公开(公告)号：US20240060777A1

公开(公告)日：2024-02-22

申请号：US18172455

申请日：2023-02-22

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Fumito MIYAZAKI ,  Hiroki HIRAGA ,  Kengo UCHIDA ,  Shiori KAJI ,  Yasushi TOMIZAWA ,  Kei MASUNISHI ,  Daiki ONO ,  Ryunosuke GANDO

IPC: G01C19/56

CPC classification number: G01C19/56

Abstract: According to one embodiment, a sensor includes a base body, a support member, and a movable member. The base body includes a first face including a first base region. The support member is fixed to the first base region. The support member includes a support portion and an extending portion. The extending portion is connected to the support portion. The extending portion extends along a second direction crossing a first direction from the first base region to the support portion. A first width of the support portion in a third direction crossing a plane including the first direction and the second direction is wider than a second width of the extending portion in the third direction. The movable member is supported by the extending portion. A first gap is provided between the first face and the movable member.

公开(公告)号：US20230152099A1

公开(公告)日：2023-05-18

申请号：US17818095

申请日：2022-08-08

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Ryunosuke GANDO ,  Daiki ONO ,  Yasushi TOMIZAWA ,  Fumito MIYAZAKI ,  Shiori KAJI ,  Kei MASUNISHI ,  Hiroki HIRAGA ,  Etsuji OGAWA ,  Kengo UCHIDA

IPC: G01C19/5776

CPC classification number: G01C19/5776

Abstract: According to one embodiment, a sensor includes a sensor element, a housing provided around the sensor element, and a processor. The sensor element includes a base body including first and second base body regions, and first and second sensor parts. The first sensor part is provided in the first base body region, and includes a first sensor movable part. The second sensor part is provided in the second base body region and includes first and second beams. The processor can derive a rotation angle and an angular velocity based on a signal obtained from the first sensor movable part. The processor can detect acceleration and a temperature based on a first resonance frequency of the first beam and a second resonance frequency of the second beam. The processor can correct one of the rotation angle or the angular velocity based on one of the temperature or the acceleration.

公开(公告)号：US20230152097A1

公开(公告)日：2023-05-18

申请号：US17818243

申请日：2022-08-08

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Ryunosuke GANDO ,  Daiki ONO ,  Yasushi TOMIZAWA ,  Fumito MIYAZAKI ,  Shiori KAJI

IPC: G01C19/5712 ,  G01C25/00

CPC classification number: G01C19/5712 ,  G01C25/005

Abstract: According to one embodiment, a sensor includes a sensor element, and a controller. The sensor element includes a first sensor part. The first sensor part includes a first movable part which can vibrate. Vibration of the first movable part includes a first component and a second component. The controller is configured to perform to third mode operations. In the first mode operation, the controller is configured to derive a first rotation angle of the first movable part based on a first amplitude of the first component and a second amplitude of the second component. In the second mode operation, the controller is configured to derive a first angular velocity of the first movable part based on a change of a control signal. In the third mode operation, the controller is configured to supply a third mode signal to the first sensor part.

公开(公告)号：US20160282101A1

公开(公告)日：2016-09-29

申请号：US14887749

申请日：2015-10-20

Applicant: Kabushiki Kaisha Toshiba

Inventor： Shiori KAJI ,  Hideaki FUKUZAWA ,  Tomohiko NAGATA ,  Akio HORI ,  Yoshihiko FUJI

IPC: G01B7/24 ,  G01L9/00

CPC classification number: G01B7/24 ,  G01B7/18 ,  G01L9/0042 ,  G01L9/16

Abstract: According to one embodiment, a strain sensing element includes a film unit being deformable, a first and a second magnetic unit, and a strain sensor. The first magnetic unit is provided on the film unit and is arranged with the film unit in a first direction. The first magnetic unit includes a first magnetic body layer and a first intermediate magnetic layer. The second magnetic unit is provided on the film unit and is arranged with the first magnetic unit in a second direction crossing the first direction. The second magnetic unit includes a second magnetic body layer and a second intermediate magnetic layer. The strain sensor is provided on the film unit between the first magnetic unit and the second magnetic unit. An electrical characteristic of the strain sensor changes according to a deformation of the film unit.

