SEMICONDUCTOR APPARATUS AND FABRICATION METHOD THEREOF
    5.
    发明申请
    SEMICONDUCTOR APPARATUS AND FABRICATION METHOD THEREOF 审中-公开
    半导体器件及其制造方法

    公开(公告)号:US20140175537A1

    公开(公告)日:2014-06-26

    申请号:US13845693

    申请日:2013-03-18

    Applicant: SK HYNIX INC.

    CPC classification number: H01L27/1203 H01L21/26533 H01L21/84

    Abstract: The semiconductor apparatus includes a semiconductor substrate, an insulating layer formed in the semiconductor substrate to be spaced from a surface of the semiconductor substrate by a predetermined depth and formed to extend to a first direction to have a predetermined width, and an active region formed to be in contact with the semiconductor substrate below the insulating layer through a source post that is formed to vertically penetrate a predetermined portion of the insulating layer, and formed on the insulating layer and the source post to extend to the first direction to have a predetermined width.

    Abstract translation: 半导体装置包括:半导体衬底;形成在半导体衬底中的绝缘层,以与半导体衬底的表面间隔预定深度并形成为延伸到具有预定宽度的第一方向;以及有源区形成为 通过形成为垂直穿过绝缘层的预定部分的源极与绝缘层下方的半导体衬底接触,并且形成在绝缘层和源极柱上以向第一方向延伸以具有预定宽度 。

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