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64 条记录 (耗时 0.022 秒)

    Automated guided vehicle
    1.
    发明授权
    Automated guided vehicle 失效
    自动导引车

    公开(公告)号：US6019563A

    公开(公告)日：2000-02-01

    申请号：US59361

    申请日：1998-04-14

    申请人： Masanao Murata ,  Tatsuo Tsubaki ,  Hitoshi Kawano

    发明人： Masanao Murata ,  Tatsuo Tsubaki ,  Hitoshi Kawano

    IPC分类号： B23Q7/14 ,  B25J5/00 ,  B25J5/02 ,  B65G49/07 ,  H01L21/00 ,  H01L21/677 ,  B25J19/00

    CPC分类号： H01L21/67724 ,  B23Q7/1436 ,  B23Q7/1442 ,  B25J5/007 ,  B25J5/02 ,  H01L21/67259 ,  H01L21/67736 ,  G05B2219/37286 ,  G05B2219/40203 ,  G05B2219/50393 ,  Y10S414/14

    摘要： An automated guided vehicle includes a transporting portion having an upper surface and a driving device, the transporting portion being movable by the driving device; a transferring device provided on the upper surface of the transporting portion, the transferring device being capable of transferring a workpiece to or from an apparatus; and a mounting portion formed on the upper surface of the transporting portion, the mounting portion having at least two opening portions which allow an operation for transferring the workpiece. In the automated guided vehicle, photosensors are respectively arranged on the opening portions to detect an object which intrudes into a predetermined area or projects from the predetermined area, and a control device monitors a state of the photosensors and controls the transferring device or the driving device in accordance with the state of the photosensors.

    摘要翻译： 一种自动引导车包括具有上表面和驱动装置的传送部分，该传送部分可由驱动装置移动; 传送装置，其设置在所述传送部的上表面上，所述传送装置能够将工件传送到设备或从设备传送; 以及形成在所述输送部的上表面上的安装部，所述安装部具有至少两个开口部，所述至少两个开口部允许用于传送所述工件的操作。 在自动导引车辆中，光敏传感器分别布置在开口部分上以检测入侵到预定区域中的物体或从预定区域突出的物体，并且控制装置监视光传感器的状态并控制传送装置或驱动装置 按照照相机的状态。

    Direction change device
    2.
    发明申请
    Direction change device 审中-公开
    换向装置

    公开(公告)号：US20070186799A1

    公开(公告)日：2007-08-16

    申请号：US11705461

    申请日：2007-02-13

    申请人： Senzo Kyutoku ,  Tatsuo Tsubaki ,  Masanao Murata

    发明人： Senzo Kyutoku ,  Tatsuo Tsubaki ,  Masanao Murata

    IPC分类号： B61J1/00

    CPC分类号： B61J1/00 ,  H01L21/67715 ,  H01L21/6773

    摘要： A direction change device includes first and second transport passage 3, 4, in which one of the transport passages is disposed at the same vertical position as that of the first transport rail 16, the other is disposed below the one, a rotating unit 22 rotating the transport passages 3, 4 about their central points, a lift unit 23 lifting the transport passages 3, 4 in a vertical direction and a control unit 21. The control unit 21 controls such that when the FOUP 5 is carried out from the transport rail 16 to the transport passage disposed at the same vertical position as that of the transport rail 16, rotating the transport passages 3, 4 by about 90°, carrying out the FOUP 5 from one of the transport passages, and exchanging the respective vertical positions of the first and second transport passages 3, 4.

    摘要翻译： 方向改变装置包括第一和第二输送通道3,4，其中一个输送通道设置在与第一输送轨道16相同的垂直位置，另一个位于该第一输送通道3,4的下方，旋转单元22旋转 输送通道3,4围绕它们的中心点，提升单元23沿垂直方向提升输送通道3,4，控制单元21.控制单元21控制使得当FOUP5从输送轨道 16传送到与​​输送轨道16相同的垂直位置处的输送通道，使输送通道3,4旋转约90°，从其中一个输送通道中进行FOUP 5的交换， 第一和第二输送通道3,4。

    Transport apparatus
    3.
    发明申请
    Transport apparatus 审中-公开
    运输设备

    公开(公告)号：US20070193859A1

    公开(公告)日：2007-08-23

    申请号：US11708065

    申请日：2007-02-20

    申请人： Senzo Kyutoku ,  Tatsuo Tsubaki ,  Masanao Murata

    发明人： Senzo Kyutoku ,  Tatsuo Tsubaki ,  Masanao Murata

    IPC分类号： B65G13/02

    CPC分类号： B65G47/643 ,  B65G13/10 ,  H01L21/67715 ,  H01L21/6773

    摘要： A branch portion 2c is provided with a branch track 6 for guiding a carrier 8 having been guided in a straight line direction so as to change the traveling direction thereof, and a linear track 5 for guiding the carrier in the straight line direction. A switching unit switches between the branch track 6 and the linear track 5 so as to guide the carrier 8 by one of the branch track 6 and the linear track 5 in accordance with the traveling direction of the carrier 8.

