公开(公告)号：US10073038B2

公开(公告)日：2018-09-11

申请号：US15305367

申请日：2015-04-28

Applicant: HORIBA JOBIN YVON SAS

Inventor： Simon Richard ,  Jean-Paul Gaston ,  Olivier Acher ,  Patrick Chapon

IPC: G01N21/67 ,  G01N21/68 ,  G01B11/22 ,  G01J3/443 ,  H01J37/32

CPC classification number: G01N21/67 ,  G01B11/22 ,  G01J3/443 ,  G01N21/68 ,  G01N2201/06113 ,  G01N2201/0612 ,  H01J37/32018 ,  H01J37/32963 ,  H01J37/32972 ,  H01J2237/334

Abstract: A glow discharge spectrometry system includes a glow discharge lamp suitable for receiving a solid sample (10) and forming a glow discharge etching plasma (19). The system (100) for measuring in situ the depth of the erosion crater generated by etching of the sample (10) includes an optical separator (3), optical elements (4) suitable for directing a first incident beam (21) toward a first zone (11) of the sample, the first zone being exposed to the etching plasma, and a second incident beam (22) toward a second zone (12) of the same side of the sample, the second zone being protected from the etching plasma, respectively, and an optical recombining device (3) suitable for forming an interferometric beam (30) so as to determine the depth (d) of the erosion crater.

公开(公告)号：US09638635B2

公开(公告)日：2017-05-02

申请号：US14649096

申请日：2013-11-29

Applicant: HORIBA JOBIN YVON SAS

Inventor： Olivier Acher ,  Simon Richard ,  Christian Brach ,  Viviane Millet ,  Sebastien Corde ,  Daphne Heran

IPC: G01J3/447 ,  G01N21/64 ,  G01J3/02 ,  G01J3/18 ,  G02B27/28 ,  G02B5/18

CPC classification number: G01N21/645 ,  G01J3/021 ,  G01J3/0224 ,  G01J3/18 ,  G01J3/447 ,  G01N2201/063 ,  G01N2201/0633 ,  G02B5/1866 ,  G02B27/283

Abstract: A spectrometer (100) for analyzing the spectrum of an upstream light beam (1), includes an entrance slit (101) and collimating elements (110) suitable for generating, from the upstream light beam, a collimated light beam (10), characterized in that it also includes: a polarization-dependent diffraction grating (120) suitable for diffracting, at each wavelength (11, 12) of the spectrum of the upstream light beam, the collimated light beam into a first diffracted light beam (11, 12) and a second diffracted light beam (21, 22); optical recombining elements (130) including a planar optical reflecting surface (130) perpendicular to the grating and suitable for deviating at least the second diffracted light beam; and focussing elements (140) suitable for focussing, at each wavelength, the first diffracted light beam and the second diffracted light beam onto one and the same focussing area (141).

公开(公告)号：US09551618B2

公开(公告)日：2017-01-24

申请号：US14417618

申请日：2013-07-25

Applicant: HORIBA JOBIN YVON SAS

Inventor： Olivier Acher ,  Simon Richard ,  Thanh-Liem Nguyen

IPC: G01J4/00 ,  G01J4/02 ,  G01J4/04

CPC classification number: G01J4/02 ,  G01J4/04

Abstract: An accurate and robust wavefront-division polarimetric analysis method and device, allows the quasi-instantaneous measurement of the polarization states of a luminous object. The device can be used to produce a plurality of light beams, all polarized according to different polarization states, from a single upstream light beam. The polarized light beams, which do not overlap and which carry information items that are complementary in terms of polarization, are analyzed simultaneously by a plurality of detectors that measure the luminous intensity of each beam. Processing elements digitally process the luminous intensity values obtained in order to determine the polarization state of the upstream light beam. The operations performed by the processing elements prevent luminous intensity variations in the split light beams during the division of the wavefront of the upstream light beam. Therefore, the wavefront-division polarimetric analysis device is robust and its accuracy is not hindered by the experimental conditions.

Abstract translation: 准确可靠的波前分割偏振分析方法和装置允许准瞬时测量发光物体的偏振状态。 该装置可用于从单个上游光束产生根据不同极化状态全部偏振的多个光束。 通过测量每个光束的发光强度的多个检测器同时分析不重叠并且携带在极化方面互补的信息项的偏振光束。 处理元件对获得的发光强度值进行数字处理，以确定上游光束的偏振状态。 由处理元件执行的操作防止在上游光束的波前划分期间分束光束的发光强度变化。 因此，波前分割极化分析装置是鲁棒的，其精度不受实验条件的影响。

公开(公告)号：US09709441B2

公开(公告)日：2017-07-18

申请号：US14649065

申请日：2013-11-29

Applicant: HORIBA JOBIN YVON SAS

Inventor： Olivier Acher ,  Simon Richard

IPC: G01J3/447 ,  G01J3/02

CPC classification number: G01J3/0224 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/1804 ,  G01J3/447 ,  G01J2003/1208

Abstract: A spectrometer (100) for analyzing the spectrum of an upstream light beam (1) includes an entrance slit (101) and angular dispersing elements (130). The angular dispersing elements include at least one polarization-dependent diffraction grating that is suitable for, at the plurality of wavelengths (1, 2, 3), diffracting a corrected light beam (20) into diffracted light beams (31, 32, 33) in a given particular diffraction order of the polarization-dependent diffraction grating, which is either the +1 diffraction order or the −1 diffraction order, when the corrected light beam has a preset corrected polarization state that is circular; and the spectrometer includes elements for modifying polarization (1100) placed between the entrance slit and the angular dispersion elements, which are suitable for modifying the polarization state of the upstream light beam in order to generate the corrected light beam with a preset corrected polarization state.

公开(公告)号：US20150204724A1

公开(公告)日：2015-07-23

申请号：US14417618

申请日：2013-07-25

Applicant: HORIBA JOBIN YVON SAS

Inventor： Olivier Acher ,  Simon Richard ,  Thanh-Liem Nguyen

IPC: G01J4/02

CPC classification number: G01J4/02 ,  G01J4/04

Abstract: An accurate and robust wavefront-division polarimetric analysis method and device, allows the quasi-instantaneous measurement of the polarization states of a luminous object. The device can be used to produce a plurality of light beams, all polarized according to different polarization states, from a single upstream light beam. The polarized light beams, which do not overlap and which carry information items that are complementary in terms of polarization, are analyzed simultaneously by a plurality of detectors that measure the luminous intensity of each beam. Processing elements digitally process the luminous intensity values obtained in order to determine the polarization state of the upstream light beam. The operations performed by the processing elements prevent luminous intensity variations in the split light beams during the division of the wavefront of the upstream light beam. Therefore, the wavefront-division polarimetric analysis device is robust and its accuracy is not hindered by the experimental conditions.

Abstract translation: 准确可靠的波前分割偏振分析方法和装置允许准瞬时测量发光物体的偏振状态。 该装置可用于从单个上游光束产生根据不同极化状态全部偏振的多个光束。 通过测量每个光束的发光强度的多个检测器同时分析不重叠并且携带在极化方面互补的信息项的偏振光束。 处理元件对获得的发光强度值进行数字处理，以确定上游光束的偏振状态。 由处理元件执行的操作防止在上游光束的波前划分期间分束光束的发光强度变化。 因此，波前分割极化分析装置是鲁棒的，其精度不受实验条件的影响。