Abstract translation: 根据一个实施例，应变传感元件包括可变形的膜单元，第一和第二磁性单元以及应变传感器。 第一磁性单元设置在胶片单元上，并且将胶片单元布置在第一方向上。 第一磁性单元包括第一磁性体层和第一中间磁性层。 第二磁性单元设置在胶片单元上，并且与第一磁性单元布置在与第一方向交叉的第二方向上。 第二磁性单元包括第二磁性体层和第二中间磁性层。 应变传感器设置在第一磁性单元和第二磁性单元之间的胶片单元上。 应变传感器的电特性根据胶片单元的变形而变化。

公开(公告)号：US20150082900A1

公开(公告)日：2015-03-26

申请号：US14471252

申请日：2014-08-28

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Yoshihiko FUJI ,  Hideaki FUKUZAWA ,  Shiori KAJI

IPC: G01L1/12

CPC classification number: G01L1/125 ,  G01L9/007 ,  H04R2201/003 ,  H04R2499/11

Abstract: According to one embodiment, a strain sensing element to be provided on a deformable substrate, the element includes: a reference layer; a magnetization free layer; and a spacer layer. Magnetization of the magnetization free layer changes in accordance with deformation of the substrate. The spacer layer is provided between the reference layer and the magnetization free layer. The magnetization free layer has: a first magnetic layer; a second magnetic layer; and a magnetic coupling layer. The first magnetic layer is provided in contact with the spacer layer. The second magnetic layer is provided to be separated from the first magnetic layer. The magnetic coupling layer is provided between the first magnetic layer and the second magnetic layer. Magnetization of the first magnetic layer is anti-parallel to magnetization of the second magnetic layer.

Abstract translation: 根据一个实施例，应变传感元件设置在可变形衬底上，该元件包括：参考层; 无磁化层; 和间隔层。 磁化自由层的磁化根据基板的变形而变化。 间隔层设置在参考层和无磁化层之间。 磁化自由层具有：第一磁性层; 第二磁性层; 和磁耦合层。 第一磁性层设置成与间隔层接触。 第二磁性层设置成与第一磁性层分离。 磁耦合层设置在第一磁性层和第二磁性层之间。 第一磁性层的磁化与第二磁性层的磁化反平行。

公开(公告)号：US20240019248A1

公开(公告)日：2024-01-18

申请号：US18175238

申请日：2023-02-27

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Hiroki HIRAGA ,  Yasushi TOMIZAWA ,  Kengo UCHIDA ,  Kei MASUNISHI ,  Fumito MIYAZAKI ,  Ryunosuke GANDO ,  Shiori KAJI ,  Etsuji OGAWA ,  Daiki ONO

IPC: G01C19/5769 ,  G01C19/5733

CPC classification number: G01C19/5769 ,  G01C19/5733

Abstract: According to one embodiment, a sensor includes a base body including a first face, a first support portion, a first movable portion, and a first insulating member. The first face includes a first base region, a second base region, and a third base region. The first support portion is fixed to the third base region. The first movable portion is supported by the first support portion. The first movable portion includes a first movable region and a second movable region. A first gap is provided between the first base region and the first movable region. The first insulating member is fixed to the second base region, and located between the second base region and the second movable region in a first direction from the third base region to the first support portion. A second gap is provided between the first insulating member and the second movable region.

公开(公告)号：US20190041285A1

公开(公告)日：2019-02-07

申请号：US16145763

申请日：2018-09-28

Applicant: Kabushiki Kaisha Toshiba

Inventor： Yoshihiko FUJI ,  Michiko HARA ,  Kei MASUNISHI ,  Yoshihiro HIGASHI ,  Shiori KAJI ,  Akiko YUZAWA ,  Akio HORI ,  Tomohiko NAGATA ,  Kazuaki OKAMOTO ,  Kenji OTSU ,  Shotaro BABA

IPC: G01L9/00 ,  A61B5/00 ,  H04R1/46 ,  A61B5/021

CPC classification number: G01L9/0091 ,  A61B5/021 ,  A61B5/6898 ,  A61B2562/0247 ,  A61B2562/12 ,  H04R1/46 ,  H04R15/00 ,  H04R2201/003 ,  H04R2499/11

Abstract: According to one embodiment, a sensor includes a deformable film portion, a first sensing element and a second sensing element. The first sensing element is fixed to the film portion, and includes a first magnetic layer of a first material, a first opposing magnetic layer, and a first intermediate layer. The first intermediate layer is provided between the first magnetic layer and the first opposing magnetic layer. The second sensing element is fixed to the film portion, and includes a second magnetic layer of a second material, a second opposing magnetic layer, and a second intermediate layer. The second material is different from the first material. The second intermediate layer is provided between the second magnetic layer and the second opposing magnetic layer.

