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39 条记录 (耗时 0.017 秒)

    Inspection stage and inspection apparatus having a plurality of Z axes
    2.
    发明授权
    Inspection stage and inspection apparatus having a plurality of Z axes 失效
    具有多个Z轴的检查台和检查装置

    公开(公告)号：US06583614B2

    公开(公告)日：2003-06-24

    申请号：US09880117

    申请日：2001-06-14

    申请人： Kiyoshi Takekoshi

    发明人： Kiyoshi Takekoshi

    IPC分类号： G01R104

    CPC分类号： G01R31/2887

    摘要： An inspection stage including a chuck top, a rectangular Z base, an X stage, a Y stage, and a Z axis elevating mechanism. The chuck top is used for mounting a wafer W. The Z base is provided with the chuck top and is vertically movable. The X stage elevatingly supports the Z base and is movable in an X direction. The Y stage movably supports the X stage in the X direction and is movable in a Y direction. The Z axis elevating mechanism is provided at each of the four corners of the Z base in such a manner as to surround the chuck top.

    摘要翻译： 包括卡盘顶部，矩形Z底座，X台架，Y台架和Z轴升降机构的检查台。 卡盘顶部用于安装晶片W.Z底座设置有卡盘顶部并且是可垂直移动的。 X档升降支撑Z底座，可沿X方向移动。 Y台在X方向上可移动地支撑X台，并且可沿Y方向移动。 Z轴升降机构以围绕卡头顶部的方式设置在Z底座的四个角的每一个处。

    LCD testing apparatus
    3.
    发明授权
    LCD testing apparatus 失效
    液晶检测仪

    公开(公告)号：US5801545A

    公开(公告)日：1998-09-01

    申请号：US679115

    申请日：1996-07-12

    申请人： Kiyoshi Takekoshi ,  Tetsuji Ono ,  Hiromichi Fujihara

    发明人： Kiyoshi Takekoshi ,  Tetsuji Ono ,  Hiromichi Fujihara

    IPC分类号： G02F1/13 ,  G09G3/00 ,  G01R31/00

    CPC分类号： G09G3/006 ,  G02F1/1309

    摘要： An LCD assembly testing apparatus having a table for supporting the LCD assembly and for applying light to the back of the LCD assembly, and a transport mechanism for removing the LCD assembly from a cassette and transporting the LCD assembly onto the table. The transport mechanism has an arm for holding the LCD assembly, a first lift mechanism for vertical moving the arm, and a pre-alignment mechanism for receiving the LCD assembly and preliminary aligning the LCD assembly with the table. The pre-alignment mechanism has a plurality of support rollers for supporting the LCD assembly in a substantially horizontal position, four pairs of positioning rollers having axes intersecting at substantially right angles and located at level higher than the support rollers, for allowing the LCD assembly to fall naturally onto the support rollers and for holding corners of the LCD assembly, and a second lift mechanism for moving upwards the positioning rollers and the support rollers as the first lift mechanism moves the arm downwards.

    摘要翻译： 一种LCD组件测试装置，具有用于支撑LCD组件并用于将光施加到LCD组件的背面的工作台，以及用于将LCD组件从盒中移出并将LCD组件运送到工作台上的传送机构。 传送机构具有用于保持LCD组件的臂，用于垂直移动臂的第一提升机构，以及用于接收LCD组件和将LCD组件预先对准桌子的预对准机构。 预对准机构具有多个支撑辊，用于将LCD组件支撑在基本上水平的位置，四对定位辊具有以基本上直角相交且位于比支撑辊高的位置的轴线，以允许LCD组件 当LCD第一升降机构向下移动臂时，自然落在支撑辊上并用于保持LCD组件的角部的第二提升机构和用于向上移动定位辊和支撑辊的第二提升机构。

    Transfer apparatus for plate-like member
    4.
    发明授权
    Transfer apparatus for plate-like member 失效
    板状部件用转印装置

