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公开(公告)号：US11680316B2
公开(公告)日：2023-06-20
申请号：US17117111
申请日：2020-12-10
Applicant: Industrial Technology Research Institute
Inventor： Kuan-Chou Chen , Ching-Chiun Wang , Chih-Yung Huang , Muh-Wang Liang , Yi-Jiun Lin
IPC: C23C16/44 , C23C16/455 , C23C16/46
CPC classification number: C23C16/4401 , C23C16/4558 , C23C16/45504 , C23C16/45517 , C23C16/45519 , C23C16/45591 , C23C16/46
Abstract: A deposition apparatus including a chamber having a deposition area and a non-deposition area, a gas intake device communicated with the chamber, a gas annulus disposed in the chamber and surrounding the gas intake device, a carrier disposed in the deposition area and a retaining annulus disposed in chamber and surrounding the carrier. The gas intake device is disposed corresponding to the deposition area and configured to draw a process gas into the deposition area. The gas annulus is configured to generate an annular gas curtain in the deposition area. The carrier carries a deposited object, wherein the gas annulus is located between the gas intake device and the carrier. The deposited object is surrounded by the annular gas curtain. The retaining annulus has a plurality of through holes. The retaining annulus is located between the gas annulus and the carrier.
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公开(公告)号：US11320449B2
公开(公告)日：2022-05-03
申请号：US16701073
申请日：2019-12-02
Applicant: Industrial Technology Research Institute
Inventor： Chih-Yung Huang , Yao-Hsien Liu , Kuan-Chou Chen , Yi-Jiun Lin , Shih-Chin Lin , Ching-Chiun Wang
IPC: G01P13/00
Abstract: A visualization device for a flow field includes a chamber, a power supply, at least one pair of electrodes, and at least one flow field observation module. The flow field observation module includes a high-speed camera, a light detecting component, and a light filter component. The power supply outputs a voltage to generate a plasma, and the pair of electrodes is disposed in the chamber. The flow field observation module is disposed outside the chamber and captures an image of a fluid particle excited by the plasma toward the chamber. The light filter component is disposed between the high-speed camera and the chamber. The light detecting component obtains a light information within the chamber and sends the light information to the light filter component.
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公开(公告)号：US20180119273A1
公开(公告)日：2018-05-03
申请号：US15384333
申请日：2016-12-20
Applicant: Industrial Technology Research Institute
Inventor： Chih-Yung Huang , Shih-Chin Lin , Ching-Chiun Wang
CPC classification number: C23C14/505 , C23C14/228 , C23C14/24 , C23C14/243
Abstract: The disclosure is an evaporation apparatus and a method of evaporation using the same. The evaporation apparatus includes an evaporation chamber, an evaporation source, a carrying device, and a fluid disturbance device. The evaporation chamber has an evaporation space, the evaporation source is disposed at a lower part in the evaporation space, and the evaporation source is suitable for accommodating an evaporation source material. The carrying device is disposed to be rotatable about a reference axis as the center at an upper part in the evaporation space and is opposite to the evaporation source; the carrying device is suitable for carrying a substrate and positions the substrate between the evaporation source and the carrying device. The fluid disturbance device is suitable for injecting a disturbed fluid towards the carrying device in the evaporation space.
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Patent Agency Ranking
公开(公告)号：US20210132104A1
公开(公告)日：2021-05-06
申请号：US16701073
申请日：2019-12-02
Applicant: Industrial Technology Research Institute
Inventor： Chih-Yung Huang , Yao-Hsien Liu , Kuan-Chou Chen , Yi-Jiun Lin , Shih-Chin Lin , Ching-Chiun Wang
IPC: G01P13/00
Abstract: A visualization device for a flow field includes a chamber, a power supply, at least one pair of electrodes, and at least one flow field observation module. The flow field observation module includes a high-speed camera, a light detecting component, and a light filter component. The power supply outputs a voltage to generate a plasma, and the pair of electrodes is disposed in the chamber. The flow field observation module is disposed outside the chamber and captures an image of a fluid particle excited by the plasma toward the chamber. The light filter component is disposed between the high-speed camera and the chamber. The light detecting component obtains a light information within the chamber and sends the light information to the light filter component.
