公开(公告)号：US20170345639A1

公开(公告)日：2017-11-30

申请号：US15223335

申请日：2016-07-29

Applicant: KLA-Tencor Corporation

Inventor： Ilya Bezel ,  Kenneth P. Gross ,  Lauren Wilson ,  Rahul Yadav ,  Joshua Wittenberg ,  Aizaz Bhuiyan ,  Anatoly Shchemelinin ,  Anant Chimmalgi ,  Richard Solarz

IPC: H01J61/12 ,  H01J61/36 ,  H01J61/02

CPC classification number: H01J61/12 ,  H01J61/025 ,  H01J61/16 ,  H01J61/20 ,  H01J61/36 ,  H01J65/04

Abstract: A system for forming a laser-sustained plasma includes a gas containment element, an illumination source configured to generate pump illumination, and a collector element configured to focus the pump illumination from the pumping source into the volume of the gas mixture in order to generate a plasma within the volume of the gas mixture that emits broadband radiation. The gas containment element may be configured to contain a volume of a gas mixture including a first gas component and a second gas component. The second gas component suppresses at least one of a portion of the broadband radiation associated with the first gas component or radiation by one or more excimers associated with the first gas component from a spectrum of radiation exiting the gas mixture.

公开(公告)号：US20150282288A1

公开(公告)日：2015-10-01

申请号：US14675322

申请日：2015-03-31

Applicant: KLA-Tencor Corporation

Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Richard Solarz ,  Sebaek Oh ,  Matthew Derstine

IPC: H05G2/00

CPC classification number: H05G2/003 ,  H01J61/025 ,  H01J61/302 ,  H01J65/042 ,  H05G2/001 ,  H05G2/008

Abstract: A laser-sustained plasma light source for transverse plasma pumping includes a pump source configured to generate pumping illumination, one or more illumination optical elements and a gas containment structure configured to contain a volume of gas. The one or more illumination optical elements are configured to sustain a plasma within the volume of gas of the gas containment structure by directing pump illumination along a pump path to one or more focal spots within the volume of gas. The one or more collection optical elements are configured to collect broadband radiation emitted by the plasma along a collection path. Further, the illumination optical elements are configured to define the pump path such that pump illumination impinges the plasma along a direction transverse to a direction of propagation of the emitted broadband light of the collection path such that the pump illumination is substantially decoupled from the emitted broadband radiation.

Abstract translation: 用于横向等离子体泵浦的激光维持等离子体光源包括被配置为产生泵浦照明的泵浦源，一个或多个照明光学元件和被配置为容纳一定体积的气体的气体容纳结构。 一个或多个照明光学元件被配置为通过沿着泵路径将泵浦照明引导到气体体积内的一个或多个焦点，来维持气体容纳结构的气体体积内的等离子体。 一个或多个收集光学元件被配置为收集由等离子体沿着收集路径发射的宽带辐射。 此外，照明光学元件被配置为限定泵路径，使得泵照明沿着横向于收集路径的发射宽带光的传播方向的方向照射等离子体，使得泵浦照明基本上与发射的宽带 辐射。

公开(公告)号：US09899205B2

公开(公告)日：2018-02-20

申请号：US15223335

申请日：2016-07-29

Applicant: KLA-Tencor Corporation

Inventor： Ilya Bezel ,  Kenneth P. Gross ,  Lauren Wilson ,  Rahul Yadav ,  Joshua Wittenberg ,  Aizaz Bhuiyan ,  Anatoly Shchemelinin ,  Anant Chimmalgi ,  Richard Solarz

IPC: H01J61/12 ,  H01J61/02 ,  H01J61/36

CPC classification number: H01J61/12 ,  H01J61/025 ,  H01J61/16 ,  H01J61/20 ,  H01J61/36 ,  H01J65/04

Abstract: A system for forming a laser-sustained plasma includes a gas containment element, an illumination source configured to generate pump illumination, and a collector element configured to focus the pump illumination from the pumping source into the volume of the gas mixture in order to generate a plasma within the volume of the gas mixture that emits broadband radiation. The gas containment element may be configured to contain a volume of a gas mixture including a first gas component and a second gas component. The second gas component suppresses at least one of a portion of the broadband radiation associated with the first gas component or radiation by one or more excimers associated with the first gas component from a spectrum of radiation exiting the gas mixture.

