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公开(公告)号：US20170160307A1
公开(公告)日：2017-06-08
申请号：US15320372
申请日：2015-07-03
Inventor： KIYOHIKO TAKAGI , RITSU NAKAYOSHI , YOUHEI SHIMADA , MASANORI YAMAUCHI , TAKASHI IMANAKA
IPC: G01P15/08
CPC classification number: G01P15/08 , G01C19/5656 , G01L1/26 , G01P15/123 , G01P15/125 , G01P2015/0871 , G01P2015/0874
Abstract: A sensor includes a first substrate, a first protruding portion provided on an upper surface of the first substrate, a support portion provided on the upper surface of the first substrate, a beam portion supported at a first end of the beam portion by the support portion, and a weight portion provided to a second end of the beam portion. The upper surface of the first protruding portion has a first surface and a second surface. The second surface is located above the first surface with the upper surface of the first substrate as a reference.
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公开(公告)号：US20170089941A1
公开(公告)日：2017-03-30
申请号：US15128096
申请日：2015-04-07
Inventor： TAKASHI IMANAKA , TAKANORI AOYAGI , TAKAMI ISHIDA , HIROYUKI AIZAWA
CPC classification number: G01P15/08 , B81B2201/0235 , B81B2203/0181 , B81B2203/053 , B81B2207/095 , B81B2207/096 , B81C1/00301 , G01P15/0802 , G01P15/123 , G01P15/125 , G01P15/18 , G01P2015/0831 , G01P2015/0837 , G01P2015/0871
Abstract: A sensor includes an upper lid layer, a lower lid layer, and a sensor layer disposed between the upper lid layer and the lower lid layer. One of the upper lid layer and the lower lid layer includes an insulative region mainly made of glass, a via-electrode covered with the insulative region, and an outer circumferential region mainly made of silicon and provided at an outer circumference of the insulative region. This sensor allows reducing outer dimensions of a wafer, which is a material for the sensor.
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公开(公告)号：US20160258975A1
公开(公告)日：2016-09-08
申请号：US15156329
申请日：2016-05-17
Inventor： ATSUHIRO FUJII , TAKASHI IMANAKA , YUICHI MIYOSHI , HIROYUKI AIZAWA
CPC classification number: G01P15/0802 , B81B2203/0118 , G01P15/12 , G01P21/00 , G01P2015/0828
Abstract: An acceleration sensor includes a detection device, an opposed electrode, and a top lid. The detection device includes an active layer, a base layer, an oxide layer disposed between the active layer and the base layer, a first insulating layer, a contact portion, and a self-check electrode. The first insulating layer is disposed on the active layer at a side opposite to the oxide layer and provided with a first opening. The contact portion is disposed on a part of the first insulating layer at a side opposite to the active layer and includes a first metal layer connected to the active layer through the first opening. The opposed electrode is disposed at a location opposing the self-check electrode, and the top lid supports the opposed electrode.
Abstract translation: 加速度传感器包括检测装置，相对电极和顶盖。 检测装置包括有源层，基底层，设置在有源层和基底层之间的氧化物层，第一绝缘层，接触部分和自检电极。 第一绝缘层在与氧化物层相对的一侧设置在有源层上并且设置有第一开口。 接触部分在与有源层相对的一侧设置在第一绝缘层的一部分上，并且包括通过第一开口连接到有源层的第一金属层。 相对电极设置在与自检电极相对的位置，顶盖支撑相对电极。
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公开(公告)号：US20190242709A1
公开(公告)日：2019-08-08
申请号：US16340863
申请日：2017-12-19
Inventor： TAKASHI IMANAKA , SHOICHI TAJI , SOICHIRO HIRAOKA , KATSUYA MORINAKA
IPC: G01C19/5769 , B81B7/00 , B81C1/00 , G01C19/5733
CPC classification number: G01C19/5769 , B81B7/0051 , B81B7/02 , B81B2201/0235 , B81B2201/0242 , B81B2203/0127 , B81B2203/0353 , B81C1/00325 , B81C2201/0105 , B81C2201/0112 , B81C2201/0132 , B81C2203/036 , G01C19/5733 , G01C19/5747 , H01L29/84
Abstract: A sensor includes a sensor substrate, and an upper lid substrate joined to an upper surface of the sensor substrate. The sensor substrate includes a fixed part, a deformable beam connected to the fixed part, and a weight connected to the beam. The weight is movable relative to the fixed part. The upper lid substrate includes a first part containing silicon and a second part joined to the first part and containing glass. The first part includes a projection protruding toward the sensor substrate relative to the second part. The sensor has high accuracy or high reliability.
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