发明授权
US09570607B2 Field-effect semiconductor device having alternating n-type and p-type pillar regions arranged in an active area 有权
具有布置在有源区域中的交替的n型和p型柱状区域的场效应半导体器件

Field-effect semiconductor device having alternating n-type and p-type pillar regions arranged in an active area
摘要:
In a field-effect semiconductor device, alternating first n-type and p-type pillar regions are arranged in the active area. The first n-type pillar regions are in Ohmic contact with the drain metallization. The first p-type pillar regions are in Ohmic contact with the source metallization. An integrated dopant concentration of the first n-type pillar regions substantially matches that of the first p-type pillar regions. A second p-type pillar region is in Ohmic contact with the source metallization, arranged in the peripheral area and has an integrated dopant concentration smaller than that of the first p-type pillar regions divided by a number of the first p-type pillar regions. A second n-type pillar region is arranged between the second p-type pillar region and the first p-type pillar regions, and has an integrated dopant concentration smaller than that of the first n-type pillar regions divided by a number of the first n-type pillar regions.
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