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公开(公告)号：US20190041211A1
公开(公告)日：2019-02-07
申请号：US16075127
申请日：2017-03-03
Inventor： KATSUYA MORINAKA , KAORU TONE
IPC: G01C19/5663 , G01C19/5747 , G01C19/5783 , H01L41/113 , G01P1/04 , G01P15/08
Abstract: A disclosed sensor includes a substrate, a substrate electrode, a sensor element, a sensor electrode, and a connection member. The substrate has a main face. The substrate electrode is disposed on the main face. The sensor element has a first face perpendicular to the main face, and detects an angular velocity about an axis parallel to the main face. The sensor electrode is disposed on the first face of the sensor element. The connection member connects the substrate electrode and the sensor electrode. The width of the sensor electrode at a position closer to the main face is smaller than the width of the sensor electrode at a position farther from the main face.
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公开(公告)号：US20190242709A1
公开(公告)日：2019-08-08
申请号：US16340863
申请日：2017-12-19
Inventor： TAKASHI IMANAKA , SHOICHI TAJI , SOICHIRO HIRAOKA , KATSUYA MORINAKA
IPC: G01C19/5769 , B81B7/00 , B81C1/00 , G01C19/5733
CPC classification number: G01C19/5769 , B81B7/0051 , B81B7/02 , B81B2201/0235 , B81B2201/0242 , B81B2203/0127 , B81B2203/0353 , B81C1/00325 , B81C2201/0105 , B81C2201/0112 , B81C2201/0132 , B81C2203/036 , G01C19/5733 , G01C19/5747 , H01L29/84
Abstract: A sensor includes a sensor substrate, and an upper lid substrate joined to an upper surface of the sensor substrate. The sensor substrate includes a fixed part, a deformable beam connected to the fixed part, and a weight connected to the beam. The weight is movable relative to the fixed part. The upper lid substrate includes a first part containing silicon and a second part joined to the first part and containing glass. The first part includes a projection protruding toward the sensor substrate relative to the second part. The sensor has high accuracy or high reliability.
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