Invention Grant
- Patent Title: Applications operating with beams of charged particles
- Patent Title (中): 使用带电粒子束的应用
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Application No.: US10619690Application Date: 2003-07-16
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Publication No.: US06878936B2Publication Date: 2005-04-12
- Inventor: Oliver Kienzle , Rainer Knippelmeyer
- Applicant: Oliver Kienzle , Rainer Knippelmeyer
- Applicant Address: DE
- Assignee: Carl Zeiss NTS GmbH
- Current Assignee: Carl Zeiss NTS GmbH
- Current Assignee Address: DE
- Agency: Jones Day
- Priority: GE10232689 20020718
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G01N23/00 ; G01Q10/00 ; G01Q30/02 ; G02B21/06 ; G21K1/08 ; G21K7/00 ; H01J29/70 ; H01J37/04 ; H01J37/12 ; H01J37/14 ; H01J37/141 ; H01J37/145 ; H01J37/147 ; H01J37/244 ; H01J37/26 ; H01J37/28 ; H01J37/30 ; H01J37/305 ; H01L21/027
Abstract:
A particle-optical apparatus is proposed which comprises a particle-optical lens for deflecting a plurality of separate beam-charged particles which is provided by a plurality of finger electrodes provided along an opening of the lens.
Public/Granted literature
- US20040056193A1 Applications operating with beams of charged particles Public/Granted day:2004-03-25
Information query
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