Invention Publication
- Patent Title: ELECTRONIC DEVICES COMPRISING A STEPPED PILLAR REGION, AND RELATED METHODS
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Application No.: US17897976Application Date: 2022-08-29
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Publication No.: US20240074184A1Publication Date: 2024-02-29
- Inventor: Masaaki Higuchi , Yoshiaki Fukuzumi , Hirokazu Ishigaki
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; G11C16/04 ; H01L27/11519 ; H01L27/11524 ; H01L27/11556 ; H01L27/11565 ; H01L27/1157
Abstract:
An electronic device comprises memory pillars comprising a channel material. The memory pillars extend through both a cell region and a lateral contact region. A portion of the memory pillars in the lateral contact region comprise at least one first step and at least one second step. The electronic device comprises a source contact in direct contact with the channel material in the at least one second step of the portion of the memory pillars in the lateral contact region. Additional electronic devices and methods of forming an electronic device are also disclosed.
Information query
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