公开(公告)号：US20190041211A1

公开(公告)日：2019-02-07

申请号：US16075127

申请日：2017-03-03

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： KATSUYA MORINAKA ,  KAORU TONE

IPC: G01C19/5663 ,  G01C19/5747 ,  G01C19/5783 ,  H01L41/113 ,  G01P1/04 ,  G01P15/08

Abstract: A disclosed sensor includes a substrate, a substrate electrode, a sensor element, a sensor electrode, and a connection member. The substrate has a main face. The substrate electrode is disposed on the main face. The sensor element has a first face perpendicular to the main face, and detects an angular velocity about an axis parallel to the main face. The sensor electrode is disposed on the first face of the sensor element. The connection member connects the substrate electrode and the sensor electrode. The width of the sensor electrode at a position closer to the main face is smaller than the width of the sensor electrode at a position farther from the main face.