    公开(公告)号：US4941800A

    公开(公告)日：1990-07-17

    申请号：US260608

    申请日：1988-10-21

    申请人： Hisashi Koike ,  Itaru Takao ,  Masaki Narushima ,  Kiyoshi Takekoshi

    发明人： Hisashi Koike ,  Itaru Takao ,  Masaki Narushima ,  Kiyoshi Takekoshi

    IPC分类号： H01L21/677 ,  H01L21/683

    CPC分类号： H01L21/67778 ,  H01L21/6838

    摘要： A transfer apparatus for carrying a semiconductor wafer into a wafer cassette comprising an arm to load a semiconductor wafer thereon, a moving mechanism to move the arm to a wafer cassette, a chucking device to have a wafer attracted to the arm, and an auxiliary mechanism to push a wafer and adjust the position of the wafer to the inlet of a wafer cassette when the wafer comes into contact with the side wall of the wafer cassette.

    摘要翻译： 一种用于将半导体晶片携带到晶片盒中的转印装置，该晶片盒包括用于在其上装载半导体晶片的臂，用于将臂移动到晶片盒的移动机构，具有吸引到臂的晶片的夹持装置和辅助机构 当晶片与晶片盒的侧壁接触时，推动晶片并将晶片的位置调整到晶片盒的入口。

    Moving table apparatus
    5.
    发明授权
    Moving table apparatus 失效
    移动台设备

    公开(公告)号：US4896869A

    公开(公告)日：1990-01-30

    申请号：US263273

    申请日：1988-10-27

    申请人： Kiyoshi Takekoshi

    发明人： Kiyoshi Takekoshi

    IPC分类号： B23P19/04 ,  B23Q1/62 ,  H01L21/68

    CPC分类号： H01L21/68 ,  B23P19/04 ,  B23Q1/623

    摘要： A moving table apparatus includes a base, two guide rails laid on the base and extending in a direction Y, a first table capable of moving on rails, in direction Y, two guide rails laid on the first table and extending a direction X, and a second table capable of moving on the guide rails laid on the first table, in direction X. The first table has a main table located on the side of the base, a support table supporting the second table, and a pin supporting the support table what is rotatable relative to the main table. Before the main and support tables are fastened together by means of screws, the support table is rotated around the pin, thereby adjusting the angle between two straight lines extending in directions X and Y, respectively.

    摘要翻译： 移动台装置包括：基座，布置在基座上并沿Y方向延伸的两个导轨，能够沿Y方向在轨道上移动的第一工作台，布置在第一工作台上并延伸方向X的两个导轨，以及 第二工作台，其能够沿着方向X移动在布置在第一工作台上的导轨上。第一工作台具有位于基座侧的主工作台，支撑第二工作台的支撑台和支撑支承台的销 什么是相对于主桌可旋转？ 在通过螺钉将主支撑台紧固在一起之前，支撑台围绕销旋转，从而分别调整沿X方向和Y方向延伸的两条直线之间的角度。

    PROBE CARD FOR INSPECTING SOLID STATE IMAGING DEVICE
    6.
    发明申请
    PROBE CARD FOR INSPECTING SOLID STATE IMAGING DEVICE 失效
    用于检查固态成像装置的检测卡

    公开(公告)号：US20100013505A1

    公开(公告)日：2010-01-21

    申请号：US12441555

    申请日：2007-11-05

    申请人： Kiyoshi Takekoshi

    发明人： Kiyoshi Takekoshi

    IPC分类号： G01R31/02

    CPC分类号： G01R31/2887 ,  G01R1/07314 ,  G01R1/07357 ,  G01R31/2637

    摘要： The present invention is provided to quickly and efficiently inspect a plurality of CCD sensors. In the present invention, a plurality of openings is formed in a circuit board of a probe card. A plurality of vertical-type probe pins is connected to a lower surface of the circuit board. A guide board is installed at the lower surface of the circuit board, and respective probe pins are inserted into respective guide holes of the guide board. The guide board is made of a transparent glass board. During an inspection, inspection light emitted from a test head passes through the openings of the circuit board and the guide board, so that it is irradiated onto the plurality of CCD sensors on the substrate. Since the plurality of probe pins can be arranged at a narrow pitch without blocking the inspection light, adjacent CCD sensors on the substrate can be inspected simultaneously.

