公开(公告)号：US20170160307A1

公开(公告)日：2017-06-08

申请号：US15320372

申请日：2015-07-03

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： KIYOHIKO TAKAGI ,  RITSU NAKAYOSHI ,  YOUHEI SHIMADA ,  MASANORI YAMAUCHI ,  TAKASHI IMANAKA

IPC: G01P15/08

CPC classification number: G01P15/08 ,  G01C19/5656 ,  G01L1/26 ,  G01P15/123 ,  G01P15/125 ,  G01P2015/0871 ,  G01P2015/0874

Abstract: A sensor includes a first substrate, a first protruding portion provided on an upper surface of the first substrate, a support portion provided on the upper surface of the first substrate, a beam portion supported at a first end of the beam portion by the support portion, and a weight portion provided to a second end of the beam portion. The upper surface of the first protruding portion has a first surface and a second surface. The second surface is located above the first surface with the upper surface of the first substrate as a reference.