公开(公告)号：US09723703B2

公开(公告)日：2017-08-01

申请号：US14675322

申请日：2015-03-31

Applicant: KLA-Tencor Corporation

Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Richard Solarz ,  Sebaek Oh ,  Matthew Derstine

IPC: H05G2/00 ,  H01J61/02 ,  H01J61/30 ,  H01J65/04

CPC classification number: H05G2/003 ,  H01J61/025 ,  H01J61/302 ,  H01J65/042 ,  H05G2/001 ,  H05G2/008

Abstract: A laser-sustained plasma light source for transverse plasma pumping includes a pump source configured to generate pumping illumination, one or more illumination optical elements and a gas containment structure configured to contain a volume of gas. The one or more illumination optical elements are configured to sustain a plasma within the volume of gas of the gas containment structure by directing pump illumination along a pump path to one or more focal spots within the volume of gas. The one or more collection optical elements are configured to collect broadband radiation emitted by the plasma along a collection path. Further, the illumination optical elements are configured to define the pump path such that pump illumination impinges the plasma along a direction transverse to a direction of propagation of the emitted broadband light of the collection path such that the pump illumination is substantially decoupled from the emitted broadband radiation.

公开(公告)号：US09615439B2

公开(公告)日：2017-04-04

申请号：US14989348

申请日：2016-01-06

Applicant: KLA-Tencor Corporation

Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Kenneth P. Gross ,  Richard Solarz ,  Lauren Wilson ,  Rahul Yadav ,  Joshua Wittenberg ,  Anant Chimmalgi ,  Xiumei Liu ,  Brooke Bruguier

IPC: H05G2/00 ,  H01J65/00

CPC classification number: H05G2/008 ,  H01J61/16 ,  H01J65/00 ,  H01J65/04 ,  H05G2/003

Abstract: A system for forming a laser-sustained plasma includes a gas containment element, an illumination source configured to generate pump illumination, and a collector element. The gas containment element is configured to contain a volume of a gas mixture. The collector element is configured to focus the pump illumination from the pumping source into the volume of the gas mixture contained within the gas containment element in order to generate a plasma within the volume of the gas mixture that emits broadband radiation. The gas mixture filters one or more selected wavelengths of radiation emitted by the plasma.

公开(公告)号：US20160205758A1

公开(公告)日：2016-07-14

申请号：US14989348

申请日：2016-01-06

Applicant: KLA-Tencor Corporation

Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Kenneth P. Gross ,  Richard Solarz ,  Lauren Wilson ,  Rahul Yadav ,  Joshua Wittenberg ,  Anant Chimmalgi ,  Xiumei Liu ,  Brooke Bruguier

IPC: H05G2/00

CPC classification number: H05G2/008 ,  H01J61/16 ,  H01J65/00 ,  H01J65/04 ,  H05G2/003

Abstract: A system for forming a laser-sustained plasma includes a gas containment element, an illumination source configured to generate pump illumination, and a collector element. The gas containment element is configured to contain a volume of a gas mixture. The collector element is configured to focus the pump illumination from the pumping source into the volume of the gas mixture contained within the gas containment element in order to generate a plasma within the volume of the gas mixture that emits broadband radiation. The gas mixture filters one or more selected wavelengths of radiation emitted by the plasma.

Abstract translation: 用于形成激光维持等离子体的系统包括气体容纳元件，被配置为产生泵浦照明的照明源和收集器元件。 气体容纳元件构造成容纳一定体积的气体混合物。 收集器元件被配置为将来自泵送源的泵浦照明聚焦到容纳在气体容纳元件内的气体混合物的体积中，以便在发射宽带辐射的气体混合物的体积内产生等离子体。 气体混合物过滤由等离子体发射的一个或多个选定波长的辐射。