  Jong-Heon Kim ,  Jong-Won Hong ,  Uno Chang

IPC: H01L21/683 ,  H01L51/56 ,  H01L21/677 ,  H01L27/32 ,  B05B15/04 ,  C23C14/24 ,  C23C14/50 ,  C23C14/04 ,  B05B13/02 ,  H01L21/67 ,  B05D1/00

CPC classification number: C23C14/12 ,  B05B12/20 ,  B05B12/22 ,  B05B13/0221 ,  B05D1/60 ,  C23C14/042 ,  C23C14/24 ,  C23C14/50 ,  H01L21/67173 ,  H01L21/67709 ,  H01L21/6776 ,  H01L21/67784 ,  H01L21/6831 ,  H01L27/3244 ,  H01L27/3246 ,  H01L51/56

Abstract: An organic layer deposition apparatus, and a method of manufacturing an organic light-emitting display device using the organic layer deposition apparatus. The organic layer deposition apparatus includes: an electrostatic chuck that fixedly supports a substrate that is a deposition target; a deposition unit including a chamber maintained at a vacuum and an organic layer deposition assembly for depositing an organic layer on the substrate fixedly supported by the electrostatic chuck; and a first conveyor unit for moving the electrostatic chuck fixedly supporting the substrate into the deposition unit, wherein the first conveyor unit passes through inside the chamber, and the first conveyor unit includes a guide unit having a receiving member for supporting the electrostatic chuck to be movable in a direction.

Abstract translation: 有机层沉积装置以及使用有机层沉积装置的有机发光显示装置的制造方法。 有机层沉积装置包括：静电卡盘，其固定地支撑作为沉积靶的基板; 包括保持真空的室的沉积单元和用于在由静电卡盘固定地支撑的基板上沉积有机层的有机层沉积组件; 以及第一传送单元，用于将固定地支撑所述基板的所述静电卡盘移动到所述沉积单元中，其中所述第一输送单元穿过所述室内部，并且所述第一输送单元包括导向单元，所述引导单元具有用于支撑所述静电卡盘的接收构件 可沿方向移动

公开(公告)号：US09777364B2

公开(公告)日：2017-10-03

申请号：US15179677

申请日：2016-06-10

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Seok-Rak Chang ,  Myeng-Woo Nam ,  Hee-Cheol Kang ,  Jong-Heon Kim ,  Jong-Won Hong ,  Uno Chang

IPC: B65G35/00 ,  C23C14/12 ,  C23C14/50 ,  H01L21/67 ,  H01L21/677 ,  H01L21/683 ,  B05B13/02 ,  B05B15/04 ,  B05D1/00 ,  C23C14/04 ,  C23C14/24 ,  H01L27/32 ,  H01L51/56

CPC classification number: C23C14/12 ,  B05B12/20 ,  B05B12/22 ,  B05B13/0221 ,  B05D1/60 ,  C23C14/042 ,  C23C14/24 ,  C23C14/50 ,  H01L21/67173 ,  H01L21/67709 ,  H01L21/6776 ,  H01L21/67784 ,  H01L21/6831 ,  H01L27/3244 ,  H01L27/3246 ,  H01L51/56

Abstract: An organic layer deposition apparatus, and a method of manufacturing an organic light-emitting display device using the organic layer deposition apparatus. The organic layer deposition apparatus includes: an electrostatic chuck that fixedly supports a substrate that is a deposition target; a deposition unit including a chamber maintained at a vacuum and an organic layer deposition assembly for depositing an organic layer on the substrate fixedly supported by the electrostatic chuck; and a first conveyor unit for moving the electrostatic chuck fixedly supporting the substrate into the deposition unit, wherein the first conveyor unit passes through inside the chamber, and the first conveyor unit includes a guide unit having a receiving member for supporting the electrostatic chuck to be movable in a direction.

公开(公告)号：US11618940B2

公开(公告)日：2023-04-04

申请号：US16531866

申请日：2019-08-05

Applicant: Samsung Display Co., Ltd.

Inventor： Kyubum Kim ,  Sungjin Kim ,  Chunyoung Park ,  Uno Chang

IPC: C23C14/04 ,  H01L51/56 ,  G03F7/20 ,  H01L21/687 ,  H01L21/677 ,  B05B12/22

Abstract: A method of manufacturing a display apparatus includes: sequentially fixing a display substrate and a mask assembly to a carrier; transporting the mask assembly and the display substrate to a deposition unit via the carrier; and depositing a deposition material on the display substrate by passing the deposition material through the mask assembly, by using the deposition unit.

公开(公告)号：US11597994B2

公开(公告)日：2023-03-07

申请号：US16531866

申请日：2019-08-05

Applicant: Samsung Display Co., Ltd.

Inventor： Kyubum Kim ,  Sungjin Kim ,  Chunyoung Park ,  Uno Chang

IPC: C23C14/04 ,  H01L51/56 ,  G03F7/20 ,  H01L21/687 ,  H01L21/677 ,  B05B12/22

Abstract: A method of manufacturing a display apparatus includes: sequentially fixing a display substrate and a mask assembly to a carrier; transporting the mask assembly and the display substrate to a deposition unit via the carrier; and depositing a deposition material on the display substrate by passing the deposition material through the mask assembly, by using the deposition unit.