RADIATION-SENSITIVE RESIN COMPOSITION AND METHOD OF FORMING RESIST PATTERN

    公开(公告)号:US20220091507A1

    公开(公告)日:2022-03-24

    申请号:US17543789

    申请日:2021-12-07

    申请人: JSR CORPORATION

    摘要: A radiation-sensitive resin composition includes: a polymer which has a first structural unit including a phenolic hydroxyl group, and a second structural unit represented by formula (1); and a radiation-sensitive acid generating agent which has a compound represented by formula (2), R1 represents a hydrogen atom, or the like; R2 represents a hydrogen atom or the like; and R3 represents a divalent monocyclic alicyclic hydrocarbon group having 3 to 12 ring atoms. Ar1 represents a group obtained by removing (q+1) hydrogen atoms on an aromatic ring from an arene formed by condensation of at least two benzene rings; R4 represents a monovalent organic group having 1 to 20 carbon atoms; q is an integer of 0 to 7; and R5 represents a halogen atom, a hydroxy group, a nitro group, or a monovalent organic group having 1 to 20 carbon atoms, or the like.

    Method for the preparation of thiocarbonates

    公开(公告)号:US20220073492A1

    公开(公告)日:2022-03-10

    申请号:US17423518

    申请日:2020-01-17

    申请人: BASF SE

    IPC分类号: C07D327/04

    摘要: Provided is a process for the preparation of a compound with at least one five-membered cyclic monothiocarbonate group. A compound C1 with at least one halohydrin group is used as starting material. Compound C1 is reacted with phosgene or an alkyl chloroformate to give an adduct C2. The adduct C2 is reacted with a compound that includes anionic sulfur to obtain the compound with at least one five-membered cyclic monothiocarbonate group.