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公开(公告)号：US09962711B2
公开(公告)日：2018-05-08
申请号：US14953547
申请日：2015-11-30
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor： Chien-Chih Chen , Chih-Chen Chang , Chen-Der Tsai , Chih-Yung Huang
CPC classification number: B03C3/47 , B03C3/12 , B03C3/366 , B03C3/368 , B03C3/41 , B03C3/49 , B03C2201/06 , B03C2201/10
Abstract: An electrostatic air cleaner comprises a main body, a corona discharged module, a collector module and a fan. The main body has an airflow passage for disposing the corona discharged module, the collector module and the fan. The fan is used for drawing an air stream into the airflow passage. The corona discharged module is used for discharging particles in the air stream. The charged particles are then captured by the collector module.
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公开(公告)号：US20220119943A1
公开(公告)日：2022-04-21
申请号：US17117111
申请日：2020-12-10
Applicant: Industrial Technology Research Institute
Inventor： Kuan-Chou Chen , Ching-Chiun Wang , Chih-Yung Huang , Muh-Wang Liang , Yi-Jiun Lin
IPC: C23C16/455 , C23C16/46
Abstract: A deposition apparatus including a chamber having a deposition area and a non-deposition area, a gas intake device communicated with the chamber, a gas annulus disposed in the chamber and surrounding the gas intake device, a carrier disposed in the deposition area and a retaining annulus disposed in chamber and surrounding the carrier. The gas intake device is disposed corresponding to the deposition area and configured to draw a process gas into the deposition area. The gas annulus is configured to generate an annular gas curtain in the deposition area. The carrier carries a deposited object, wherein the gas annulus is located between the gas intake device and the carrier. The deposited object is surrounded by the annular gas curtain. The retaining annulus has a plurality of through holes. The retaining annulus is located between the gas annulus and the carrier.
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公开(公告)号：US20200154555A1
公开(公告)日：2020-05-14
申请号：US16223044
申请日：2018-12-17
Applicant: Industrial Technology Research Institute
Inventor： Chih-Yung Huang , Kuan-Chou Chen , Shih-Chin Lin , Yi-Jiun Lin , Ching-Chiun Wang
Abstract: A flow field visualization device includes a chamber, a power supply, at least one pair of electrodes, and at least two high-speed cameras. The power supply outputs a voltage for plasma generation, and the pair of electrodes is disposed in the chamber. The pair of electrodes includes a first electrode and a second electrode. The first electrode has a plurality of first tips, the second electrode has a plurality of second tips, and the first tips and the second tips are aligned with each other. The pair of electrodes generates a periodically densely distributed plasma by exciting a gas in the chamber through the voltage from the power supply. The high-speed cameras are disposed outside the chamber and are positioned in different directions corresponding to the pair of electrodes in order to capture images of different dimensions.
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公开(公告)号：US20160158766A1
公开(公告)日：2016-06-09
申请号：US14953547
申请日：2015-11-30
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor： CHIEN-CHIH CHEN , Chih-Chen Chang , Chen-Der Tsai , Chih-Yung Huang
CPC classification number: B03C3/47 , B03C3/12 , B03C3/366 , B03C3/368 , B03C3/41 , B03C3/49 , B03C2201/06 , B03C2201/10
Abstract: An electrostatic air cleaner comprises a main body, a corona discharged module, a collector module and a fan. The main body has an airflow passage for disposing the corona discharged module, the collector module and the fan. The fan is used for drawing an air stream into the airflow passage. The corona discharged module is used for discharging particles in the air stream. The charged particles are then captured by the collector module.
Abstract translation: 静电空气净化器包括主体，电晕放电模块，收集器模块和风扇。 主体具有用于布置电晕放电模块，收集器模块和风扇的气流通道。 风扇用于将气流吸入气流通道。 电晕放电模块用于排出气流中的颗粒。 带电粒子然后被收集器模块捕获。
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