发明授权
US09570607B2 Field-effect semiconductor device having alternating n-type and p-type pillar regions arranged in an active area
有权
具有布置在有源区域中的交替的n型和p型柱状区域的场效应半导体器件
- 专利标题: Field-effect semiconductor device having alternating n-type and p-type pillar regions arranged in an active area
- 专利标题(中): 具有布置在有源区域中的交替的n型和p型柱状区域的场效应半导体器件
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申请号: US14934602申请日: 2015-11-06
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公开(公告)号: US09570607B2公开(公告)日: 2017-02-14
- 发明人: Hans-Joachim Schulze , Franz-Josef Niedernostheide , Anton Mauder , Joachim Weyers , Franz Hirler , Markus Schmitt , Armin Willmeroth , Björn Fischer , Stefan Gamerith
- 申请人: Infineon Technologies Austria AG
- 申请人地址: AT Villach
- 专利权人: Infineon Technologies Austria AG
- 当前专利权人: Infineon Technologies Austria AG
- 当前专利权人地址: AT Villach
- 代理机构: Murphy, Bilak & Homiller, PLLC
- 主分类号: H01L29/76
- IPC分类号: H01L29/76 ; H01L29/78 ; H01L29/66 ; H01L29/06 ; H01L29/10 ; H01L29/40
摘要:
In a field-effect semiconductor device, alternating first n-type and p-type pillar regions are arranged in the active area. The first n-type pillar regions are in Ohmic contact with the drain metallization. The first p-type pillar regions are in Ohmic contact with the source metallization. An integrated dopant concentration of the first n-type pillar regions substantially matches that of the first p-type pillar regions. A second p-type pillar region is in Ohmic contact with the source metallization, arranged in the peripheral area and has an integrated dopant concentration smaller than that of the first p-type pillar regions divided by a number of the first p-type pillar regions. A second n-type pillar region is arranged between the second p-type pillar region and the first p-type pillar regions, and has an integrated dopant concentration smaller than that of the first n-type pillar regions divided by a number of the first n-type pillar regions.
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