Invention Grant
US09029974B2 Semiconductor device, junction field effect transistor and vertical field effect transistor
有权
半导体器件,结场效应晶体管和垂直场效应晶体管
- Patent Title: Semiconductor device, junction field effect transistor and vertical field effect transistor
- Patent Title (中): 半导体器件,结场效应晶体管和垂直场效应晶体管
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Application No.: US14023819Application Date: 2013-09-11
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Publication No.: US09029974B2Publication Date: 2015-05-12
- Inventor: Romain Esteve , Jens Konrath , Daniel Kueck , David Laforet , Cedric Ouvrard , Roland Rupp , Andreas Voerckel , Wolfgang Werner
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Murphy, Bilak & Homiller, PLLC
- Main IPC: H01L29/47
- IPC: H01L29/47 ; H01L29/78 ; H01L29/06 ; H01L29/812 ; H01L29/872

Abstract:
A semiconductor device according to an embodiment is at least partially arranged in or on a substrate and includes a recess forming a mesa, wherein the mesa extends along a direction into the substrate to a bottom plane of the recess and includes a semiconducting material of a first conductivity type, the semiconducting material of the mesa including at least locally a first doping concentration not extending further into the substrate than the bottom plane. The semiconductor device further includes an electrically conductive structure arranged at least partially along a sidewall of the mesa, the electrically conductive structure forming a Schottky or Schottky-like electrical contact with the semiconducting material of the mesa, wherein the substrate comprises the semiconducting material of the first conductivity type comprising at least locally a second doping concentration different from the first doping concentration along a projection of the mesa into the substrate.
Public/Granted literature
- US20150069411A1 SEMICONDUCTOR DEVICE, JUNCTION FIELD EFFECT TRANSISTOR AND VERTICAL FIELD EFFECT TRANSISTOR Public/Granted day:2015-03-12
Information query
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