发明授权
- 专利标题: Electron beam irradiating apparatus and electric signal detecting apparatus
- 专利标题(中): 电子束照射装置和电信号检测装置
-
申请号: US983229申请日: 1992-11-19
-
公开(公告)号: US5315119A公开(公告)日: 1994-05-24
- 发明人: Fumio Komatsu , Katsuya Okumura , Motosuke Miyoshi
- 申请人: Fumio Komatsu , Katsuya Okumura , Motosuke Miyoshi
- 申请人地址: JPX Kawasaki
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JPX Kawasaki
- 优先权: JPX316861 19911129
- 主分类号: G21K5/04
- IPC分类号: G21K5/04 ; H01J37/02 ; H01J37/147 ; H01J37/302 ; H01L21/66
摘要:
To prevent electric charge up from being accumulated on the plane scanned by an electron beam and further to improve the S/N ratio, an electron beam irradiating apparatus comprising: position information signal outputting section for outputting position information signals, in sequence to designate positions at which an electron beam is irradiated on a plane scanned by the electron beam, so as to designate the irradiation positions at random; and irradiation controller for controlling the electron beam to irradiate the electron beam at the irradiation positions in response to the outputted position information signals. Further, to integrate an photoelectric signal over a sufficient time interval within the period of the pixel clock signal, the electric signal detecting circuit comprises a plurality of sample hold circuits and a selecting circuit for selecting and activating the sample hold circuits in sequence.
公开/授权文献
- US5988093A Floating dock 公开/授权日:1999-11-23
信息查询