公开(公告)号：US20240128702A1

公开(公告)日：2024-04-18

申请号：US18399011

申请日：2023-12-28

Applicant: Gigaphoton Inc.

Inventor： Shinichi MATSUMOTO

IPC: H01S3/00 ,  G03F7/00 ,  H01S3/23

CPC classification number: H01S3/0071 ,  G03F7/70025 ,  G03F7/7015 ,  G03F7/70191 ,  G03F7/70308 ,  G03F7/70316 ,  G03F7/70575 ,  H01S3/0057 ,  H01S3/2308

Abstract: A bypass apparatus is attachable to and detachable from a laser apparatus, and constitutes a bypass optical path bypassing a pulse width stretching apparatus stretching the pulse width of pulse laser light having entered the pulse width stretching apparatus, the bypass apparatus including optical elements constituting the bypass optical path, and an enclosure housing the optical elements, the optical elements including a first highly reflective mirror that reflects the pulse laser light entering the pulse width stretching apparatus out of the pulse width stretching apparatus and that guides the reflected pulse laser light to the bypass optical path, and a second highly reflective mirror reflecting the pulse laser light reflected off the first highly reflective mirror and incident on the second highly reflective mirror through the bypass optical path to cause the reflected pulse laser light to return to a light-exiting-side optical path of the pulse width stretching apparatus.

公开(公告)号：US20200014168A1

公开(公告)日：2020-01-09

申请号：US16571390

申请日：2019-09-16

Applicant: Gigaphoton Inc.

Inventor： Shinichi MATSUMOTO ,  Miwa IGARASHI

IPC: H01S3/137

Abstract: A line narrowing module includes a prism that refracts laser light in a first plane, a grating that disperses the laser light in the first plane, first to fourth elements, and a rotation mechanism and narrows the linewidth of the laser light. The second element is supported between the first and fourth elements by the first element. The rotation mechanism rotates the second element relative to the first element around an axis intersecting the first plane. The prism is located between the second and fourth elements and so supported by the second element that the rotation mechanism rotates the prism and the second element. The third element has elasticity and is compressed and located between the prism and the fourth element. The fourth element receives reaction force from the compressed third element. The second element is mechanically independent of the fourth element in the rotational direction of the rotation mechanism.

公开(公告)号：US20240146011A1

公开(公告)日：2024-05-02

申请号：US18408777

申请日：2024-01-10

Applicant: Gigaphoton Inc.

Inventor： Koji ASHIKAWA ,  Shinichi MATSUMOTO

IPC: H01S3/034 ,  H01S3/036 ,  H01S3/038 ,  H01S3/134 ,  H01S3/225

CPC classification number: H01S3/034 ,  H01S3/036 ,  H01S3/038 ,  H01S3/134 ,  H01S3/225

Abstract: A gas laser device includes a chamber device including electrodes at an inside thereof to be filled with laser gas and configured to output, through a window to an outside thereof, light generated from the laser gas when a voltage is applied to the electrodes; a mirror arranged at the outside of the chamber device and configured to reflect at least a part of the light output through the window; a holding portion holding the mirror; a support member configured to support the holding portion to be movable along a plane perpendicular to an optical axis of the light output through the window; a moving mechanism configured to move the holding portion with respect to the support member along the plane; and an angle maintaining mechanism configured to maintain an inclination angle of the holding portion with respect to the support member at a predetermined angle.

公开(公告)号：US20230061530A1

公开(公告)日：2023-03-02

申请号：US18053732

申请日：2022-11-08

Applicant: Gigaphoton Inc.

Inventor： Hitoshi OHGA ,  Shinichi MATSUMOTO ,  Hirotaka MIYAMOTO

IPC: H01S3/00

Abstract: A pulse width extension device includes a first delay optical system having a first loop optical path formed on a first plane and configured by a first beam splitter and a plurality of first concave mirrors, a second delay optical system having a second loop optical path formed on a second plane parallel to and different from the first plane and configured by a second beam splitter and a plurality of second concave mirrors, and a first beam rotation mechanism arranged on an optical path between the first delay optical system and the second delay optical system and configured to rotate a beam of pulse laser light having passed through the first delay optical system so that a longitudinal direction of a beam cross-sectional shape of the pulse laser light traveling on the second loop optical path is perpendicular to the second plane.

公开(公告)号：US20210336407A1

公开(公告)日：2021-10-28

申请号：US17372106

申请日：2021-07-09

Applicant: Gigaphoton Inc.

Inventor： Miwa IGARASHI ,  Shinichi MATSUMOTO

IPC: H01S3/137 ,  G03F7/20

Abstract: A line narrowing module includes a prism including an entrance side surface that light enters, an exit side surface from which the light is emitted, and a bottom surface, and configured to wavelength-disperse the light having entered the entrance side surface and to emit the light from the exit side surface; a holder portion having a stationary surface on which the bottom surface of the prism is secured; a rotary mechanism portion including a rotary stage on which the holder portion is secured, the rotary stage being configured to rotate the prism around an axis perpendicular to a dispersion plane of the light emitted from the prism; a drive unit configured to rotate the rotary stage; and a grating configured to reflect the light emitted from the prism, centroids of the prism, the holder portion, and the rotary stage being located on the axis.