公开(公告)号：US20160258975A1

公开(公告)日：2016-09-08

申请号：US15156329

申请日：2016-05-17

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： ATSUHIRO FUJII ,  TAKASHI IMANAKA ,  YUICHI MIYOSHI ,  HIROYUKI AIZAWA

IPC: G01P15/08 ,  G01P15/12

CPC classification number: G01P15/0802 ,  B81B2203/0118 ,  G01P15/12 ,  G01P21/00 ,  G01P2015/0828

Abstract: An acceleration sensor includes a detection device, an opposed electrode, and a top lid. The detection device includes an active layer, a base layer, an oxide layer disposed between the active layer and the base layer, a first insulating layer, a contact portion, and a self-check electrode. The first insulating layer is disposed on the active layer at a side opposite to the oxide layer and provided with a first opening. The contact portion is disposed on a part of the first insulating layer at a side opposite to the active layer and includes a first metal layer connected to the active layer through the first opening. The opposed electrode is disposed at a location opposing the self-check electrode, and the top lid supports the opposed electrode.

Abstract translation: 加速度传感器包括检测装置，相对电极和顶盖。 检测装置包括有源层，基底层，设置在有源层和基底层之间的氧化物层，第一绝缘层，接触部分和自检电极。 第一绝缘层在与氧化物层相对的一侧设置在有源层上并且设置有第一开口。 接触部分在与有源层相对的一侧设置在第一绝缘层的一部分上，并且包括通过第一开口连接到有源层的第一金属层。 相对电极设置在与自检电极相对的位置，顶盖支撑相对电极。