    摘要翻译： 分支部分2c设置有用于引导沿直线方向被引导以便改变其行进方向的载体8的分支轨道6和用于沿直线方向引导载体的线性轨道5。 切换单元在分支轨道6和线性轨道5之间切换，以便根据载体8的行进方向引导载体8由分支轨迹6和线性轨道5中的一个引导。

    Turntable
    4.
    发明申请
    Turntable 审中-公开
    转盘

    公开(公告)号：US20070205081A1

    公开(公告)日：2007-09-06

    申请号：US11705508

    申请日：2007-02-13

    申请人： Senzo Kyutoku ,  Tatsuo Tsubaki ,  Masanao Murata

    发明人： Senzo Kyutoku ,  Tatsuo Tsubaki ,  Masanao Murata

    IPC分类号： B65G47/24

    CPC分类号： B65G43/08 ,  B65G47/54 ,  B65G47/80 ,  B65G2201/0297

    摘要： A turntable has a plurality of intra-table tracks, each of which includes inlet and outlet end portion that is capable of communicating with a carrying-in and carrying-out side of the transporting track, respectively, wherein an object is transported from the inlet end portion to the outlet end portion, a table member on which the intra-table tracks are provided, a table rotating mechanism that rotates the table member to be stopped at an arbitrary rotation angle and a table rotation controlling mechanism. The table rotation controlling mechanism controls the rotation of the table member so as to set the transport direction of the transporting object transported through the intra-table tracks. The intra-table tracks are disposed in the table member so that when a transport direction of one of the intra-table tracks is set, the inlet end portion of any other intra-table tracks communicates with the carrying-in side of the transporting track.

    摘要翻译： 转盘具有多个台内轨道，每个台内轨道分别包括能够与输送轨道的进入和运出侧连通的入口端部和出口端部分，其中物体从入口 端部部分，设置有台内轨道的工作台构件，以及以任意的旋转角度旋转待停止的工作台构件的工作台旋转机构和工作台旋转控制机构。 工作台旋转控制机构控制工作台构件的旋转，以便设定通过工作台内轨道传送的传送对象的传送方向。 台内轨道设置在桌面构件中，使得当设置一个台内轨道的传送方向时，任何其它台内轨道的入口端部分与传送轨迹的传入侧通信 。

    Wafer airtight keeping unit and keeping facility thereof
    6.
    发明授权
    Wafer airtight keeping unit and keeping facility thereof 失效
    晶圆密封单元及其保持设备

    公开(公告)号：US5303482A

    公开(公告)日：1994-04-19

    申请号：US826954

    申请日：1992-01-28

    申请人： Teppei Yamashita ,  Masanao Murata ,  Tsuyoshi Tanaka ,  Teruya Morita ,  Hitoshi Kawano ,  Atsushi Okuno ,  Masanori Tsuda ,  Mitsuhiro Hayashi ,  Hiromi Morita

    发明人： Teppei Yamashita ,  Masanao Murata ,  Tsuyoshi Tanaka ,  Teruya Morita ,  Hitoshi Kawano ,  Atsushi Okuno ,  Masanori Tsuda ,  Mitsuhiro Hayashi ,  Hiromi Morita

    IPC分类号： H01L21/677 ,  F26B21/06

    CPC分类号： H01L21/67769 ,  Y10S414/14

    摘要： A wafer keeping apparatus includes a closed wafer keeping space, and an arrangement for circulating an inert gas through a filter and then through the wafer keeping space. In one embodiment, several wafer keeping shelves are each provided within the space, and the inert gas is supplied through a respective filter to flow across each shelf. In another embodiment, a plurality of wafer keeping spaces are each accessible through a respective door which forms an airtight seal when it is closed, and respective filters are provided on opposite sides of the space, the inert gas being supplied to the space through one filter and exiting the space through the other filter. In a further embodiment, several of the wafer keeping spaces are provided at angularly and vertically spaced locations in a rotatable stocker body provided within a casing, and several vertically spaced doors are provided on the casing to provide access to respective wafer keeping spaces in the stocker body.

