公开(公告)号：US20190242709A1

公开(公告)日：2019-08-08

申请号：US16340863

申请日：2017-12-19

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： TAKASHI IMANAKA ,  SHOICHI TAJI ,  SOICHIRO HIRAOKA ,  KATSUYA MORINAKA

IPC: G01C19/5769 ,  B81B7/00 ,  B81C1/00 ,  G01C19/5733

CPC classification number: G01C19/5769 ,  B81B7/0051 ,  B81B7/02 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2203/0127 ,  B81B2203/0353 ,  B81C1/00325 ,  B81C2201/0105 ,  B81C2201/0112 ,  B81C2201/0132 ,  B81C2203/036 ,  G01C19/5733 ,  G01C19/5747 ,  H01L29/84

Abstract: A sensor includes a sensor substrate, and an upper lid substrate joined to an upper surface of the sensor substrate. The sensor substrate includes a fixed part, a deformable beam connected to the fixed part, and a weight connected to the beam. The weight is movable relative to the fixed part. The upper lid substrate includes a first part containing silicon and a second part joined to the first part and containing glass. The first part includes a projection protruding toward the sensor substrate relative to the second part. The sensor has high accuracy or high reliability.

公开(公告)号：US20160258812A1

公开(公告)日：2016-09-08

申请号：US15026989

申请日：2014-12-12

Applicant: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.

Inventor： MITSUHIRO OKADA ,  SOICHIRO HIRAOKA

IPC: G01J3/26 ,  G02B26/00 ,  G01J3/02

CPC classification number: G01J3/26 ,  G01J3/0205 ,  G01J3/021 ,  G01J3/0259 ,  G02B26/001

Abstract: A variable wavelength optical filter module according to the present invention includes a package, a variable wavelength optical filter, and a detector. The package includes a reflection part (reflecting faces) in the inside of the package. The variable wavelength optical filter is disposed in the inside of the package and includes a first reflecting plate and a second reflecting plate facing each other, with a clearance between the first reflecting plate and the second reflecting plate being variable. The detector is disposed in the inside of the package and detects a ray of light having passed through the variable wavelength optical filter. Then, the variable wavelength optical filter and the detector are disposed on the opposite side to the reflection part (reflecting faces). The ray of the light incident into the inside of the package via the variable wavelength optical filter enters the detector via the reflection part (reflecting faces).

Abstract translation: 根据本发明的可变波长光学滤波器模块包括封装，可变波长光学滤波器和检测器。 该包装包括在包装内部的反射部分（反射面）。 可变波长滤光器设置在封装的内部，并且包括彼此面对的第一反射板和第二反射板，第一反射板和第二反射板之间的间隙是可变的。 检测器设置在封装的内部，并检测通过可变波长滤光器的光线。 然后，可变波长滤光器和检测器设置在与反射部（反射面）相反的一侧。 通过可变波长滤光器入射到包装内部的光线经由反射部分（反射面）进入检测器。

公开(公告)号：US20150116803A1

公开(公告)日：2015-04-30

申请号：US14591267

申请日：2015-01-07

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： TOSHIAKI HORIE ,  SHINSUKE NAKAZONO ,  SOICHIRO HIRAOKA ,  SHIGEO FURUKAWA ,  YUTA YAMAMOTO ,  KAZUKI KOMAKI ,  MASAKI TADA

IPC: G02B26/10

CPC classification number: G02B26/101 ,  B81B3/0045 ,  B81B2201/042 ,  B81B2203/0163 ,  G02B7/1821 ,  G02B26/0833 ,  G02B26/0858 ,  G02B26/105

Abstract: An optical reflecting device includes a fixed frame, a pair of first oscillation parts, a movable frame, a pair of second oscillation parts, and a mirror part. One-side ends of the first oscillation parts are connected to the inside of the fixed frame. The movable frame is connected to and held by the other-side ends of the pair of first oscillation parts to be pivotable. One-side ends of the pair of second oscillation parts are connected to the inside of the movable frame and the pair of second oscillation parts are disposed to be substantially perpendicular to the pair of first oscillation parts. The mirror part is connected to and held by the other-side ends of the pair of second oscillation parts to be pivotable. The first oscillation parts have a meandering shape in which a plurality of straight portions and a plurality of folded portions are formed, and a stepped structure portion is provided in part of the folded portion.

Abstract translation: 光学反射装置包括固定框架，一对第一振动部件，可动框架，一对第二振动部件和反射镜部件。 第一振动部分的一端连接到固定框架的内部。 可移动框架连接到一对第一振动部件的另一侧端部并由其保持以可枢转。 一对第二振荡部的一端连接到可动框架的内侧，并且一对第二振荡部被配置为大致垂直于该对第一振动部。 镜部分连接到一对第二振动部件的另一侧端部并由其保持以可枢转。 第一振动部件具有弯曲形状，其中形成多个直线部分和多个折叠部分，并且在折叠部分的一部分设置有阶梯状结构部分。