公开(公告)号：US20180202793A1

公开(公告)日：2018-07-19

申请号：US15920492

申请日：2018-03-14

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Shiori KAJI ,  Hideaki FUKUZAWA ,  Tomohiko NAGATA ,  Akio HORI ,  Yoshihiko FUJI

IPC: G01B7/24 ,  G01L9/16 ,  G01B7/16 ,  G01L9/00

CPC classification number: G01B7/24 ,  G01B7/18 ,  G01L9/0042 ,  G01L9/16

Abstract: According to one embodiment, a strain sensing element includes a film unit being deformable, a first and a second magnetic unit, and a strain sensor. The first magnetic unit is provided on the film unit and is arranged with the film unit in a first direction. The first magnetic unit includes a first magnetic body layer and a first intermediate magnetic layer. The second magnetic unit is provided on the film unit and is arranged with the first magnetic unit in a second direction crossing the first direction. The second magnetic unit includes a second magnetic body layer and a second intermediate magnetic layer. The strain sensor is provided on the film unit between the first magnetic unit and the second magnetic unit. An electrical characteristic of the strain sensor changes according to a deformation of the film unit.

公开(公告)号：US20180156683A1

公开(公告)日：2018-06-07

申请号：US15888324

申请日：2018-02-05

Applicant: Kabushiki Kaisha Toshiba

Inventor： Kenji OTSU ,  Michiko HARA ,  Yoshihiko FUJI ,  Kei MASUNISHI ,  Akiko YUZAWA ,  Tomohiko NAGATA ,  Shiori KAJI ,  Yoshihiro HIGASHI ,  Kazuaki OKAMOTO ,  Shotaro BABA

IPC: G01L7/02 ,  G01B7/16

CPC classification number: G01L7/02 ,  G01B7/18 ,  G01L1/2287 ,  G01L9/0051

Abstract: According to one embodiment, a sensor includes a film portion and a first sensor portion. The film portion is deformable. The first sensor portion is provided at the film portion. The first sensor portion includes a first conductive layer, a second conductive layer, a first magnetic layer, a second magnetic layer, and a first intermediate layer. The second conductive layer is provided between the first conductive layer and the film portion. The first magnetic layer is provided between the first conductive layer and the second conductive layer. The second magnetic layer is provided between the first magnetic layer and the second conductive layer. The first intermediate layer is provided between the first magnetic layer and the second magnetic layer. A curvature of the first conductive layer is different from a curvature of at least a portion of the film portion.

公开(公告)号：US20170067791A1

公开(公告)日：2017-03-09

申请号：US15248412

申请日：2016-08-26

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Yoshihiko FUJI ,  Michiko HARA ,  Kei MASUNISHI ,  Yoshihiro HIGASHI ,  Shiori KAJI ,  Akiko YUZAWA ,  Akio HORI ,  Tomohiko NAGATA ,  Kazuaki OKAMOTO ,  Kenji OTSU ,  Shotaro BABA

IPC: G01L9/00 ,  A61B5/021 ,  A61B5/00 ,  H04R1/46

CPC classification number: G01L9/0091 ,  A61B5/021 ,  A61B5/6898 ,  A61B2562/0247 ,  A61B2562/12 ,  H04R1/46 ,  H04R15/00 ,  H04R2201/003 ,  H04R2499/11

Abstract: According to one embodiment, a sensor includes a deformable film portion, a first sensing element and a second sensing element. The first sensing element is fixed to the film portion, and includes a first magnetic layer of a first material, a first opposing magnetic layer, and a first intermediate layer. The first intermediate layer is provided between the first magnetic layer and the first opposing magnetic layer. The second sensing element is fixed to the film portion, and includes a second magnetic layer of a second material, a second opposing magnetic layer, and a second intermediate layer. The second material is different from the first material. The second intermediate layer is provided between the second magnetic layer and the second opposing magnetic layer.

Abstract translation: 根据一个实施例，传感器包括可变形膜部分，第一感测元件和第二感测元件。 第一感测元件被固定到膜部分，并且包括第一材料的第一磁性层，第一相对磁性层和第一中间层。 第一中间层设置在第一磁性层和第一相对的磁性层之间。 第二传感元件固定在胶片部分上，并包括第二材料的第二磁性层，第二相对磁性层和第二中间层。 第二种材料与第一种材料不同。 第二中间层设置在第二磁性层和第二相对磁性层之间。