    摘要翻译： 晶片保存装置包括封闭的晶片保持空间，以及用于使惰性气体通过过滤器然后通过晶片保持空间循环的装置。 在一个实施例中，在该空间内分别提供几个晶片保持架，并且惰性气体通过相应的过滤器供应流过每个搁架。 在另一个实施例中，多个晶片保持空间各自可通过相应的门接近，门在关闭时形成气密密封，并且各个过滤器设置在空间的相对侧上，惰性气体通过一个过滤器 并通过另一个过滤器离开空间。 在另一个实施例中，几个晶片保持空间设置在设置在壳体内的可转动的储带架主体中的角度和垂直间隔的位置处，并且几个垂直间隔的门设置在壳体上以提供对存储器中的相应晶片保持空间的访问 身体。

    Electronic substrate processing system using portable closed containers
    8.
    发明授权
    Electronic substrate processing system using portable closed containers 失效
    电子基板处理系统采用便携式密闭容器

    公开(公告)号：US5746008A

    公开(公告)日：1998-05-05

    申请号：US803818

    申请日：1997-02-24

    申请人： Teppei Yamashita ,  Masanao Murata ,  Tsuyoshi Tanaka ,  Teruya Morita ,  Hitoshi Kawano ,  Mitsuhiro Hayashi ,  Atsushi Okuno ,  Akio Nakamura

    发明人： Teppei Yamashita ,  Masanao Murata ,  Tsuyoshi Tanaka ,  Teruya Morita ,  Hitoshi Kawano ,  Mitsuhiro Hayashi ,  Atsushi Okuno ,  Akio Nakamura

    IPC分类号： H01L21/00 ,  H01L21/677 ,  G26B19/00

    CPC分类号： H01L21/67757 ,  H01L21/67057 ,  H01L21/67769 ,  H01L21/67772

    摘要： Disclosed is an electronic substrate processing system comprising a processing equipment for processing electronic substrates including semiconductor wafers and liquid crystal substrates; a cleaning equipment for cleaning said electronic substrate in a predetermined processing step; a portable closed container for accommodating a cassette containing said electronic substrate; a purging station for gas-purging said portable closed containers; and a storage member for storing said portable closed containers, wherein said cassette accommodates said electronic substrates which have been cleaned by said cleaning equipment being set in said portable closed container and purged with an inert gas in said purging station, and said portable closed container or containers is stored in said storing section when necessary.

    摘要翻译： 公开了一种电子基板处理系统，包括用于处理包括半导体晶片和液晶基板的电子基板的处理设备; 用于在预定处理步骤中清洁所述电子基板的清洁设备; 用于容纳包含所述电子基板的盒的便携式密闭容器; 用于吹扫所述便携式密闭容器的清洗站; 以及用于存储所述便携式封闭容器的存储构件，其中所述盒容纳已经被所述清洁设备清洁的所述电子基板设置在所述便携式密闭容器中并在所述清洗站中用惰性气体吹扫，并且所述便携式密闭容器或 必要时将容器储存在所述储存部分中。

    Overhead conveying device and overhead conveying vehicle
    10.
    发明授权
    Overhead conveying device and overhead conveying vehicle 失效
    架空输送装置和架空输送车

    公开(公告)号：US06427824B1

    公开(公告)日：2002-08-06

    申请号：US09446194

    申请日：1999-12-17

    申请人： Masanao Murata ,  Teruya Morita ,  Hitoshi Kawano

    发明人： Masanao Murata ,  Teruya Morita ,  Hitoshi Kawano

    IPC分类号： B65G3700

    CPC分类号： B66C7/12 ,  B66C11/06 ,  B66C11/08 ,  Y10S414/14

    摘要： An overhead conveyance device and an overhead conveyance vehicle that can convey a conveying object, while keeping it at a minimum distance from surrounding equipment when the overhead conveying vehicle turns around during conveyance of the conveying object. The overhead conveyance device (1) is so structured that even when a carriage part (6) of the overhead conveyance vehicle (5) enters a branching part (3) for allowing the carriage part to change in traveling direction and turns around, the conveying object (25) grasped by a hand (9) can be kept unchanged in direction.

    摘要翻译： 一种架空输送装置和架空输送车辆，其能够在输送物体的输送期间在架空输送车辆转过时将输送物体输送到与周围设备的最小距离处。 架空输送装置（1）的结构使得即使当顶棚运输车辆（5）的托架部分（6）进入分支部分（3）以允许托架部分在行进方向上改变并转动时，输送 用手（9）抓住的物体（25）可以在方向上保持不变。