发明授权
US09063416B2 Resist composition, method of forming resist pattern and compound
有权
抗蚀剂组合物,抗蚀剂图案和化合物的形成方法
- 专利标题: Resist composition, method of forming resist pattern and compound
- 专利标题(中): 抗蚀剂组合物,抗蚀剂图案和化合物的形成方法
-
申请号: US13706771申请日: 2012-12-06
-
公开(公告)号: US09063416B2公开(公告)日: 2015-06-23
- 发明人: Yoshitaka Komuro , Yoshiyuki Utsumi , Akiya Kawaue , Toshiaki Hato
- 申请人: Tokyo Ohka Kogyo Co., Ltd.
- 申请人地址: JP Kawasaki-shi
- 专利权人: Tokyo Ohka Kogyo Co., Ltd.
- 当前专利权人: Tokyo Ohka Kogyo Co., Ltd.
- 当前专利权人地址: JP Kawasaki-shi
- 代理机构: Knobbe Martens Olson & Bear LLP
- 优先权: JP2011-273768 20111214
- 主分类号: G03F7/004
- IPC分类号: G03F7/004 ; C07C59/125 ; G03F7/027 ; G03F7/039 ; C07D313/10 ; C07D327/04 ; C07D333/46 ; C07D333/54 ; C07D333/76 ; C07D335/02 ; C07D335/16 ; C07C323/52 ; C07C381/12 ; C07D493/18 ; C07D307/00 ; C07D307/33 ; C07C25/18 ; C07C69/14 ; C07C69/63 ; C07C69/753 ; C07C69/78 ; C07C59/13 ; C07C59/66 ; C07C59/70 ; C07C62/04 ; C07D493/08
摘要:
A resist composition comprising: a base component (A) that exhibits changed solubility in a developing solution by the action of acid; a photoreactive quencher (C); and an acid-generator component (B) that generates acid upon exposure, wherein the photoreactive quencher (C) contains a compound represented by general formula (c1) shown below. In the formula, R1 represents a hydrogen atom or a hydrocarbon group of 1 to 20 carbon atoms which may have a substituent; each of R2 and R3 independently represents a hydrogen atom or a hydrocarbon group of 1 to 20 carbon atoms which may have a substituent; at least two of R1 to R3 may be mutually bonded to form a ring; X represents an oxygen atom or a sulfur atom; n represents 0 or 1; and Z+ represents an organic cation.
公开/授权文献
信息查询
IPC分类: