发明申请
- 专利标题: Direction change device
- 专利标题(中): 换向装置
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申请号: US11705461申请日: 2007-02-13
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公开(公告)号: US20070186799A1公开(公告)日: 2007-08-16
- 发明人: Senzo Kyutoku , Tatsuo Tsubaki , Masanao Murata
- 申请人: Senzo Kyutoku , Tatsuo Tsubaki , Masanao Murata
- 专利权人: ASYST SHINKO, INC.
- 当前专利权人: ASYST SHINKO, INC.
- 优先权: JPP.2006-036572 20060214
- 主分类号: B61J1/00
- IPC分类号: B61J1/00
摘要:
A direction change device includes first and second transport passage 3, 4, in which one of the transport passages is disposed at the same vertical position as that of the first transport rail 16, the other is disposed below the one, a rotating unit 22 rotating the transport passages 3, 4 about their central points, a lift unit 23 lifting the transport passages 3, 4 in a vertical direction and a control unit 21. The control unit 21 controls such that when the FOUP 5 is carried out from the transport rail 16 to the transport passage disposed at the same vertical position as that of the transport rail 16, rotating the transport passages 3, 4 by about 90°, carrying out the FOUP 5 from one of the transport passages, and exchanging the respective vertical positions of the first and second transport passages 3, 4.
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