    摘要翻译： 提供本发明以快速有效地检查多个CCD传感器。 在本发明中，在探针卡的电路基板上形成有多个开口部。 多个垂直型探针连接到电路板的下表面。 引导板安装在电路板的下表面，相应的探针插入引导板的相应引导孔中。 导板由透明玻璃板制成。 在检查期间，从测试头发出的检查光通过电路板和引导板的开口，使其照射到基板上的多个CCD传感器上。 由于可以以窄的间距布置多个探针，而不会阻挡检查光，因此可以同时检查基板上的相邻的CCD传感器。

    Probe and Probe Card
    7.
    发明申请
    Probe and Probe Card 失效
    探头和探头卡

    公开(公告)号：US20080164892A1

    公开(公告)日：2008-07-10

    申请号：US11885426

    申请日：2006-03-01

    申请人： Kiyoshi Takekoshi

    发明人： Kiyoshi Takekoshi

    IPC分类号： G01R31/02

    CPC分类号： G01R1/06727 ,  G01R1/06716

    摘要： An object of the present invention is to make it possible that a probe for testing electrical characteristics of an object to be tested is easily attached to a support member such as a contactor. A through hole is formed in the contactor. In the probe, a fitting/locking portion which can be fitted in this through hole is formed. The fitting/locking portion is formed to penetrate the through hole of the contactor and to be locked in the contactor in a state that a tip thereof is in contact with a connecting terminal of a printed wiring board. The fitting/locking portion itself is locked in the contactor by hooking a locking portion thereof to an end face on an upper side of the through hole.

    摘要翻译： 本发明的目的是使得用于测试待测试物体的电特性的探针可容易地附接到诸如接触器的支撑构件。 在接触器中形成通孔。 在探针中，形成了可以安装在该通孔中的嵌合/锁定部。 装配/锁定部分形成为穿过接触器的通孔并且在其顶端与印刷线路板的连接端子接触的状态下被锁定在接触器中。 嵌合/锁定部分本身通过将其锁定部分钩在通孔上侧的端面上而被锁定在接触器中。

    Vacuum prober and vacuum probe method
    10.
    发明授权
    Vacuum prober and vacuum probe method 有权
    真空探头和真空探头法

    公开(公告)号：US07221176B2

    公开(公告)日：2007-05-22

    申请号：US11078305

    申请日：2005-03-14

    申请人： Haruhiko Yoshioka ,  Kiyoshi Takekoshi ,  Shinjiro Watanabe

    发明人： Haruhiko Yoshioka ,  Kiyoshi Takekoshi ,  Shinjiro Watanabe

    IPC分类号： G01R31/02

    CPC分类号： G01R31/2862 ,  G01R31/2891

    摘要： In a vacuum prober, a head plate is arranged on a prober chamber. A stage, first moving mechanism, recessed chamber, and sealing member are provided in the prober chamber. The stage is arranged below a probe card. The first moving mechanism vertically moves the stage in at least the Z direction. The recessed chamber has a bottom portion and side portion. A lower camera, an upper camera, and the stage are operated to obtain data for alignment. When the upper end of the side portion of the recessed chamber comes into tight contact with the lower surface of the sealing member and a vacuum mechanism evacuates the recessed chamber, a vacuum chamber is formed. As the chamber has a small capacity, the time required for evacuation can be shortened.

    摘要翻译： 在真空探测器中，头板安置在探测室上。 在探针室中设置有载物台，第一移动机构，凹室和密封构件。 舞台布置在探针卡下方。 第一移动机构至少沿Z方向垂直移动台。 凹室具有底部和侧部。 操作较低的摄像机，上摄像机和舞台，以获得对准的数据。 当凹室的侧部的上端与密封构件的下表面紧密接触并且真空机构抽空凹室时，形成真空室。 由于房间容量小，可以缩短撤离所需的时间。